Crossatron Modulator Designs And Performance For Plasma-based Ion Implantation Systems

Conference PaperinPower Modulator Symposium, 1994., Conference Record of the 1994 Twenty-First International · July 1994with10 Reads
DOI: 10.1109/MODSYM.1994.597029 · Source: IEEE Xplore
Conference: Power Modulator Symposium, 1994., Conference Record of the 1994 Twenty-First International

    Abstract

    First Page of the Article