Benoit Poyet's research while affiliated with Laboratoire National de Métrologie et d'Essais and other places

Publications (14)

Article
Full-text available
Créé en 2011 conjointement par le LNE et NanoSciences France-C’Nano, le club nanoMétrologie rassemble les industriels, le secteur académique et les agences gouvernementales afin de partager des problématiques métrologiques dans tous les domaines que recouvrent les nanosciences et les nanotechnologies. Plus de 280 adhérents provenant de près de 140...
Article
This article describes the context of the development and the implementation of a metrological atomic force microscope. This is a reference instrument traceable to the International System of Units and dedicated to the practice of dimensional nanometrology. Its specific design allows a control of the measurement uncertainty. It is mainly used for t...
Conference Paper
Full-text available
A metrological Atomic Force Microscope (mAFM) has been developed at LNE [1, 2]. It is mainly used for performing traceable measurement and calibration of transfer standards dedicated to scanning probe and scanning electron microscopes. In order to improve the mAFM performance and reduce the measurement uncertainty, a new mAFM head is being develope...
Conference Paper
Full-text available
Créé en 2011 conjointement par le LNE et NanoSciences France (réseau C’Nano), le club nanoMétrologie a pour objectif de rassembler industriels, secteur académique et agences gouvernementales au sein d’un véritable réseau afin de partager des problématiques métrologiques dans tous les domaines que recouvrent les nanosciences et les nanotechnologies....
Conference Paper
Full-text available
A metrological atomic force microscope (mAFM) has been developed at LNE [1, 2]. It can be used for traceable Atomic Force Microscope (AFM) measurement and calibration of transfer standards dedicated to scanning probe microscopy. It is based on an immobile AFM head working in a zero detection mode. All the displacements (i.e. the three translations)...
Article
Full-text available
LNE is developing a MEtrological ChARacterization of Nanomaterials (CARMEN) platform to offer a complete supply of main parameter measurements characterizing a nano-object (size, shape, polydispersity, agglomeration/aggregation state, surface charges, specific charges. . . ). Other physical properties such local electrical measurements will be able...
Conference Paper
Full-text available
Nanotechnology is today expected to have a tremendous impact on our societies. Because of a strong correlation between physical properties and dimensions of nano-objects, it represents an unprecedented engineering opportunity to specially design the properties of materials for their particular application. To bring nanotechnologies through a succe...
Article
A metrological atomic force microscope (mAFM) has been developed at LNE. It will be dedicated to traceable dimensional measurements and calibrations of transfer standards with a maximum size of 25 mm × 25 mm × 7 mm. The displacement range is 60 µm for the X and Y axes and 15 µm for the Z axis. The instrument uses four laser differential interferome...
Patent
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The invention relates to a precision positioning device comprising a base, moveable stage and four double parallelograms connecting the stage to the base. Each double parallelogram comprises six deformable vertices forming six pivots so that the stage can move in translation in a reference plane. Thanks to the four double parallelograms, the moveab...
Article
Scanning probe microscopes are very well used for characterization at the nanometer scale. To ensure the measurement coherency and the accuracy of the results, those microscopes need to be periodically calibrated. It's done thanks to reference standards whose dimensional characteristics are measured by a metrological atomic force microscope (mAFM)...
Article
SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is...
Article
Full-text available
SPM users need to calibrate their instrument periodically in order to provide some traceable measurements and to improve their measurements capabilities. This calibration task is achieved thanks to standards - 1D or 2D gratings - whose dimensional characteristics have been characterized by a National Metrology Institute. Within this context, LNE is...

Citations

... A pseudo-linear behaviour of the Allan deviation is observed with an increase as a function of the time. Such a behaviour is related to various instrument drifts especially due to temperature instability and has already been shown in the case of measurements carried out with a metrological AFM along X, Y and Z axes [18,19]. As the white noise regime cannot be clearly highlighted because masked by these various drifts, it is impossible to correctly characterize the type A uncertainty. ...
... Ces efforts de conception durant ces deux thèses ont permis d'abaisser de façon significative le niveau de certaines contributions (erreur d'Abbe, dilatation, dérives, etc.). Deux premiers bilans d'incertitude ont été réalisés dans lesquels les principales sources d'erreur qui perturbent le processus de mesure ont été évaluées expérimentalement [3,6], mais également à par- tir de spécifications techniques fournies par les constructeurs sur différents composants de l'AFM métrologique. Cependant, le fait que le système de mesure du mAFM soit complexe, les évaluations de l'incertitude de certaines composantes sont expérimentale- ment impossibles, pour d'autres, elles ont été généralement surestimées ou oubliées. ...
... Afin de maintenir cette amplitude constante, la force exercée par la colonne est modulée, ce qui permet d'identifier les variations de la morphologie de surface. [43] Ainsi, en balayant une partie de l'échantillon, la morphologie de surface de la couche active peut être déterminée. Des images AFM ont été réalisés dans le cadre de la thèse pour la compréhension des mélanges ternaires et seront montrés dans le chapitre IV de ce manuscrit. ...
... Assemblage final de la platine Z et de la platine à pantographe tel qu'il est utilisé sur l'AFM métrologique.De par son aspect novateur et par les qualités de guidage obtenues, cette platine de translation à trois axes a fait l objet en d un dépôt de brevet américain[100]. ...
... On a small-range scale they may be considered negligible when the system configuration follows the Abbe principle, the microscope probe coinciding with all the measuring axes [7]. Nanopositioning stages covering ranges over 1 mm or even several cm represent a very complex problem requiring designs with a sophisticated flexture lever system [8][9][10][11][12] or high-quality guidance reducing the backlash [13,14]. Covering a large range with linear positioning actuators needs to overcome the dynamic range either with a stepping principle with incremental steps or magnetic, voice coil actuators operating with displacement integrating the drive current. ...
... The geometry is a 3D grating with a nominal X/Y pitch equal to 900 nm and a step height of 60 nm. The P 900 H 60 was calibrated beforehand using the LNE's metrological AFM (mAFM) [20]. mAFM is the French national reference instrument ensuring the dimensional measurement traceability at the nanoscale level. ...