December 2021
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Journal of Physics Conference Series
This work is aimed at finding the optimal technological modes for the deposition of TiO2 films by reactive magnetron sputtering for use as a photoactive material in plasmonic applications. The structural and optical parameters of films obtained at different ratios of oxygen in a mixture of working gases were studied. On the basis of the obtained experimental results, a numerical simulation of the spectral characteristics of the TiO2 / NP structure of the metals silver and gold was carried out.