[Show abstract][Hide abstract] ABSTRACT: A super-fine inkjet technology that enables fine pattern processing by super fine droplets measuring less than 1 micro-meter are developed. Direct drawing of metal wires having a width of just a few microns have we have been achieved by using a conductive paste which is made from nano-metal particles as an ink. Furthermore, direct forming of three-dimensional structures at any point on the substrate have been demonstrated, by taking advantage of the fast drying by such fine droplets. The process is simple and it can be carried out on the desktop in the air at room temperature. This technology should be useful from the keywords of current packaging trend of miniaturization and integration.
[Show abstract][Hide abstract] ABSTRACT: We have developed an ink-jet system which allows arrangements of dots with a submicron minimum size. Using an ultra-fine silver
paste, we achieved the direct print of metallic wires of only a few micrometers in width without any pre-patterning treatment
of the substrate, hydrophobic/hydrophilic patterning, bank patterning etc. We also propose an application, such as direct
printing of ultra-fine redistribution wiring for a build-up board and/or package. Since all of these processes can be carried
out at atmospheric pressure on the desktop without special treatment of the substrate. The direct fabrication process using
ink-jet printing can be expected to be a powerful tool for both nanotechnology research and applications such as micro electronics,
No preview · Article · Dec 2005 · Microsystem Technologies