Weiyi Wang’s research while affiliated with Nanjing University of Science and Technology and other places

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Publications (2)

Fig. 1. (a) Optical path for a WLI with a Mirau objective. (b) Interference mechanism.
Fig. 3. Diagrammatic sketch of the PIF curve. The SDFI region on the PIF curve is marked by a circle. The region is near one of the dark fringes. The transverse axis represents the dimension of the tested surface plane. The ordinate represents the normalized value of light luminance of the PIF.
Fig. 4. The process of achieving the FDI. With regulation of the horizontal level of the tested sample plane, the separation of the interference fringes will gradually widen (see (a)-(d)), and finally the FDI (see (d)) is obtained. In Fig. 4, the tested sample is the GaN-on sapphire.
Fig. 14(c). Another view of the FDI for the micro-channel plate in Fig. 14(a). This image was taken with SDFI-B. The light luminance of Fig. 14(c) (even the pattern of nonuniformity) is exactly reversed relative to that of Fig. 14(b).
Fig. 15. FDI for GaN-on Si. This image was taken with SDFI-A. The light luminance in Fig. 15 is reversed relative to that shown in Fig. 16.

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Experimental investigation of white-light interferometry based on sub-dark-field illumination
  • Article
  • Full-text available

November 2018

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148 Reads

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7 Citations

Optics Communications

ChunKan Tao

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YuJing Wu

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WeiYi Wang

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[...]

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Tianyou Kang

In this work, a fast imaging method based on sub-dark-field illumination in white-light interferometry is presented. Applying this method, we successfully resolved the surface profile of test structures even for a smooth surface with a roughness of the order of a few angstroms. The true-colour sequence band is presented, which provides the relationship between the surface colours and the optical path difference. Several characteristics (e.g., basic colour, image contrast, thickness variations, and so on) for the white-light interference images are discussed in detail. Pair images with sub-dark-field illumination in the principal interference fringe were also observed and analysed.

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Citations (1)

... Optical method is based on the reflection, diffraction, interference and other optical phenomena of light irradiating on the surfaces to carry out roughness measurement. Some existing researches [3][4][5][6][7][8][9][10][11] based on white light interferometry technology used white light interferometer for surface roughness measurement, the maximum measurement accuracy can reach 10 nm. There were other studies [12][13][14] that measured surface roughness by using confocal microscopy, which also achieved accurate measurements and applications for different machining methods on different material surfaces. ...

Reference:

Innovative surface roughness detection method based on white light interference images
Experimental investigation of white-light interferometry based on sub-dark-field illumination

Optics Communications

ChunKan Tao

·

YuJing Wu

·

WeiYi Wang

·

[...]

·

Tianyou Kang