December 2017
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326 Reads
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83 Citations
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December 2017
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326 Reads
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83 Citations
... In response to market demands, the transistor dimensions have been scaled down proportionally according to Moore's Law. As an alternative to planar metal-oxide-semiconductor field-effect transistors (MOSFETs), fin field-effect transistors (FinFETs), which utilize a three-dimensional architecture with the gate wrapping around vertical fins on top and sides, have been developed and commercialized in 22 nm CMOS technology [1][2][3]. During the past decades, FinFET technology has been successfully applied to 5 nm and even 3 nm technology nodes through higher aspect ratio and layout optimization [4][5][6][7][8]. ...
December 2017