Conference Paper

Quality of SOI film after surface smoothing with hydrogen annealing, touch-polishing

SEMATECH, Austin, TX
DOI: 10.1109/SOI.1997.634967 Conference: SOI Conference, 1997. Proceedings., 1997 IEEE International
Source: IEEE Xplore

ABSTRACT

We have conducted an investigation to evaluate the impact of both
touch-polish and hydrogen annealing at different temperatures on the
roughness, on the SOI film removal, as well as the impact of so
processed surface on the integrity of gate oxide thermally grown on it,
for SIMOX and BESOI material

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