Benjamin Y. H. Liu’s research while affiliated with University of Minnesota, Duluth and other places

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Publications (154)


Aging effects in test silicon wafers prepared for wafer cleaning process evaluation
  • Chapter

January 2023

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11 Reads

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Greg Thomes

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James Weygand

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Kenton Childs

Electrical ionizer for aerosol charge conditioning and measurement

September 2017

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10 Reads

A method and apparatus are disclosed for exposing particles in a gas in order to cause the charge on the particles to change, the apparatus comprising a chamber having a conductive wall with a gas inlet and a gas outlet. An electrode with an exposed tip is in the chamber, the electrode being held at a different potential from the ground potential. The electrode is connected to a source of voltage sufficient to cause a corona discharge to occur forming ions in the chamber, and creating a region with a high electric field intensity and another region in which the electric field intensity is lower. The inlet and outlet define a gas flow path from the inlet to the outlet such that the gas flow path passes mainly through the region with the lower electric field intensity.


Particle Sampling and Measurement in the Ambient Air

January 2017

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27 Reads

An apparatus and method for sampling and measuring air born particulate matter includes an inlet for the particulate containing gas to enter. A mechanism then removes coarse particles larger than a selected size while permitting filtered particles of less than the selected size to pass through. A chamber containing a quartz crystal sensor permits the filtered particles that have passed through to deposit to create an output signal in response to the deposited particle mass.



Water-Based Single-Flow Mixing Condensation Particle Counter

August 2016

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59 Reads

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5 Citations

A novel water-based condensation particle counter has been developed using a patented, single-flow mixing (SFM) condenser that permits a conventional thermal approach of using a hot saturator followed by a cold condenser to activate and grow particles for counting with an optical detector. A computational fluid dynamics (CFD) model of the internal flow, temperature, and vapor profiles was used to predict the effectiveness of the SFM condenser. Using the results from the CFD model, the counting efficiency was numerically calculated for pure water droplets, and the CPC cut-point (i.e., 50% counting efficiency) was predicted to be 8.3 nm. The experimental performance of the new CPC was measured with differential mobility analyzer-classified, monodisperse particles. The measured cut-points were 8.2 nm for Ag particles and 3.9 nm for NaCl particles. The reduction in the cut-point for NaCl is the result of a compound effect: water uptake by NaCl particles, which increases their size before entering into the growth section (condenser), and the reduction of the equilibrium vapor pressure of water over NaCl-water droplets, resulting in a decrease of the activation diameter. Copyright © 2016 American Association for Aerosol Research


Generation of Monodisperse Aerosols by Combining Aerodynamic Flow-Focusing and Mechanical Perturbation

January 2016

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347 Reads

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28 Citations

A novel instrument has been developed for generating highly monodisperse aerosol particles with a geometrical standard deviation of 1.05 or less. This aerosol generator applies a periodic mechanical excitation to a micro-liquid jet obtained by aerodynamic flow-focusing. The jet diameter and its fastest growth wavelength have been optimized as a function of the flow-focusing pressure drop and the liquid flow rate. The monodisperse aerosol generated by this instrument is also charge neutralized with bipolar ions produced by a non-radioactive, corona discharge device. Monodisperse droplet generation in the 15- to 72-μm diameter range from a single 100-micron nozzle has been demonstrated. Both liquid and solid monodisperse particles can be generated from 0.7- to 15-μm diameter by varying solution concentration, liquid flow rate, and excitation frequency. The calculated monodisperse particle diameter agrees well with independent measurements. The operation of this new monodisperse aerosol generator is stable and reliable without nozzle clogging, typical of other aerosol generators at the lower end of the operating particle size ranges.Copyright © 2016 American Association for Aerosol Research


Apparatus for vapor condensation and recovery
  • Patent
  • Full-text available

May 2014

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11 Reads

Methods and apparatus for recovery of precursor vapor from a gas and precursor vapor mixture used in a deposition process. The gas and precursor vapor mixture is passed through a multitude of heat transfer surfaces in a heat conducting housing causing the precursor vapor to condense. The precursor vapor in liquid form is then collected after condensation.

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Apparatus for counting particles in a gas

April 2014

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5 Reads

The present disclosure describes a method and apparatus for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.


Apparatus for counting particles in a gas

April 2014

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17 Reads

The present disclosure describes a method and apparatus for detecting particles in a gas by saturating the gas with vapor and causing the gas to flow through a chamber with walls that are at a temperature different than the temperature of the entering gas creating a gas turbulence within the chamber resulting in the gas becoming super-saturated with vapor and causing said super-saturated vapor to condense on said particles and form droplets, which are then detected and counted by an optical light-scattering detector.


Method and apparatus for generating vapor at high rates

October 2013

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16 Reads

The present disclosure relates to an apparatus and a method for vaporizing a liquid to form vapor preferably in a gas stream. The apparatus includes a composite metal structure, the structure comprising a plurality of passageways for providing heat to vaporize the liquid in the gas stream to form a gas/vapor mixture. A non-corrosive interface lies between the metal structure and the gas/vapor mixture, the interface being chemically inert to the gas/vapor mixture and the structure permitting heat to be conducted rapidly therethrough to vaporize the liquid. The apparatus further includes an inlet for the gas and an inlet for the liquid to be vaporized to flow into the plurality of passageways and an exit through which the gas/vapor mixture exits the apparatus.


Citations (68)


... As another predominant technology for measuring PN concentration, CPC can measure particle number concentration in a wide range from several particles to 5◊10 4 cm −3 [21][22][23][24][25][26]. Based on the characteristics of single-particle-counting, accurate particle concentration can be obtained by CPC method. ...

Reference:

Numerical simulation on the effects of flow parameters on the detection performance of a self-developed condensation particle counter
Water-Based Single-Flow Mixing Condensation Particle Counter
  • Citing Article
  • August 2016

... A novel water-based condensation particle counter has been developed using a patented (Liu et al., 2013), single-flow mixing (SFM) condenser that permits a conventional thermal approach of using a hot saturator followed by a cold condenser to activate and grow particles for counting with an optical detector. A CFD model of the internal flow, temperature and vapor profiles was used to predict the effectiveness of the SFM condenser. ...

Method for counting particles in a gas

... As a result, the filter reaches ∆p fdop much earlier and for a smaller mass of retained dust. Such a phenomenon was observed during experimental [44][45][46][47][48] and numerical [48,49] studies of fibrous materials and during experimental studies of the "cyclone-pleated filter paper" assembly [50][51][52][53]. ...

Dust Loading Behavior of Engine and General Purpose Air Cleaning Filters
  • Citing Conference Paper
  • February 1997

SAE Technical Papers

... Through gas-to-particle conversion process, the acidic gases and NH 3 may involve in the formation of fine particles. The condensation-induced particle formation during vacuum pump down containing aggressive compounds from humid air and inorganic pollutants has been investigated (Ye et al., 1993). Fine particles are also generated by gas phase nucleation in thin film preparation processes (Adachi et al., 1994). ...

Condensation-induced particle formation during vacuum pump down
  • Citing Article
  • May 1993

... In order to maximize the SNR, an increase in both S λ and I sct , together with a decrease in I B , ΔB, and i D should be made. The theoretical model for the scattered light intensity I sct in Eq. (1) can be divided into two different approaches: a numerical approach that solves Maxwell's equations [16,17] and an approximate approach called the Mie theory base on a far-field analytical solution of Maxwell's equations [18,19]. To illustrate the main parameters of instrumentation design frankly, I sct is approximately expressed as a function F of the parameters as follows: ...

Sizing accuracy, counting efficiency, lower detection limit and repeatability of a wafer surface scanner for ideal and real-world particles
  • Citing Article
  • May 1993

... [6] Although membrane technology has made great progress in cross-flow microporous media manufacturing in the past few decades, and although synthetic polymers like polyvinylidene difluoride (PVDF) and polytetrafluoroethylene (PTFE) are commonly used to produce submicron-rated media for the purification of colloidal particles, such as bacteria, fibres, semiconductors and other low-concentration material purification, most of the bonding, laminating, coating and impregnating techniques used today by the filtration media manufacturers are still for the purposes of air and dust filtration. [22], [23] For conventional heavy-duty solid-liquid separation processes, the tensile strength requirement of media is typically higher than 55 N m-1 , combined with low longitudinal expansion. For submicron particle capture, however, the traditional monofilament woven fabrics are limited to an open pore diameter of approx. ...

Filtration of Real-World Particles in Liquids by Microporous Membrane Filters
  • Citing Article
  • May 1995

Journal of the IEST

... The filtration mechanism and efficiency depend not only on the filter properties but also on the operating conditions and interactions among filter material, fluid and particles to be separated [62][63][64][65]. Therefore, filtration tests were performed in order to evaluate the filters developed here. ...

Particle Capture Mechanisms in Gases and Liquids: An Analysis of Operative Mechanisms in Membrane/Fibrous Filters
  • Citing Article
  • July 1989

Journal of the IEST

... Also, a decrease in air supply velocity could decrease nonuniformity. In Sadjadi and Liu's (1991) experimental tests, decreasing average velocity from 0.46 m s -1 to 0.41m s -1 offered a 3% decrease in air velocity nonuniformity. A study on optimizing cleanroom air velocity found that 0.30-0.33 ...

Supply Plenum and Airflow Uniformity in Cleanrooms
  • Citing Article
  • March 1991

Journal of the IEST

... The problem of particle bounce and re-entrainment is relatively new and there is a scarcity of information available on this topic. Poon and Liu [13] observed the penetration of particles of N 2 μm diameter through a foam filter media at a velocity of 6.5 m/s. They also found that the particle re-entrainment due to bounce increased with increasing porosity of the filter media. ...

Fractional Efficiency and Particle Mass Loading Characteristics of Engine Air Filters
  • Citing Article
  • February 1997

SAE Technical Papers

... Alonso et al. (11) also reported that corona voltages larger than 3.6 kV promoted the formation of new particles. These particles probably came from the corona-emitting electrode by erosion or sputtering (35,36) , or from gaseous contaminants present in the system (37) . For the latter, the following mechanism was proposed (38) : (a) contaminant molecules are ionized in the corona discharge field; (b) these ions form cores, around which water molecules are bonded; (c) the contaminant-water elementary units grow into molecular clusters and finally, through coagulation, into nanometer-sized particles. ...

Aerosol Charging and Neutralization and Electrostatic Discharge in Clean Rooms
  • Citing Article
  • March 1987

Journal of Environmental Sciences