[Show abstract][Hide abstract] ABSTRACT: To realize a high throughput optical mask-less lithography (OML) which is utilized for the semiconductor integrated circuit (IC) mass fabrication, we have been studying the high speed spatial light modulator (SLM). In this paper, we report a Micro-mirror On Ribbon-actuator (MOR) as a novel MEMS SLM. The MOR consists of a ribbon actuator which carries a mirror placed on the offset position. The mirror tilts when the ribbon actuator is bent by electrostatic force. The high speed driving of the MOR is realized by the high resonant frequency of the ribbon actuator and the large damping factor of the submicron gap. The MOR showed the routinely switching response of less than 3 musec and the resonant frequency of around 1.7 MHz. The 8times8 passive matrix drive of the MOR was also demonstrated.
[Show abstract][Hide abstract] ABSTRACT: Technique to pop up a plate vertically using the technique for IC manufacturing process is applicable to various devices in both RF and optical MEMS. This paper introduces novel technique using "Turning-structured Bi-material Beams" for fabrication of a vertical structure and explains success in fabrication of a vertical structure by applying the technique.
[Show abstract][Hide abstract] ABSTRACT: We have been studying the "Optically Readable Bimaterial Infrared
Detector" based on surface micro-machining wafer process technology to
realize an inexpensive infrared camera. This paper reports that we have
developed a detector by incorporating the new "Cancel Structure" and we
have successfully obtained an infrared image without a thermo-electric