Article

Rigidity of a Multilayer Piezoelectric Actuator for the Nano and Micro Range

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... Today, nanotechnology is used in many fields such as electronics, aerospace, medical applications, pharmaceuticals, cosmetics, and environmental processes. Nanostructures have been used as essential elements with crucial functions for many applications in mechanical science, such as nano switches, nano actuators, nanosensors, nano-resonators, and fluid transport devices by [1][2][3][4][5]. Undoubtedly, nanomechanics is one of the main areas of study at the nanoscale. ...
... Today, nanotechnology is used in many fields such as electronics, aerospace, medical applications, pharmaceuticals, cosmetics, and environmental processes. Nanostructures have been used as essential elements with crucial functions for many applications in mechanical science, such as nano switches, nano actuators, nanosensors, nano-resonators, and fluid transport devices [1][2][3][4][5]. Undoubtedly, nanomechanics is one of the main areas of study at the nanoscale. ...
Article
In this study, vibrations of stepped nanobeams were investigated according to Eringen’s nonlocal elasticity theory. Multi-time scale method, which is one of the perturbation methods, has been applied to solve dimensionless state equations. The solution is considered in two steps. First-order terms obtained from the perturbation expansion formed the linear problem in the first step. In the second step, the solution of the second order of the perturbation expansion was made and nonlinear terms emerged as corrections to the linear problem from this solution. The main issue that the study wants to emphasize is the examination of the mechanical effects of the steps, which are discontinuities encountered at the nanoscale, on the system. For this purpose, while the findings of the research were obtained, various nonlocal parameter values were obtained to capture the nano-scale effect, and frequency-response and nonlinear frequency-amplitude curves corresponding to the 1st Mode values of the beam for different step ratios and step locations were obtained to capture the step effect. One of the important features of the nonlinear system is the formation of internal resonance between the modes of the system. How this situation affects the characteristics of the system has also been examined and results have been given by graphs. The obtained data show that taking into account the nanoscale step is essential for the accuracy and sensitivity of many nanostructures such as sensors, actuators, biostructures, switches, etc. that are likely to be produced at the nanoscale in practice.
... We can experience nano sensors, nano actuators, nanoresonators, and nanofluid carriers with new physical properties that we can describe as completely different and perfect. (see [1], [2], [3], [4], and [5]). ...
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Free vibration of stepped nanobeams was investigated using Eringen's nonlocal elasticity theory. Beam analysis is based on Bernoulli-Euler theory and nanoscale analysis is based on Eringen's nonlocal elasticity theory. The system boundary conditions were determined as simple-simple. The equations of motion of the system were obtained using Hamilton's principle. For the solution of the obtained state equations, a multi-time scale, which is one of the perturbation methods, was used. The results part of the study, it is aimed to observe the nano-size effect and the effects of the step state. For this purpose, the natural frequency values of the first three modes of the system were obtained for different non-local parameter values, step rates, and step positions. When the results were examined, it was determined that the non-local parameter value, step ratio, and natural frequency were inversely proportional to each other. In addition, to strengthen the accuracy of the results, the results obtained were compared with the results of other studies in the literature conducted under the specified conditions, and a perfect agreement was observed. The current beam model, on the other hand, could help design and manufacture ICs such as nano-sensors and nano-actuators.
... There are three properties: piezoelectricity, dielectricity and the elastic property. Furthermore, they are widely used in medical imaging [3,4], sensors [5], actuators [6], ultrasonic motors [1,7,8], micro-electro-mechanical systems [9] and ultra-precision measurements [10,11]. With piezoelectric actuators, small displacements are produced by the inverse piezoelectric effect of piezoelectric materials. ...
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The manipulator is the key component of the micromanipulator. Using the axial expansion and contraction properties, the piezoelectric tube can drive the manipulator to achieve micro-motion positioning. It is widely used in scanning probe microscopy, fiber stretching and beam scanning. The piezoceramic tube actuator used to have continuous electrodes inside and outside. It is polarized along the radial direction. There are relatively high polarization voltages, but poor axial mechanical properties. A new tubular actuator is presented in this paper by combining interdigitated electrodes and piezoceramic tubes. The preparation, polarization and mesoscopic mechanical properties were investigated. Using Lead Zirconate Titanate (PZT-52) as a substrate, the preparation process of interdigitated electrodes by screen printing was studied. For initial polarization voltage determination, the local characteristic model of the actuator was extracted and the electric field was analyzed by a finite element method. By measuring the actuator’s axial displacement, we measured the actuator’s polarization effect. Various voltages, times and temperatures were evaluated to determine how polarization affects the actuator’s displacement. Optimal polarization conditions are 800 V, 60 min and 150 °C, with a maximum displacement of 0.88 μm generated by a PZT-52 tube actuator with interdigitated electrodes. PZT-52 tube actuators with a continuous electrode cannot be polarized under these conditions. The maximum displacement is 0.47 μm after polarization at 4 kV. Based on the results, the new actuator has a more convenient polarization process and a greater axial displacement from an application standpoint. It provides technical guidance for the preparation and polarization of the piezoceramic tube actuator. There is potential for piezoelectric tubular actuators to be used in a broader range of applications.
... Precision actuators with a piezoelectric component as the core show micro/nano displacement resolution. They play an important role in submicron and micro/nano ultra-precision drive and control technology [12][13][14]. Piezoelectric ceramics possess the advantages of convenient control, high power density, high displacement resolution, fast frequency response, low power consumption, no noise, and strong anti-electromagnetic interference ability [1]. They have developed into a unique driving form in the field of precision drive and are applied in automatic assembly devices, micro-robot operation, micro-machinery manufacturing, precision optical adjustment, precision positioning, nano-machining and optical fiber operation [15][16][17][18]. ...
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A new piezoelectric actuator combining interdigitated ring electrodes and a PZT-52(Lead Zirconate Titanate) disk was investigated for the large displacement requirements of piezoelectric actuators. Finite element models were established according to the structural characteristics of the actuator and static analysis was carried out based on ANSYS software. Then Ø25 mm × 2 mm samples were prepared. The displacement detection system was established, and the influence of electrode structure on radial displacement was studied experimentally. A comparison between the experimental results and the finite element analysis confirmed that the finite element model was correct. The results showed that the effect of electrode width on displacement was small. With decrease in electrode center distance and increase in the number of electrodes pairs, the radial displacement increased correspondingly. The peak of radial displacement was 1.63 μm under a 200 V voltage excitation voltage of 0.2 Hz. This was 2.5 times that for a conventional electrode piezo disk with the same structure. The actuator demonstrated better displacement properties. The piezoelectric disk could be valuable in applications involving micro-nano devices.
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