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January 1992
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326 Reads
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148 Citations
Fringe scanning techniques, now renamed heterodyning or phase shift interferometry, are covered in a completely rewritten chapter. New chapters have been added to cover wavefront fitting and evaluation as well as holographic and Moire methods. The chapter on parameter measurements has been completely rewritten and an appendix added suggesting appropriate tests for typical optical surfaces.
... Optical interferometry provides full-field and high accuracy measurement [1] and has been widely used in manufacturing [2], energy [3] and astronomy [4]. However, to achieve the high accuracy, the systematic errors, such as reference surface error [5], wavefront distortion [6] and image distortion [7], should be properly handled. ...
January 1992
