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July 2024
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14 Reads
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1 Citation
We fabricate a device that configures the tunable air gap Fabry‒Pérot filter with a static gradient thickness filter to estimate air gap dimension in tunable filter. The chip-level microelectromechanical integration of gradient thickness filter can serve the purpose of device miniaturization while performing air gap sensing in visible wavelength range.
July 2024
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34 Reads
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1 Citation
We fabricate a microelectromechanical systems (MEMS)-based device configuring the tunable air gap Fabry–Pérot filter (FPF) with a static gradient thickness filter on the same platform. The proposed double filter configuration offers a wavelength calibration approach that accurately estimates the air gap dimension in the tunable air gap FPF. The wavelength calibration is performed by utilizing the spectrally-selective and spatially-resolved transmission characteristics of the tunable air gap FPF and the static gradient thickness filter, respectively. The MEMS-compatible chip-level integration of the static gradient thickness filter facilitates device miniaturization to enable its use in handheld devices.
May 2024
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2 Reads
April 2024
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104 Reads
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2 Citations
A miniature low-cost pixelated gradient thickness optical filter is proposed to achieve spectroscopy in the visible wavelength range. The optical filter consists of a two-dimensional array of metal-dielectric-metal thin films arranged in Fabry–Pérot filter configurations with discretely varying cavity thicknesses. The wavelength-selective characterization of each filter is performed by measuring the transmittance over the visible wavelength range. The pixelated gradient thickness filter is equipped with a CMOS image sensor, and its performance as a spectroscopic module is evaluated by illuminating different monochromatic wavelengths on it. The target spectra are successfully reconstructed from the output signals recorded in the sensor from the respective pixelated gradient thickness filters. The technological competence of the proposed filter will enable its use in handheld devices to widen its application range in day-to-day life.
December 2023
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119 Reads
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1 Citation
We propose a pixelized gradient thickness color filter as the compact and space-saving element for achieving simultaneous imaging and spectroscopy using a single image sensor. By replacing the RGB filter integrated in portable devices this can serve the novel purpose on the same platform, and hence makes the device versatile.
December 2023
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1 Read
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1 Citation
Proceedings of the International Display Workshops
... Notably, the t a value in the fabricated tunable air-gap FPF can be experimentally measured using a capacitive displacement sensor [29], [31], [41]. Alternatively, to estimate the t a value while satisfying the requirements for device miniaturization in daily life applications, a compact and lightweight optical sensor using a linear gradient thickness filter can be integrated into the same platform as a tunable air-gap FPF, as previously reported by our group [42], [43]. ...
July 2024
... Notably, the t a value in the fabricated tunable air-gap FPF can be experimentally measured using a capacitive displacement sensor [29], [31], [41]. Alternatively, to estimate the t a value while satisfying the requirements for device miniaturization in daily life applications, a compact and lightweight optical sensor using a linear gradient thickness filter can be integrated into the same platform as a tunable air-gap FPF, as previously reported by our group [42], [43]. ...
July 2024
... Miniature spectroscopic devices play indispensable roles in a variety of applications, including space observations, nondestructive everyday analysis, health monitoring, and pollution detection. [1][2][3][4] They also provide a vital platform for in situ measurements such as spectroscopic sensing and hyperspectral imaging [5][6][7][8][9][10][11] through lab-on-a-chip devices. The microelectromechanical systems (MEMS)-based Fabry-Pérot filter (FPF) [12][13][14][15] has paved the way for the realization of miniature, cost-effective, and lightweight spectrometers compared to conventional grating-based 16,17 and Fouriertransform infrared 18,19 spectrometers. ...
April 2024
... T UNABLE Fabry-Pérot filters (FPFs) have emerged as versatile and indispensable components across a multitude of scientific and industrial fields, including astronomy, metrology, optical communications, nondestructive everyday analysis, medical diagnostics, and environmental monitoring [1], [2], [3], [4], [5], [6], [7], [8]. The advent of tunable FPFs driven by microelectromechanical techniques has significantly advanced the development of complementary metal oxide semiconductor (CMOS)-integrated lab-on-a-chip devices such as miniature spectrometers [9], [10], [11], [12], [13], [14], [15], [16] and hyperspectral imaging systems [17], [18], [19], [20]. ...
December 2023
