Peter C. Doerschuk’s research while affiliated with Cornell University and other places

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Publications (139)


Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin
  • Article

November 2024

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38 Reads

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1 Citation

IEEE Transactions on Semiconductor Manufacturing

Yutong Xie

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Ivan Chakarov

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Digital twins of the semiconductor fabrication process provide means for optimization of the physical layout and nanofabrication process design, studying compatibility between desired strcutures and a process flow, and a pathway to analyze the root causes of defects for state-of-the-art CMOS and MEMS devices. In this paper, a metric for the geometric differences between structures visualized by CD-SEM images is defined, and a computer-vision-based algorithm is developed to evaluate the metric. One of the major uses of such metrics is to compare experimental and simulated images. For this application, numerical results are presented when the simulator is SEMulator3D, a physics-based process modeling software system for semiconductor and MEMS devices. Computer vision tools, such as filters, thresholding, and morphology operations, are used to extract geometric features from CD-SEM images and pattern matching and symmetric difference are used to compute the metric. Examples of using the metrics to quantify the geometric similarity between a simulated nanostructure and an experimental CD-SEM image of the fabricated nanostructure are presented. The data consists of eight classes of nanostructures which are defined, fabricated in the cleanroom with 36 combinations of layout parameters, and imaged with a CD-SEM.







Laser-Induced Graphene Pressure Sensors Manufactured via Inkjet PCB Printer Locally Producing Super-Sensitive and Cost-Effective Circular Diaphragm Pressure Gauges

July 2022

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36 Reads

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4 Citations

This paper demonstrates two firsts for the fields of laser-induced graphene (LIG) sensors and printed electronics (PE): (1) a LIG Kapton circular diaphragm gauge pressure sensor with a multi-resistor network; (2) the wiring and encapsulation of said sensor, printed with conductive and dielectric inks (CI and DI) utilized by the BotFactory SV2 thermal Inkjet PCB printer. In addition, the PE tool allows for automated solder paste dispensing and the pick-and-place of electronic components to form complete functioning microsystems, consisting of microcontrollers, thin-film batteries, passive components, antennas, etc. These capabilities further enhance the prospect of LIG sensors by providing to them off-grid power, read-out circuitry, amplification, and simple wireless data transmission.


In-situ ultrasonic imaging of printed electronics ink deposition and curing
  • Conference Paper
  • Full-text available

June 2022

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182 Reads

We report the first-ever in-situ imaging of 3D-Printed Electronics (PE) ink delivery and drying during the printing using GHz ultrasonic imager. The CMOS integrated GHz ultrasonic technology consists of a 128 x 128-pixel array of Aluminum Nitride transducers that image the surface of the silicon chip with transmit/receive of short ultrasonic pulses. The reflected US pulses measure crucial ink parameters such as ink's acoustic impedance and temperature at a sampling rate of up to 30 frames per second. We demonstrate the observation of ink droplets delivered to a surface, the creation of secondary droplets on the surface, and the time history of the ink curing process. The data at single pixel and images over a collection of images indicates that the GHz imager can be used to provide real-time quantitative feedback on the printing process, thus providing uniform and higher yield PE devices.

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Citations (49)


... In mRNA vaccine design, GCNs encode secondary and tertiary structures of mRNA as graph networks, where nodes represent nucleotides, and edges depict structural interactions, such as hydrogen bonds or stacking interactions. This representation enables the identification of key features, like stem-loops or pseudoknots, that contribute to stability and translation efficiency, facilitating the optimization of mRNA constructs for robust antigen expression (Dorsey et al., 2024). ...

Reference:

Computational biology and artificial intelligence in mRNA vaccine design for cancer immunotherapy
Review of Machine Learning for Lipid Nanoparticle Formulation and Process Development
  • Citing Article
  • September 2024

Journal of Pharmaceutical Sciences

... Evaluating geometric disparities between simulated and experimental structures through computer-vision-based methodologies also requires computational efficiency and real-time capabilities. These algorithms encompass feature extraction, pattern recognition, and symmetric difference analysis [XDC24]. FPGAs, with inherent parallelism and low latency, could facilitate defect detection and expedite feedback during design and manufacturing. ...

Quantitative Comparison of Simulation and Experiment Enabling a Lithography Digital Twin
  • Citing Article
  • November 2024

IEEE Transactions on Semiconductor Manufacturing

... Hui et al. (2023) designed a neural net to predict quality and resistance of inkjet-printed silver lines in relation to various printing process parameters. Ivy et al. (2023) developed a ML-model to optically predict resistance of inkjet-printed resistors based on their geometry and texture features, using a high-resolution color scanner. Gafurov et al. (2022) utilized deep-learning algorithms for the optical quality assessment and parameter identification of screen-printed lines. ...

Feature-Based Machine Learning for Predicting Resistances in Printed Electronics
  • Citing Conference Paper
  • July 2023

... Using the BotFactory SV2 thermal Inkjet PCB printer, another machine can simultaneously print conductive and DIs. In [141], laser-induced graphene sensors and their wiring and packaging were fabricated following the printing process shown in Fig. 9. To begin fabrication, each device's four sets of three alignment windows are printed onto a 125-µm-thick Kapton board. ...

Laser-Induced Graphene Pressure Sensors Manufactured via Inkjet PCB Printer Locally Producing Super-Sensitive and Cost-Effective Circular Diaphragm Pressure Gauges
  • Citing Conference Paper
  • July 2022

... In particular, the functional role of the regions could be affected by changes in brain structure. Indeed, recent work using fMRI has shown in humans the presence of a functional asymmetry between brain regions in terms of afferent and efferent information transfer 33 . Other computer modelling work has also shown a relationship between network topology and information directionality, in particular, by identifying certain brain regions (or nodes) as targets and sources of information 34 . ...

Spatiotemporal functional interactivity among large-scale brain networks

NeuroImage

... Past research has explored the directed connectivity patterns in the human brain using different methods (Bajaj et al., 2016;Chén et al., 2019;Duggento et al., 2018;Lund et al., 2020;Schwab et al., 2018;Xu et al., 2020), although no one has studied how heritability influences the "information flow" from a functional network to another one. ...

Spatiotemporal functional interactivity among large-scale brain networks
  • Citing Preprint
  • April 2020

... Cage-like breakable organosilica NPs were synthesized and characterized following a previously published protocol [46][47][48][49]. Cetyltrimethylammonium bromide (CTAB) was used as the template of the cage-like NPs and tetraethoxysilane (TEOS) and bis3-(triethoxysilyl) propyl]disulphide BTDS were employed for synthetizing the disulfide breakable organosilica framework. ...

Self-assembly of highly symmetrical, ultrasmall inorganic cages directed by surfactant micelles

Nature

... Our goal is to further merge the ideas that biological particles obey symmetry and that different instances of the particle are heterogeneous due to different vibrational states (continuous heterogeneity). In the continuous heterogeneity situation, it becomes more natural to impose the symmetry on the 1st-and 2nd-order statistics of \rho (x) for the particle (symmetric statistics) [65,64], rather than on the \rho (x) itself. In this more realistic assumption, since only the statistics have symmetry, the individual particles may be nonsymmetric, and therefore, the invariant basis becomes no longer sufficient. ...

Allosteric effects in bacteriophage HK97 procapsids revealed directly from covariance analysis of cryo EM data
  • Citing Article
  • January 2018

Journal of Structural Biology

... where L βvae is the encoder-decoder loss of disentangled VAE, also called beta-VAE [27]. beta-VAE is a modified version of vanilla VAE and can provide better disentanglement of distribution in the latent space [28]. The beta-VAE training objective is given by, ...

Learning Compositional Visual Concepts with Mutual Consistency