Conference Paper

Analysing Antenna Ratio Dependence of Plasma Charging Damage with Weibull Breakdown Statistics

IMEC, Leuven, Belgium
DOI: 10.1109/ESSDERC.2000.194831 Conference: Solid-State Device Research Conference, 2000. Proceeding of the 30th European
Source: IEEE Xplore

ABSTRACT

First Page of the Article

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