A multi-step DRIE process for a 128 × 128 micromirror array

Conference Paper · September 2003with6 Reads
DOI: 10.1109/OMEMS.2003.1233463 · Source: IEEE Xplore
Conference: Optical MEMS, 2003 IEEE/LEOS International Conference on
A multi-step DRIE process for fabricating a vertical comb-driven micromirror array with five different heights was developed. This process was used to fabricate a dual-axis 128 × 128 micromirror array with a high resonance frequency.
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    Full-text · Article · · Journal of Microelectromechanical Systems
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