Jun Yokoyama’s research while affiliated with Tohoku University and other places

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Publications (2)


A Scanning MultiProbe Straightness Measurement System for Alignment of Linear Collider Accelerator
  • Article
  • Publisher preview available

October 2005

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17 Reads

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3 Citations

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J. Yokoyama

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S. Kiyono

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N. Hitomi

This paper describes a scanning multi-probe measurement system for local alignment of linac components. The system consists of two probe-units, each having three displacement probes. The two probe-units, which are placed on the two sides of the cylindrical linac components, are moved by a scanning stage with a scanning range of 5 m to simultaneously scan the two opposed straightness profiles of the linac cylinders. A differential output calculated from the probe outputs in each probe-unit cancels the influence of error motions of the scanning stage, and a double integration of the differential output gives the straightness profile. The difference between the unknown zero-values of the probes in each probe-unit of zero-difference, which introduces a parabolic error term in the profile evaluation result, is calculated and compensated for by a zero-adjustment method so that accurate straightness profiles of the linac cylinders can be obtained. The effectiveness of the measuring system is confirmed by experimental results.

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Precision measurement of cylinder straightness using a scanning multi-probe system

July 2002

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481 Reads

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105 Citations

Precision Engineering

This paper describes a scanning multi-probe system for measuring straightness profiles of cylinder workpieces. The system consists of two probe-units, each having three displacement probes. The two probe-units, which are placed on the two sides of the test cylinder, are moved by a scanning stage to scan the two opposed straightness profiles of the cylinder simultaneously. A differential output calculated from the probe outputs in each probe-unit cancels the influence of error motions of the scanning stage, and a double integration of the differential output gives the straightness profile. It is verified that the difference between the unknown zero-values of the probes in each probe-unit (zero-difference) will introduce a parabolic error term in the profile evaluation result, which is the largest error source for straightness measurement of long cylinders. To make zero-adjustment accurately, the cylinder is rotated 180° and scanned by the probe-units again after the first scanning. The zero-differences of the probe-units, as well as the straightness profiles of the cylinder, can be accurately evaluated from the output data of the two measurements. The effectiveness of this method is confirmed by theoretical analysis and experimental results. An improved method, which can measure the variation of the zero-difference during the scanning, is also presented.

Citations (2)


... The three-point method, which uses three displacement probes [13][14][15][16][17][18][19][20][21], can eliminate the influence of both the translational error motion and the yaw error motion. It is widely used for measuring straightness and roundness profiles of cylinder workpieces [19,20]. ...

Reference:

Precision measurement of X-axis stage mirror profile in scanning beam interference lithography by three-probe system based on bidirectional integration model
A Scanning MultiProbe Straightness Measurement System for Alignment of Linear Collider Accelerator