O. Reentilä’s research while affiliated with Ferdinand-Braun-Institut and other places

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Publications (3)


Strain engineering of AlGaN‐GaN HFETs grown on 3 inch 4H‐SiC
  • Article

June 2009

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23 Reads

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11 Citations

Physica Status Solidi (C) Current Topics in Solid State Physics

Frank Brunner

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Outi Reentilä

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In this work strain evolution during MOVPE of AlGaN/GaN HFET structures on 3 inch SiC substrates is investigated in-situ and related to properties of the initial AlN wetting layer. It is shown that the density of pits on the AlN surface depending on growth conditions influences GaN nucleation and consequential grain coalescence and stress incorporation. Optimization of the strain and material quality of the GaN layer is demonstrated without degrading the semi-insulating properties of the HFET buffer. (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)



Effect of the AIN nucleation layer growth on AlN material quality

November 2008

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346 Reads

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82 Citations

Journal of Crystal Growth

AlN layers were grown by metalorganic vapor-phase epitaxy at high temperatures up to 1500°C. Nucleation layer growth parameters and flow conditions before nucleation were changed and the effect on the AlN layer grown on top was studied. Structural analysis performed by high-resolution X-ray diffractometry and transmission electron microscopy showed that pregrowth conditions affect the material quality drastically. The best structural quality as indicated by a screw (including mixed) dislocation density of 8×108cm−2, together with smooth surface morphology was found to result from simultaneous switching on of ammonia and TMAl at the beginning of nucleation layer growth.

Citations (2)


... AlN (aluminum nitride) has direct wide bandgap (6.2 eV), high resistance (10 11 -10 13 X cm), high piezoelectric coefficient (d 33 = 5.56), high hardness (12 GPa for the (0001) plane), and good thermal conductivity (285 W / mK) [1][2][3][4][5]. Since AlN has unique properties, it has many different application areas, for example, ultraviolet photodetectors, lightemitting diodes (LED), quantum cascade lasers (QCL), radio frequency filters, micro-electro-mechanical systems, and solar cells [6][7][8][9][10][11][12][13][14][15]. Moreover, AIN is used as a buffer layer for GaN (the most studied extensively III-nitride semiconductor) growth on Si. ...

Reference:

High-quality AlN growth: a detailed study on ammonia flow
Effect of the AIN nucleation layer growth on AlN material quality
  • Citing Article
  • November 2008

Journal of Crystal Growth

... It was reported that the pits forming at the ends of the threading dislocations on the AlN surface supplied the nucleation sites for the growth of GaN; thus, the larger the number of dislocations, the greater the density of the GaN nuclei, and denser nuclei lead to a faster coalescence of the GaN layer. [17,18] Moreover, a GaN layer which coalesces faster preserves compressive strain rather than relaxing it, through forming the misfit dislocations. [18] Therefore, the phenomenon of an increased compressive strain can be explained by the faster coalescence of the GaN channel, caused by a higher density of dislocations in the AlN buffer. ...

Strain engineering of AlGaN‐GaN HFETs grown on 3 inch 4H‐SiC
  • Citing Article
  • June 2009

Physica Status Solidi (C) Current Topics in Solid State Physics