Keiichi Akagawa's scientific contributions

Publications (9)

Conference Paper
Technique to pop up a plate vertically using the technique for IC manufacturing process is applicable to various devices in both RF and optical MEMS. This paper introduces novel technique using "Turning-structured Bi-material Beams" for fabrication of a vertical structure and explains success in fabrication of a vertical structure by applying the t...
Conference Paper
We have been studying the "Optically Readable Bimaterial Infrared Detector" based on surface micro-machining wafer process technology to realize an inexpensive infrared camera. This paper reports that we have developed a detector by incorporating the new "Cancel Structure" and we have successfully obtained an infrared image without a thermo-electri...
Article
In this paper, we developed 'Optically Readable BM Infrared Detector' of 55μm x 55μm pixel pitch and 266 X 194 array and evaluated the characteristics of this detector. In the infrared imaging test, we succeeded in obtaining infrared image of a person by adding an offset correction to the raw image taken through CCD camera, whereby we made a great...
Article
In this paper, we developed 'Optically Readable BM Infrared Detector' of 55 micrometers X 55 micrometers pixel pitch and 266 X 194 array and evaluated the characteristics of this detector. In the infrared imaging test, we succeeded in obtaining infrared image of a person by adding an offset correction to the raw image taken through CCD camera, wher...
Article
An optically readable bi-material infrared detector has been developed. In this paper, the basic operating principle of this detector, the structure of the test device, and the optical read-out system are described. The thermal-bending property of the test device is also reported. We measured the infrared responsivity of this detector. A noise equi...
Article
In this paper, we propose a method of constructing a multi- wavelength IR imager and investigate some of its applications. The optical cavity structure has been used to improve the sensitivity of the IR imager for a long time. However, it can also be used as an on-chip interference filter. We developed two kinds of multi-wavelength IR imagers based...
Article
In this work the design and performance of a 537 (H) by 505 (V) -element PtSi Schottky-barrier diode (SBD) IRCCD are described. To downsize the IR camera, the pixel size of the IRCCD has been reduced to 15.2 micrometer by 11.8 micrometer. The package size of the IRCCD is 14 mm by 14 mm. The reduction of the pixel size causes a decrease in thermal s...
Article
We developed an 811 by 508-element monolithic focal plane array detector using a PtSi Schottky-barrier photodiode, which has the greatest number of pixels for the Standard TV format. This detector array uses an interlined CCD configuration and 1.0-micron design rules. The pixel size of this detector was 18 by 21 microns square. From many experiment...
Article
A 811 × 508 pixel PtSi Schottky-barrier infrared CCD image sensor which has the greatest number of pixels for a Standard TV format was developed. We achieved a 38% fill-factor of 18 × 21μm size pixel for this image sensor by using 1.0μm design rules. The noise equivalent temperature difference with f/1.2 was 0.06 K at 300 K. The responsivity nonuni...

Citations

... The SOI diode technology explained in Section 2.5 is a typical example. The thin-film ferroelectric [7,21], bi-material [22,23], and thermo-optical IRFPAs [24] are other examples of alternative technologies. Although they challenged the microbolometer's dominance and made considerable inroads, the microbolometer seems unthreatened and continues to hold the leading position in uncooled IRFPA technology. ...
... The device has a first resonant frequency of ∼1200 Hz. Ishizuya et al. [46] have presented a similar device fabricated with bimorph structures of 200 nm thick aluminum and 200 nm thick SiO 2. The specific process available to the authors allows the SiO 2 to be placed above or below the aluminum layer; therefore bimorphs can be designed to curl up or down. The work makes use of this feature by placing a bimorph of opposite curl in place of the static beams of Figure 42. ...
... Nikon's research and development in this field begun in the mid 90s. After a US patent grant in 2000 [54], publications followed in 2001 and 2002 [55,56]. The sensor design and optical read− out configuration were highly sophisticated. ...