June 2011
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26 Reads
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12 Citations
Sensors and Actuators B Chemical
We report on the design, simulation and experimental characterization of a simple germanium bolometer utilizing a Fabry–Perot absorbing structure, which can be used for monitoring, e.g., CO2 where no additional filter is required. CO2 absorbs IR-radiation in a major band centered around a vacuum wavelength of 4.26μm. The selectivity of the whole sensor-configuration is mainly accomplished by the wavelength-response associated with the Fabry–Perot structure. The analysis shows, that the designed bolometer has an adequate response-function for the measurement of CO2 concentration. Combining the analysis for the bolometer with ray tracing simulations for a connected sample chamber yields the response for an entire IR-absorption sensor system which is proven to be in good agreement with measurements.