L.-Y. Chen

Massachusetts Institute of Technology, Cambridge, Massachusetts, United States

Are you L.-Y. Chen?

Claim your profile

Publications (8)3.94 Total impact

  • Source
    [Show abstract] [Hide abstract]
    ABSTRACT: We report micro-fabricated double-gated vertically aligned carbon nanofiber (CNF) arrays for ionization of gasses in low power portable mass spectrometers. The devices can be operated in one of two modes - electron impact ionization (EII ) or field ionization (FI). When operated as electron impact ionizer, power dissipation was reduced from >1 W typical of thermionic emission based electron impact ionizers to <100 mW. When operated as a field ionizer, the turn-on voltage for field ionization is reduced from 5-10 kV typical of ungated ionizers to 350 V.
    Full-text · Conference Paper · Jan 2008
  • [Show abstract] [Hide abstract]
    ABSTRACT: In this work, we designed and fabricated two types of double-gated isolated vertically aligned carbon nanofiber field emission arrays (VACNF FEAs) to study how the tip position relative to the gate affects the device performance. In the first type, the tip is in-plane with the gate, and in the second type, the tip is 0.9 mum below the gate. To quantify the effectiveness of the two gates to affect the total emission current, the gate field factor (beta<sub>G</sub>) and the focus field factor (beta<sub>F</sub>) are examined for both types of VACNF FEAs experimentally and by simulation.
    No preview · Conference Paper · Aug 2007
  • [Show abstract] [Hide abstract]
    ABSTRACT: This presentation will introduce several MEMS/NEMS devices being developed in the Micro-systems Technology Laboratories at MIT that are focused on scaling laboratory instruments to smaller dimensions. We will illustrate this trend with three examples that result in the reduction of power consumption as well as improvements in performance. These systems rely on massive parallel operation of the individual scaled-down elements and leverage micro- & nano-fabrication technologies to achieve improvement in their performance.
    No preview · Article · Jan 2007
  • [Show abstract] [Hide abstract]
    ABSTRACT: This presentation will introduce several MEMS/NEMS devices being developed in the Microsystems Technology Laboratories at MIT that are focused on scaling laboratory instruments to smaller dimensions. We will illustrate this trend with three examples that result in the reduction of power consumption as well as improvements in performance. These systems rely on massive parallel operation of the individual scaled-down elements and leverage micro- & nano-fabrication technologies to achieve improvement in their performance.
    No preview · Article · Jan 2007
  • L.-Y. Chen · A.I. Akinwande
    [Show abstract] [Hide abstract]
    ABSTRACT: Double-gated silicon field emission arrays (FEAs) are fabricated with the tip 400 nm below the extraction gate and 600 nm below the focus. The diameters of the gate and focus apertures are 0.4 μm and 0.7 μm respectively. For this structure, an abrupt drop in anode current is observed when the focus voltage V<sub>f</sub> is less than 12 V. For the range of focus voltages 4 V < V<sub>f</sub> < 12 V, the anode current initially increases with the gate voltage because the net repulsive force is still small. The emitted current increases with V<sub>G</sub> due to repulsion by the focus. Eventually, the anode current peaks and a negative resistance region ensue. Further increase of V<sub>G</sub> shuts off the anode current. For focus voltage > 12 V, the balance between the emission and repulsive forces is such that there is a monotonic increase in anode current with V<sub>G</sub> and shows no negative resistance region.
    No preview · Conference Paper · Aug 2005
  • AI Akinwande · I Kymissis · CY Hong · LY Chen

    No preview · Article · Mar 2005 · Journal of vacuum science & technology. B, Microelectronics and nanometer structures: processing, measurement, and phenomena: an official journal of the American Vacuum Society
  • LY Chen · A.I. Akinwande
    [Show abstract] [Hide abstract]
    ABSTRACT: In this work, the gate field factor and focus field factor were examined in the double-gated field emission array (FEA) and were shown to have strong influence on the initial beam spread. The optical measurement verified that the device with the tip below the gate aperture provides a small beam spread.
    No preview · Conference Paper · Aug 2004
  • [Show abstract] [Hide abstract]
    ABSTRACT: The Micro Gas Analyzer (MGA) project aims to develop the technology for real-time sensors intended for chemical warfare. The device is composed of four micro-fabricated subsystems: 1) an ionizer; 2) a mass filter based on a quadrupole (1); 3) a species sensor based on a resonator (2); and 4) a pump (3). We are developing a field ionizer array based on gated CNTs. We plan to use arrays of CNTs because of their small radii, high aspect ratio, and gate proximity to ensure high fields at low voltage. State-of-the-art ionizers use electron impact ionization (thermionic cathodes), incurring in excessive power consumption, low current, current density, ionization efficiency, and short lifetime. Each of the proposed ionizer arrays - the impact and field - offer distinct advantages. The electron impact ionizer and field ionizer arrays both are more efficient and consume less power than thermionic cathodes, and variation of gate voltage in each improves specificity. The field ionizer, however, is based on the concept of electron tunneling (electrons tunnel in the outer shell of the molecule, due to the presence of high electric fields). Because of this, the field ionizer is able to soft-ionize species, thus achieving molecule ionization. The reliability and device lifespan of the field- tunneling ionizer is increased by biasing CNTs to the highest potential in the circuit, thus making it unlikely for ionized molecules to back-stream. In the case of the electron impact ionizer, the reliability and lifespan of the ionizer is improved by using a double gate.
    No preview · Article ·