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Hybrid vision system for online measurement of
surface roughness
Gui Yun Tian
School of Computing and Engineering, University of Huddersfield, Queensgate, Huddersfield, HD1 3DH, UK
Rong-Sheng Lu
School of Instrument Science and Opto-Electronic Engineering, Hefei University of Technology, Hefei, Anhui, China
Received May 5, 2006; revised June 7, 2006; accepted June 23, 2006; posted July 10, 2006 (Doc. ID 70586)
A hybrid vision system for online measurement of surface roughness is introduced. The hybrid vision system
applies two cameras for capturing the laser speckle pattern and scattering images simultaneously. With the
help of advanced image processing, several features of texture and shape are computed for the surface rough-
ness characterization. On the basis of experimental tests, feature fusion to improve measurement range and
linearization of the measurement is also discussed. © 2006 Optical Society of America
OCIS codes: 290.0290, 240.0240.
1. INTRODUCTION
Surface roughness measurement is very important for
production quality control. It is essential to implement it
to ensure that the quality of a manufactured part can con-
form to its specified standard. It has been carried out us-
ing many technologies, such as contact stylus, microscopy,
ultrasonic and optical methodology, etc.1,2 It is worth no-
ticing that some modern techniques such as atomic force
microscopy and stylus can provide surface data with high
accuracy. However, these methods are difficult to apply
because they need delicate adjustment, extremely short
working distances, or contact with the surfaces measured.
Therefore, the development of noncontact optical tech-
niques to monitor surface changes is an area of high in-
terest, particularly online noncontact and high-speed
monitoring of surface roughness.
The typical methods based on light scattering are the
total integrated scattering (TIS) and angle-resolved scat-
tering (ARS) methods.2,3 In general, TIS methods have a
simple instrumentation and are more convenient to oper-
ate for surface roughness measurement, but much more
statistical information can be extracted from ARS. Over
the past decades, many efforts have been made to inves-
tigate the relationship between the surface roughness
and the angular distribution of scattered light
intensity.4–6 However, the theoretical expression of ARS
against root-mean-square (RMS) roughness height in-
volves states of polarization of incident light and light dif-
fraction. It is therefore difficult to precisely establish it in
theory. The derivation often makes a lot of assumptions
and simplifications so that the theoretical expression
sometimes has only qualitative meaning.7In practical on-
line surface roughness measurement, the statistical
methods representing scattered light intensity distribu-
tion against surface roughness are used.8Oneofthe
methods is based on the phenomenon that the intensity
distribution of the scattered light in the plane formed by
the incident light beam and surface normal depends on
the scattered light angle against the normal direction,
and there is more angular light scattering for a rougher
surface. Surface roughness in the algorithm is deter-
mined by computing the variance of the in-plane light-
scattering angle.9Another method has been carried out
with a machine-vision system, where surface roughness is
characterized by the frequency distribution of the gray-
level occurrence in a scattered light intensity image. The
scattered light frequency distribution is actually the his-
togram of the light-scattering intensity image obtained by
a CCD camera. Surface roughness in this method is
evaluated by the ratio between the RMS value of the his-
togram and its standard deviation.10 Other algorithms,
such as using the gray-level co-occurrence matrix11
(GCLM), are also used. However, these methods are often
effective for surfaces with uniform roughness distribution
and under conditions of noncoherent light illumination.
For the surfaces of steel parts manufactured by grinding,
milling, turning, etc., they often fail without any knowl-
edge of the surface micromanufacturing mark directions.
Surface roughness measurement by laser speckle
methods is used. Using the different properties of speckle
fields and the different setups of optical systems, re-
searchers have also developed a variety of speckle meth-
ods for surface roughness measurement. For instance,
surface roughness measurement may be implemented by
the speckle pattern illumination methods12,13 the speckle
contrast methods,14 and the speckle correlation
methods.15 Surface roughness measurement by means of
speckle pattern illumination is convenient to determine
RMS roughness height in the submicrometer range but
acquires a a complicated optical illumination system con-
sisting of a diffuser and lens.13 The speckle contrast
methods, which are based on the first-order statistics of
surface speckle patterns, usually can evaluate surface
roughness value less than Ra⬍0.3
m. Speckle correla-
3072 J. Opt. Soc. Am. A/Vol. 23, No. 12/ December 2006 G. Y. Tian and R.-S. Lu
1084-7529/06/123072-8/$15.00 © 2006 Optical Society of America