M.-H. Bao

Fudan University, Shanghai, Shanghai Shi, China

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Publications (7)3.49 Total impact

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    X Zhao · J M Tsai · H Cai · X M Ji · J Zhou · M H Bao · Y P Huang · D L Kwong · A Q Liu
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    ABSTRACT: This paper reports a nano-opto-mechanical pressure sensor based on nano-scaled ring resonator. The pressure is measured through the output spectrum shift which is induced via mechanical deformation of the ring resonator. The sensitivity as high as 1.47 pm/kPa has been experimentally achieved which agrees with numerical prediction. Due to the strong variation of sensitivity with different ring radius and thickness of the diaphragm, the pressure sensor can be used to form an array structure to detect the pressure distribution in highly accurate measurement with low-cost advantages. The nano-opto-mechanical pressure sensor has potential applications such as shear stress displacement detection, pressure wave detector and pressure mapping etc.
    Full-text · Article · Apr 2012 · Optics Express
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    ABSTRACT: This paper presents a Nano-opto-mechanical actuator, which is driven by optical radiation force. The actuator consists of two waveguides, two identical ring resonators, and an actuator with Bragg reflector. Light is injected into the waveguides and coupled to the Bragg reflector via the ring resonator. The actuator is displaced by the optical force. The achieved maximum displacement of the actuator is 500.2 nm with the optical power up to 200 mW. The optical actuator has merits of high resolution (2.501 nm/mW), approximately perfect linear displacement and contact-free optical drive, which results in potential applications such as precise distance control, tunable laser, and weak force detection.
    Full-text · Conference Paper · Jul 2011
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    ABSTRACT: A Nano-opto-mechanical pressure sensor using optical force is reported in this paper. The pressure sensor consists of a square diaphragm, a ring resonator and four waveguides. By applying a pressure ranging from 900 kPa to 990 kPa, the output intensity ratio sensitivity of -2.272 /kPa is achieved. Compared with traditional MEMS pressure sensor, the proposed ring pressure sensor has advantages such as higher sensitivity and resolution, which could be applied to acoustic pressure sensors and microphones etc.
    Full-text · Conference Paper · Jul 2011
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    ABSTRACT: This paper presents a pressure sensor array based on optical force using Nano-opto-mechanical Systems (NOMS). It consists of a deformable diaphragm and a waveguide array. When pressure is applied on the diaphragm, the gap between the diaphragm and the waveguide is reduced. The induced optical force deforms the waveguide and change the optical loss. In the experiment, it measures up to 32 dB optical output modulation when the pressure is changed from 0 kPa to 250 kPa. The proposed waveguide pressure sensor array has advantages such as high sensitivity (0.128 dB/kPa) and feasibility of mapping the pressure distributions, which result in potential applications such as microphone acoustics sensors and bio-medical sensors.
    Full-text · Conference Paper · Jul 2011
  • G.-X. Wang · X.-M. Ji · J. Zhou · Z.-M. Bao · M.-H. Bao · Y.-P. Huang
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    ABSTRACT: Based on photonic crystal and surface plasmon resonance (SPR) technology, a novel tunable MEMS infrared radiation (IR) source was studied and fabricated. Compared with conventional infrared radiation source, the infrared spectrum of the novel infrared radiation source is narrow and tunable. Its substrate is Si, and SiO 2-Cr-Au structure is formed on Si surface. Then 2 μm-depth periodic holes array is etched on Si-SiO 2-Cr-Au structure whose distances between the holes with diameters of 3.5 μm and 4 μm are 7 μm and 8 μm respectively. By theoretical calculation, simulation with finite-difference time-domain (FDTD) software and measurement using FTIR (Magna 550), the results show that the novel MEMS infrared radiation source is of narrow peak, and reflection peak wavelength is close to the distance between the holes. Furthermore, transmission strength is inverse to the hole depth in a certain scope, it is found that the deeper the depth of the hole, the weaker the SPR effect within certain range.
    No preview · Article · Dec 2007 · Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
  • Y.-I. Guo · G.-C. Xu · J. Zhou · Y.-P. Huang · M.-H. Bao
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    ABSTRACT: Theory of photostriction effect on silicon microcantilevers is studied. Based on fundamental mechanics and semiconductor physics, and considering the spatial distribution and surface recombination of photoinduced carriers, we build a new model for photo-induced bending of silicon microcantilevers and calculation of the photo-induced deformation, The model interprets the motivity of photoinduced bending more reasonably than former reported. In addition, results worked out from the model approximates to the experimental values much better. This study establishes the theoretical ground for researches of silicon microcantilever sensors based on photostriction effect.
    No preview · Article · Oct 2006 · Chinese Journal of Sensors and Actuators
  • Z.-X. Cheng · W.-N. Huang · J. Zhou · Y.-P. Huang · M.-H. Bao
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    ABSTRACT: A micromachined neural probe with multiple electrodes is presented. The micro probe is characterized using impedance analyzer. The AC impedance of single electrode in the frequency range from 100 to 1 000 Hz is measured in physiological saline solution. At the working frequency of 1 kHz, its AC resistance and AC capacitive reactance reaches 100 kΩ and 10 kΩ, respectively, with time drift less than 1%. As a preliminary application, the AC impedance between two electrodes is measured in NaCl solution with different concentrations. The results show that the probe is applicable for the future biological experiments.
    No preview · Article · Oct 2006 · Chinese Journal of Sensors and Actuators