The concept of lattice misfit and strain distribution at a heterointerface is reconsidered, taking into account the interdiffusion of substrate and layer components. Based on calculated compositional profiles for multicomponent solid solutions, the respective lattice-parameter profiles and stress profiles in the interface region of an epilayer system have been derived. For different diffusion
... [Show full abstract] coefficients and different influences of substrate and layer components on the lattice parameters, stresses develop due to interdiffusion during growth although the natural lattice matching is perfect. The stresses are formed both in the substrate and the layer and change their sign near the interface. Depending on the diffusion of substrate and layer components and on the sign of the natural misfit more than one stress-free plane can occur. They are shifted away from the interface either into the substrate or into the layer, the distance depending on the diffusion time. The model was applied to LPE-grown (Hg,Cd)Te on different substrates.