Younes Boukellal's research while affiliated with Laboratoire National de Métrologie et d'Essais and other places

Publications (2)

Full-text available
To provide traceable dimensional measurements at the nanometer scale, SPM users need to periodically calibrate their instruments. This calibration task is achieved thanks to reference standards like 1D or 2D gratings and/or step heights whose dimensional characteristics have been calibrated by a National Metrology Institute (or ISO/IEC accredited l...