L. A. Lott’s research while affiliated with Dow Chemical Company and other places

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Publications (3)


Film thickness determined by comparison of experimental reflectance with theoretical reflectance calculations vs ellipsometric thickness.
Wavelength, excitation purity, and luminous reflectance as a function of ellipsometric thickness for U–UO2 system. The wavelengths are represented by four regions. Region indicated by 1: dominant wavelengths 610–780 mμ; complementary wavelengths 493 c –567 c mμ and dominant wavelengths 380–450 mμ. Region indicated by 2 is for dominant wavelengths from 500 mμ to 570 mμ.
Film thickness determined by color analysis method vs ellipsometric thickness.
Reflectance spectra for UO2 films on uranium substrates.
Surface Film Thickness Determination by Reflectance Measurements
  • Article
  • Publisher preview available

June 1973

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35 Reads

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13 Citations

D. T. Larson

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L. A. Lott

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D. L. Cash

The thicknesses of UO2 films from 100 Å to 1800 Å on uranium substrates were determined from reflectance measurements in the visible region. The reflectance measurements on the U–UO2 system were analyzed by two different methods to determine film thicknesses. In the first method, film thicknesses were determined by comparing theoretical reflectance calculations with the experimental reflectance measurements. In the second method, film thicknesses were determined by obtaining the best match of the colorimetric properties (wavelength, excitation purity, and luminous reflectance) of the sample with the colorimetric properties of a predetermined film thickness calibration curve.

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Spectral Reflectivity Measurements Using Fiber Optics

April 1973

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4 Reads

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3 Citations

A simple technique utilizing a bifurcated fiber light guide for obtaining the reflectivity spectra of specular and diffusely reflecting surfaces is described. The technique can be used in certain situations where conventional reflectometers are not practical.


Citations (2)


... For thin film thickness measurements, the spectral reflectometer has been widely employed due to high measurement speed and simple configuration [3][4][5][6][7]12,14 . The lights reflected from the top and bottom surfaces interfere with each other, as shown in Fig. 1. ...

Reference:

A novel method to design and evaluate artificial neural network for thin film thickness measurement traceable to the length standard
Surface film thickness determination by reflectivity measurements
  • Citing Article

... In earlier studies with SR, the theoretical reflectance spectrum was modeled by considering only the reflection and transmission under the assumption that the absorptivity of the material is negligible. However, because the absorptivity cannot be ignored depending on the material, various methods adopting the complex refractive index instead of the real refractive index have been studied in an effort to realize a more accurate model of the theoretical reflectance spectrum, even when the absorptivity is quite low [6,7,[9][10][11][12][13][14][15]18]. From this line of research, a more accurate model of the reflectance spectrum can be created by considering the absorption effect quantitatively, thus facilitating thin-film thickness measurements with greater accuracy. ...

Surface Film Thickness Determination by Reflectance Measurements