October 2012
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61 Reads
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15 Citations
Thin Solid Films
Zinc nitride films were deposited on Si(100) substrates at room temperature using RF-magnetron sputtering in pure N-2 and in Ar + N-2 atmospheres. Two active phonon modes (270.81 and 569.80 cm(-1)) are observed in Raman spectra for films deposited in Ar + N-2 atmosphere. Atomic force microscopy showed that the average surface roughness of the films deposited in pure N-2 atmosphere (1.3-3.33 nm) was less than for those deposited in a mixed Ar + N-2 atmosphere (10.3-12.8 nm). Low temperature cathodoluminescence showed two emission bands centered at 2.05 eV and 3.32 eV for both types of films.