July 2023
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The full nonlinear equations of motion are derived for a general angularly driven rate gyro. Sensitivity to cross-axis angular input rates and angular input accelerations are shown in simplified form for design purposes. The gyro drive and sense axes can be operated either nonresonantly or resonantly where the natural frequencies coincide with the forcing moment. The tuning requirements and increase in coriolis sensitivity for resonant operation are detailed. Using this tuning technique, a two input axis micromachined rate gyro has been fabricated which can sense 0.15 °/sec in a 20Hz bandwidth.