Xinghua Wang’s research while affiliated with Agency for Science, Technology and Research (A*STAR) and other places

... The survey of k 2 eff from published SAWRs and FBARs, while all f r are above 1 GHz. 7,12,21,[24][25][26][37][38][39][40][41][42][43][44][45][46][47][48][49][50][51] ...

Reference:

Shear horizontal mode surface acoustic wave resonator with ultra-high electromechanical coupling based on the X-cut LNOI acoustic platform

... The sacrificial layer process is the third mainstream process for MEMS microacoustic devices. The sacrificial layer is created before device fabrication and is removed after device fabrication to achieve device suspension 20,21 . This method requires a complex multilayer manufacturing process and needs to add a 13 for etching holes to support the subsequent fabrication processes. ...

Reference:

A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration

... To provide a quantitative and comprehensive comparison of the performances of the different transducer arrays, a composite Figure Since a smaller array size and lower frequency drift are more desirable, the figure of merit should be inversely proportional to the array size and frequency drift. Furthermore, since a higher resonant frequency is correlated with a lower frequency drift [32][33] and a higher acoustic pressure would lead to a higher SNR, a higher acoustic pressure and resonant frequency are deemed to be more desirable for the performance of the array. The figure of merit should thus be directly proportional to the acoustic pressure and resonant frequency of the device. ...

Reference:

Ultrasonic Transmit Beam Steering Using Slitted Transducer Design