Min Hyeok Jang’s research while affiliated with Pusan National University and other places

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Publications (2)


Fig. 3. Cylindrical mold fabrication process for roll-to-roll nanoimprint lithography.
Fig. 6. Coating profiles with 5% of PR for ξ=0.003, B ξ =10, and variation of thickness at different rotations (a) W ξ =7.1, (b) W ξ =5.4, (c) W ξ =3.7, (d) W ξ =2, and (e) W ξ =0.3.
Fig. 7. Film thickness δ(θ) with ξ= 0.003, B ξ =10 for Ω r =10 and Ω r =0.6 as obtained from experiments of 5% PR and from solution of coating equation.
Thin-film coating on cylinder for fabrication of cylindrical mold: Roll-to-roll nano-imprint lithography
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March 2019

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658 Reads

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16 Citations

Microelectronic Engineering

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Min Hyeok Jang

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Myung Yung Jeong

An optimized thin-film method for coating on a horizontal rotating cylinder is presented in this paper. The drop-casting technique is used to obtain uniform thin-film coating up to the micro/nano scale. To cover the entire surface, the cylinder rotates about its own axis and the needle applicator moves along it. The thin-film-coated cylinder can be further used as a roller mold in roll-to-roll imprinting after the photolithography process. A supportive theoretical analysis of the drop-casting technique also is presented herein. The theoretical model includes an evolution equation based on lubrication theory and the physics of the needle applicator for the particular experimental setup. The circumstances under which the uniform thin film is generated on a rotating cylinder are investigated for different concentrations of material in appropriate parameter ranges. Additionally, the results of theoretical and experimental investigations are analyzed for the purposes of a comprehensive summary of uniform thin-film coating.

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Citations (1)


... The cleanliness of these layers is important for electronic components. Techniques like magnetron sputtering [14][15][16][17][18] and lithography [19][20][21] allow for the precise and fast production of thin layers with different thicknesses and structures. These technologies ensure good electrical and thermal conductivity in lightweight and flexible structures for wearable electronics. ...

Reference:

Quantum Effects Induced by Defects in Thin-Film Structures: A Hybrid Modeling Approach to Conductance and Transmission Analysis
Thin-film coating on cylinder for fabrication of cylindrical mold: Roll-to-roll nano-imprint lithography

Microelectronic Engineering