[Show abstract][Hide abstract] ABSTRACT: Waveguide structures were fabricated in both nanocrystalline CVD diamond (NCD) and HPHT type 1b single crystal diamond using photolithography and reactive ion etching. The combination of these techniques allows the patterning of many long photonic structures simultaneously, making it easily scalable. Emphasis has been placed on reducing sidewall roughness to prevent loss due to scattering. In single crystal diamond a peak-to-peak roughness of approximately 10 nm (estimated from SEM images) was achieved for the majority of the structure sidewall.
Full-text · Article · Nov 2008 · Diamond and Related Materials
[Show abstract][Hide abstract] ABSTRACT: This paper by S. Trpkovski et al reports on various techniques for integrating Microwave Plasma Chemical Vapour Deposition (MPCVD) nanocrystalline diamond with photonic devices. MPCVD diamond incorporating nickel defects has been grown on the end facets of optical fibres. Single photon emission with a wavelength of approximately 800 nm has been measured from these nickel defects. These diamond-based single photon sources have the potential to be used in numerous applications including Quantum Key Distribution. In addition, the growth of MPCVD diamond on the end facets of titanium-diffused LiNbO3 waveguides is also being investigated. The capability to integrate high-speed, low-loss LiNbO3 with MPCVD diamond offers an exceptionally flexible platform for practical quantum optical devices. Furthermore, research is currently being undertaken into the fabrication of optical waveguide structures in MPCVD nanocrystalline diamond thin-films. These diamond films have been grown on silica-coated silicon wafers and patterned by both Reactive Ion Etching and Focused Ion Beam milling to construct optical waveguide structures.
[Show abstract][Hide abstract] ABSTRACT: Diamond has a range of extraordinary properties and the recent ability to produce high quality synthetic diamond has paved the way for the fabrication of practical diamond devices. This paper details the recent progress in the fabrication of waveguide structures in diamond which are desirable as the basis for quantum key distribution (QKD), quantum computing and high-power, high speed microwave chips. The diamond ridge waveguide structures are produced by photolithography and reactive ion etching (RIE) with some additional processing with a focused ion beam (FIB). The processes currently used are discussed along with experimental results. Future fabrication goals and potential methods for achieving these goals are also presented.
Full-text · Article · Dec 2007 · Proceedings of SPIE - The International Society for Optical Engineering
[Show abstract][Hide abstract] ABSTRACT: Diamond photonic devices present a range of opportunities due to their unique properties. This paper presents progress in the fabrication of diamond waveguides using reactive ion etching (RIE), as a step towards all-diamond optics.