Conference Paper

Dual-Electrode SC 0.3 AL 0.7 N pMUT with Ultra-High Output Pressure for Long Distance Ranging

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Conference Paper
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This paper reports a low-frequency piezoelectric micromachined ultrasonic transducer (pMUT) with small attenuation coefficient to realize long-distance range finding in air. Pulse-detection measurements of one pair of elements show >6-meter traveling distance in air under a 37.32 kHz driving frequency. As an example, two chips are mounted on two drones as the transceiver and receiver, respectively, to demonstrate the distance measurements based on the Time-of-Flight (ToF) principle, capable of up to 32 fps (frames per second) real-time distance detections. The drone-mounted pMUT system demonstrates the advantages of pMUT in compactness and low power consumption, shedding light on applications including obstacle avoidance, inter collision prevention, aerial robot coordination, and acoustic-based robotic vision for drones.
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This paper presents an airborne piezoelectric micromachined ultrasonic transducers (PMUTs) operated at low frequency (40-50 kHz) for long-range detection, where the acoustic absorption loss in air is relatively low (0.8-1 dB/m). The PMUTs made with single-crystal Lead Zirconate Titanate (PZT) enables a high piezoelectric coefficient (e31, f ≈ 16- 24 C/m²), and a low dielectric constant (ϵr ≈ 308), achieving high PMUT transceiver efficiency. The 2x 2 PMUT array achieves a very high sound pressure level (SPL) output of 109.4 dB at 26 cm distance. Different from conventional PZT PMUTs, this study utilized single-crystal PZT with a low permittivity to achieve a good acoustic reception, demonstrating the sensitivity of 2 mV/Pa. This work reports the PMUT design, modeling, fabrication, characterization, enabling a long-range detection of 4.8 meters in a pulse-echo experiment, which was conducted by a pair of 2x 2 PMUT arrays with the matched resonances. [2020-0270]
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