Jaibir Sharma’s research while affiliated with Agency for Science, Technology and Research (A*STAR) and other places

... Акустические волны активно используются в микрофлюидных устройствах для манипуляции биологическими объектами, изменения направления движения, определения жизнеспособности и т.д. [96,97]. Данный подход является весьма перспективным в случае ограничений на проведение прямых оптических измерений. ...

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"Lung-on-a-chip" as a tool for studying the pathophysiology of human lungs

... Complementary Metal Oxide Semiconductor (CMOS) and Micro-Electro-Mechanical System (MEMS) devices play significant roles in emerging research fields such as artificial intelligence (AI) [1], 5G communication [2,3], the Internet of Things (IoT) [4], and satellite communication [5,6]. With the continuous development of material science and microfabrication processes, high-performance CMOS and MEMS devices have been the subject of extensive investigations and have advanced significantly [7,8]. ...

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Editorial for the Special Issue on State-of-the-Art CMOS and MEMS Devices

... 91 The technology involves the use of acoustic radiation pressure exerted by the surface wave to create internal streaming in the fluid and eventually makes small droplets go forward along designed paths, as the example shown in Figure 6c. 87 Besides, dielectrophoresis droplet manipulation utilizes the dielectric characteristics of droplets to manipulate them. The technique involves the use of different kinds of electrodes to regulate the droplet dynamic behaviors, in which the electrode design is crucial for this kind of actuation. ...

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Water droplets play a role in Internet of Things applications

... Recently, novel acoustofluidic effects induced by traveling guided flexural waves (GFWs) have been demonstrated by Vachon et al. 76 based on a lithographicallydefined piezoelectric suspended membrane acoustic waveguide actuator (MAWA), Fig. 1d. The complex and detailed structures realized by the piezoelectric Silicon-On-Nothing (pSON) 77 process allows for the MAWA to distinguish itself from the flexural plate wave transducers reported by White's group by leveraging the waveguiding property of a photolithographically-defined membrane 78 and further develop the capabilities of localized GFWs in acoustofluidics. ...

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Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator

... Recently, novel acoustofluidic effects induced by traveling guided flexural waves (GFWs) have been demonstrated by Vachon et al. 76 based on a lithographicallydefined piezoelectric suspended membrane acoustic waveguide actuator (MAWA), Fig. 1d. The complex and detailed structures realized by the piezoelectric Silicon-On-Nothing (pSON) 77 process allows for the MAWA to distinguish itself from the flexural plate wave transducers reported by White's group by leveraging the waveguiding property of a photolithographically-defined membrane 78 and further develop the capabilities of localized GFWs in acoustofluidics. ...

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Cavity-agnostic acoustofluidic manipulations enabled by guided flexural waves on a membrane acoustic waveguide actuator

... However, the devices are not robust in operating in a fluidic environment as both sides of the membranes are immersed. Additionally, the PMUT-prepared silicon-on-nothing (SON) process [19] has been proposed, which leverages the high-temperature migration of trenches to form a monocrystalline silicon film on buried cavities. ...

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Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer

... This method avoids the lattice mismatch [110] and strain problems. An n-type degenerate doped resonator aligned with the <100> crystal orientation of the Si substrate was also proposed and achieved a TCF of −7.4 ppm/ • C [111]. A piezoelectric AlN resonator combining a composite structure of heavily doped and oxide layers has been reported in recent years [112]. ...

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Concepts and Key Technologies of Microelectromechanical Systems Resonators

... R. Przybyla et al. developed the first pMUT rangefinder system based on the crosscorrelation TOF method as early as 2010 [33]. Many recent works also use cross correlation to obtain the detection range [31,106]. ...

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Review of Piezoelectric Micromachined Ultrasonic Transducers for Rangefinders

... In 2018, Yang et al. proposed a delay-line patterned SAW pressure sensor in a water distribution system [22]. In 2021, Eldwin et al. [23] also studied wafer-level packaging using AlN thin film sputtering on silicon substrates, achieving a wide range of 6MPa and high detection accuracy (±1% FS). In 2024, Han et al. proposed a high-temperature SAW pressure sensor using SH wave mode that can withstand high temperatures up to 400 ℃ [24]. ...

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A New Method of Surface Acoustic W ave Pressure Sensing Based on Acoustic Attenuation Mechanism

... The turnover point is tuned through adjusting the crystal orientations of the silicon resonators. This is due to the fact that the degenerate doping strains the crystal lattice and shifts the electronic energy bands, resulting in a flow of charge carriers to minimize the free energy, thereby changing the elastic properties of silicon [7] and the temperature coefficient of elastic constant (T C E) depends on the different crystal orientation of the resonator alignment [15]. Thus, resonators aligned to different crystal orientations are designed and fabricated in a degenerate phosphorus-doped (100) silicon wafer, with a doping concentration of about 1e20/cm 3 . ...

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JMEMS Letters.1pt Temperature Compensated Bulk-Mode Capacitive MEMS Resonators With $\pm$16 ppm Temperature Stability Over Industrial Temperature Range