Fig 1- - uploaded by Mohamed Serry
Content may be subject to copyright.
Source publication
Abstract: This paper introduces a novel MEMS gyroscope that is capable of exciting the drive mode differentially. The structure also decouples the drive and sense modes via an intermediate mass and
decoupling beams. Both drive and sense modes are fully differential enabling control over the zerorate-output for the former and maximizing output sensi...
Similar publications
Traditional MEMS gyroscope readout eliminates quadrature error and relies on the phase relationship between the drive displacement and the Coriolis position to accomplish a coherent demodulation. This scheme shows some risk, especially for a mode-matching gyro. If only a slight resonant frequency deviation between the drive and sense mode occurs, a...
This paper introduces a novel MEMS gyroscope that is capable of exciting the drive mode differentially. The structure also decouples the drive and sense modes via an intermediate mass and decoupling beams. Both drive and sense modes are fully differential enabling control over the zerorate-output for the former and maximizing output sensitivity usi...
We have fabricated a silicon MEMS resonator aiming at multimodal sensors, and evaluated vibration characteristics by electromagnetic drive and induced electromotive force detection. The resonance frequency of the driving voltage of 0.6 Vpp shows torsional vibration of approximately 87 kHz, and the resonance frequency is shifted toward the low‐frequ...
In this paper, a COMSOL Multiphysics-based methodology is presented for evaluation of the microelectromechanical systems (MEMS) gyroscope. The established finite element analysis (FEA) model was successfully validated through a comparison with analytical and Matlab/Simulink analysis results. A simplified single-drive, 3-axis MEMS gyroscope was anal...
In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different mesh application, z-rate spring structure change,...
Citations
... Since the previous decade, various resonant microgyroscopes with different structures and characteristics have been designed and fabricated. However, most of the new structures and characteristics are implemented to decouple the sense and the drive modes which leads to minimize the mechanical crosstalk [7], [10]. In recent years, electrostatic comb drive actuators (ECDAs) are widely used in many gyroscopes as the driving mechanism [10], [12]. ...
... However, most of the new structures and characteristics are implemented to decouple the sense and the drive modes which leads to minimize the mechanical crosstalk [7], [10]. In recent years, electrostatic comb drive actuators (ECDAs) are widely used in many gyroscopes as the driving mechanism [10], [12]. Although, this kind of actuator shows proper accuracy and performance, a complex electrical circuit is required to drive it. ...
... Coriolis force enhancement and Brownian noise reduction requires the mass to be larger. However this approach is hard to implement because of the limitations on the technology of MEMS process [10]. Fig. 1 shows the configuration of the proposed nickel-based microgyroscope. ...
