Discover the world's scientific knowledge

With 160+ million publication pages, 25+ million researchers and 1+ million questions, this is where everyone can access science

You can use AND, OR, NOT, "" and () to specify your search.

PublicationsAuthorsQuestions
+5
Impact of Ar/CF4 Mixed Gas Flow Rate on Silicon Etching Using Surface Discharge Plasma
Article
  • May 2024
  • DOI: 10.3390/app14104252
  • ISBN: 2076-3417
  • Toshiyuki Hamada
    Toshiyuki Hamada
  • Kazuki Nishida
    Kazuki Nishida
  • Masafumi Yoshida
    Masafumi Yoshida
Preview image for Experimental studies of H2/Ar plasma in a cylindrical inductive discharge with an expansion region
Source
Experimental studies of H2/Ar plasma in a cylindrical inductive discharge with an expansion region
Article
  • Sep 2024
  • DOI: 10.1088/1674-1056/ad6250
  • ISBN: 1674-1056
  • Shi-Bo世博 Li李
    Shi-Bo世博 Li李
  • Si-Yu思雨 Xing邢
    Si-Yu思雨 Xing邢
  • Fei飞 Gao高
    Fei飞 Gao高
  • You-Nian友年 Wang王
    You-Nian友年 Wang王
Preview image for Discharge mode and particle transport in radio frequency capacitively coupled Ar/O2 plasma discharges
Source
Discharge mode and particle transport in radio frequency capacitively coupled Ar/O2 plasma discharges
Article
  • Sep 2024
  • DOI: 10.1088/1674-1056/ad5d65
  • ISBN: 1674-1056
  • Zhuo-Yao卓瑶 Gao高
    Zhuo-Yao卓瑶 Gao高
  • Wan婉 Dong董
    Wan婉 Dong董
  • Chong-Biao崇彪 Tian田
    Chong-Biao崇彪 Tian田
  • Xing-Zhao星照 Jiang蒋
    Xing-Zhao星照 Jiang蒋
  • Zhong-Ling忠玲 Dai戴
    Zhong-Ling忠玲 Dai戴
Experimental Study on the Effects of Gas Mixture and Barrier Dielectric on the Discharge Characteristics and Plasma-Chemical Reactions of Ar–NH3_{3} DBD
Article
  • Dec 2024
  • DOI: 10.1109/TPS.2024.3514927
  • ISBN: 1939-9375
  • Ni Zhao
    Ni Zhao
  • Hao Tian
    Hao Tian
  • Qiang Fu
    Qiang Fu
  • Xiaowei Wang
    Xiaowei Wang
  • Zhengshi Chang
    Zhengshi Chang
Discharge characteristics and reactive species diagnosis of a He + Ar + O2 plasma jet at atmospheric pressure
Article
  • Jun 2024
  • DOI: 10.1140/epjd/s10053-024-00882-y
  • ISBN: 1434-6060
  • Tongtong He
    Tongtong He
  • Yunzheng Wang
    Yunzheng Wang
  • Zeyu Chen
    Zeyu Chen
  • Yuesheng Zheng
    Yuesheng Zheng
Repetitive pulsed gas–liquid discharge in different atmospheres: from discharge characteristics to plasma–liquid interactions
Article
  • Sep 2023
  • DOI: 10.1039/D3CP01074K
  • ISBN: 1463-9076
  • Xu Lu
    Xu Lu
  • Li Zhang
    Li Zhang
  • Sen Wang
    Sen Wang
  • Zhi Fang
    Zhi Fang
Electrostatic probe measurements in an expanding microwave discharge sustained in an Ar–N2–H2 gas mixture: Investigation on plasma parameters
Article
  • Mar 2004
  • DOI: 10.1088/0022-3727/37/8/013
  • ISBN: 0022-3727
  • J. L. Jauberteau
    J. L. Jauberteau
  • Isabelle Jauberteau
    Isabelle Jauberteau
  • J. Aubreton
    J. Aubreton
PLASMA PARAMETERS AND FLUORINE ATOM DENSITY IN SF6 + Ar + He GAS MIXTURE: EFFECTS OF Ar/He MIXING RATIO, PRESSURE AND INPUT POWER
Article
  • Jan 2025
  • DOI: 10.6060/ivkkt.20256803.7130
  • ISBN: 2500-3070
  • Andrey Miakonkikh
    Andrey Miakonkikh
  • V. O. Kuzmenko
    V. O. Kuzmenko
  • A. M. Efremov
    A. M. Efremov
  • K. V. Rudenko
    K. V. Rudenko
Research on the characteristics of atmospheric pressure AC argon discharge plasma jet: comprehensive effects of discharge voltage, gas flow rate, and external magnetic field
Article
  • Jan 2024
  • DOI: 10.7498/aps.73.20241166
  • ISBN: 1000-3290
  • Zhou Xiong-Feng
    Zhou Xiong-Feng
  • Chen Bin
    Chen Bin
  • Liu Kun
    Liu Kun
Mechanistic study on 4, 4'-sulfonylbis removal with CO2/Ar gas-liquid DBD plasma
Article
  • May 2024
  • DOI: 10.1088/2058-6272/ad5118
  • ISBN: 1009-0630
  • Guangjia Wang
    Guangjia Wang
  • Shidong Fang
    Shidong Fang
  • Baoguo Lin
    Baoguo Lin
  • Chengzhu Zhu
    Chengzhu Zhu
  • Jie Shen
    Jie Shen
1
2
3
4
5
10
App Store
Get it on Google Play
Company
About us
News
Careers
Support
Help Center
Business solutions
Advertising
Recruiting
© 2008-2025 ResearchGate GmbH. All rights reserved.
  • Terms
  • Privacy
  • Copyright
  • Imprint
  • Consent preferences
Join for free
Log in