With the development of science and technology, piezoelectric actuators are widely used in many fields. A piezoelectric driven nanopositioning actuator based on the stick-slip motion is proposed in this paper, it can achieve long-stroke linear motion with high resolution. It mainly consists of the slider, two piezoelectric stacks, two flexure hinge mechanisms, wedge blocks, screws and the base.
... [Show full abstract] The piezoelectric stack and the flexure hinge are used to produce the stick-slip motion, they can provide both the preload force and the needed push force. The working principle is discussed and one prototype was fabricated to test its working performs. The mechanical structure and the step motion perform are shown in Fig. 1. The experiments indicate that the maximum working speed is about 6mm/s, the maximum output force is about 3.43N.