April 2025
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6 Reads
Sensors and Actuators B Chemical
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Publications (29)
April 2025
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3 Reads
Sensors and Actuators B Chemical
March 2025
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3 Reads
March 2025
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2 Reads
March 2025
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8 Reads
ACS Sensors
Highly sensitive, selective, and compact hydrogen (H2) sensors for safety and process monitoring are needed due to the growing adoption of H2 as a clean energy carrier. Current resonant frequency-based H2 sensors face a critical challenge in simultaneously achieving high sensitivity, low operating frequency, and miniaturization while maintaining a high figure of merit (FOM). This study addresses these challenges by introducing a novel piezoelectric micro diagram (PMD) H2 sensor that achieves an unprecedented FOM exceeding 10⁴. The sensor uniquely integrates a PMD resonator with a palladium (Pd) sensing layer, operating on a stress-based mechanism distinct from traditional mass-loading principles. Despite a low operating frequency of 150 kHz, the sensor demonstrates a remarkable sensitivity of 18.5 kHz/% H2. Comprehensive characterization also reveals a minimal cross-sensitivity to humidity and common gases and a compact form factor (600 μm lateral length) suitable for IC integration. The sensor’s performance was systematically evaluated across various Pd thicknesses (40–125 nm) and piezoelectric stack covering ratios (50% and 70%), revealing a trade-off between sensitivity and response time. This PMD H2 sensor represents a significant advancement in resonant frequency-based H2 sensing, offering superior sensitivity, compact size, and robust performance for diverse applications in H2 detection and monitoring.
December 2024
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1 Read
September 2024
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3 Reads
September 2024
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4 Reads
September 2024
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2 Reads
March 2024
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40 Reads
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3 Citations
Citations (9)
... The survey of k 2 eff from published SAWRs and FBARs, while all f r are above 1 GHz. 7,12,21,[24][25][26][37][38][39][40][41][42][43][44][45][46][47][48][49][50][51] ...
- Citing Conference Paper
December 2023
... These microstructures exploit the conservation of etendue and restrict the angular spread of light by expanding its areal spread. Unlike conventional bulky Winston cones used for beam condensing [27][28][29], our microphotonic structures are highly miniaturized and compact. Our results further demonstrate seamless integration of the angular-selective microstructures with commercial mid-IR photodetectors, which not only improves the photodetector's SNR, but also enables directional photoresponse centering at the normal direction. ...
- Citing Article
- Full-text available
August 2022
ACS Sensors
... Due to its large size, an optical path length of 37.3 cm was achieved, resulting in a detection limit of 0.5 ppm. Despite such a sensor has high sensitivity, the large size limits its applications, especially in the field of internet of things and mobile terminals, 15 where miniaturization and the capability of being able to integrate with different sensors are demanded. Furthermore, the long optical path can cause the device to reach saturation easily when measuring high-concentration gases, thereby narrowing the sensor's detection range. ...
- Citing Article
November 2021
Photonics Research
... where FA is the fractional absorbance, V0 is the voltage of the detector in N2 gas, and V is the voltage of the detector in target gas. Due to the influence of factors such as the IR emitter and light path, practical considerations require modifications to the Beer-Lambert Law Equation (3) [21]: ...
- Citing Conference Paper
June 2021
... In industrial production, CO 2 detection can not only enhance production efficiency but also can mitigate environmental pollutions. 8,9 In view of this, research on CO 2 detection technologies have an inestimable value and farreaching impact on various areas, thereby creating an urgent demand for CO 2 sensors. ...
- Citing Article
July 2021
Sensors and Actuators B Chemical
... The observed sensitivity for the measurement of ethanol gas about 100 ppm. The power consumed by the sensor was 12.17 mW [100,101]. ...
- Citing Conference Paper
January 2021
... Based on electric field regulation, the emissivity can be changed due to the variation of electron density in quantum wells, with 3dB modulation depths reaching 600 kHz and 50 kHz, respectively. The Q value and FWHM of this thermal emitter are 40 and 428 cm -1 at 4.2 μm, which can find application in CO2 sensing, as demonstrated in Fig. 10 (e) and (f) [93]. ...
- Citing Conference Paper
March 2021
... Since then, research and development on AlScN films has increasingly gained attention from research groups as well as industry worldwide. The focus is mostly on MEMS [2,3] and acoustic wave applications [4,5], but energy harvesting applications [6][7][8] are also gaining traction. ...
- Citing Conference Paper
March 2021
... These microstructures exploit the conservation of etendue and restrict the angular spread of light by expanding its areal spread. Unlike conventional bulky Winston cones used for beam condensing [27][28][29], our microphotonic structures are highly miniaturized and compact. Our results further demonstrate seamless integration of the angular-selective microstructures with commercial mid-IR photodetectors, which not only improves the photodetector's SNR, but also enables directional photoresponse centering at the normal direction. ...
- Citing Article
- Full-text available
August 2020
Journal of Microelectromechanical Systems
