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Phase change in GeTe/Sb2Te3 superlattices: Formation of the vacancy-ordered metastable cubic structure via Ge migration

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Abstract

Interfacial phase-change memory (iPCM), comprising alternating layers of two chalcogenide-based phase-change materials—Sb2Te3 (ST) and GeTe (GT)—has demonstrated outstanding performance in resistive memories. However, its comprehensive understanding is controversial. Herein, the phase-change characteristic of iPCM is identified using atomic scale imaging, X-ray diffraction, and chemical analysis with first-principles density functional theory (DFT) calculations. By inducing laser pulsing, the ST/GT superlattice structure in the low-resistance state tends to reversibly convert into the modified metastable face-centered cubic (fcc) GeSbTe structure in the high-resistance state. This transition is driven by Ge atom rearrangement to pre-existing vacancy layers and ordered vacancy-layer formation. DFT atomistic modeling shows that the resistance difference of 10² orders between low- and high-resistance states is a direct consequence of the intercalation of Ge atoms into the vacancy layer. These results provide insights into iPCM phase-change mechanisms and phase-change random access memory design with low energy and high speed.

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... In GST alloy, phase change occurs with reversible switching between octahedral and tetrahedral motifs of Ge atom. Similar phase change process with Ge atoms have been reported for GT/ST SL. 28 The difference is that the phase change process in the superlattice structure is limited to the area near interface (vdW gap), hence reducing entropic loss compared to GST alloy. 7 To investigate the change in the local structure of Ge atoms at the vdW interface using DFT calculations, unit cells of GT/(Ti)-ST SL were constructed using Ferro structure taking Ge/Sb intermixing 17 into account to reflect the experimental environment. ...
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Interfacial Phase Change Memory (iPCM) retrench unnecessary power consumption due to wasted heat generated during phase change by reducing unnecessary entropic loss. In this study, an advanced iPCM (GeTe/Ti-Sb2Te3 Superlattice) is synthesized by doping Ti into Sb2Te3. Structural analysis and density functional theory (DFT) calculations confirm that bonding distortion and structurally well-confined layers contribute to improve phase change properties in iPCM. Ti-Sb2Te3 acts as an effective thermal barrier to localize the generated heat inside active region, which leads to reduction of switching energy. Since Ge-Te bonds adjacent to short and strong Ti-Te bonds are more elongated than the bonds near Sb-Te, it is easier for Ge atoms to break the bond with Te due to strengthened Peierls distortions (Rlong/Rshort) during phase change process. Properties of advanced iPCM (cycling endurance, write speed/energy) exceed previous records. Moreover, well-confined multi-level states are obtained with advanced iPCM, showing potential as a neuromorphic memory. Our work paves the way for designing superlattice based PCM by controlling confinement layers.
... 30 SET and RESET phases of the superlattices. 33 It is a notable result that spontaneous transition from octahedron to tetrahedron has been achieved during the structural relaxation of the superlattices. These results directly suggest that about 30% of the content of Ge in tetrahedron drastically changes the type of the bond which is consistent with the experimentally estimated value of the contents (30%) in the alloys via structural analysis. ...
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Traditional von Neumann computing systems involve separate processing and memory units. However, data movement is costly in terms of time and energy and this problem is aggravated by the recent explosive growth in highly data-centric applications related to artificial intelligence. This calls for a radical departure from the traditional systems and one such non-von Neumann computational approach is in-memory computing. Hereby certain computational tasks are performed in place in the memory itself by exploiting the physical attributes of the memory devices. Both charge-based and resistance-based memory devices are being explored for in-memory computing. In this Review, we provide a broad overview of the key computational primitives enabled by these memory devices as well as their applications spanning scientific computing, signal processing, optimization, machine learning, deep learning and stochastic computing.
Article
Ge/Sb atomic intermixing in interfacial cationic layers is a common phenomenon for GeTe-Sb2Te3 superlattice (GST-SL) used in memory devices. In this paper, we explored the effect of Ge/Sb intermixing on the phase change behavior of GST-SL upon the heating-quenching procedure. Four interfacial intermixing models of Kooi, Ferro, Petrov and Inverted Petrov with different Ge/Sb intermixing ratios (25/75, 50/50 and 75/25) were developed based on the ab initio molecular dynamics. The structural evolution indicated that the Ge/Sb interfacial intermixing could facilitate the structure changes especially for 50/50 Ge/Sb intermixed models. When quenching from 1500 K, more 4-fold Ge-centered octahedrons were produced than tetrahedrons, and the electron localization function further proved that the distorted of Ge(Sb)-centered 6-fold octahedrons were caused by the asymmetrical interactions of Ge-Ge/Sb and Ge-Te. A relatively large Te p orbital contribution in coexisted Ge/Te layer led to a narrower bandgap. In addition, different Ge/Sb atom intermixed ratio which affected the electronic local structure, led to the discrepancy in the initial atom movement of Sb or Ge movement near the gap. The present studies enrich the understanding of Ge/Sb interfacial atomic intermixing effects in GST-SL structural changes.
Article
Van der Waals (vdW) layered GeTe-Sb2Te3 superlattices (GST-SL) have attracted enormous attentions due to the ultralow power consumption for nonvolatile phase change memory. In this paper, effects of biaxial strain on interfacial intermixing and local structures in strain engineered GST-SL were studied. Highly (0 0 l) textured GST-SL with thickness-varied Sb2Te3 sublayers were fabricated by magnetron sputtering and investigated with multiple analyses on surfaces and interfaces. The appearance of Ge-Sb-Te alloys indicated the interfacial Ge/Sb intermixing in strain engineered GST-SL, which actually were composed of Sb2Te3 quintuple layers, Ge-Sb-Te vdW layers and isolated GeTe bilayers. Grazing incidence x-ray diffraction (GID) and x-ray photoelectron spectroscopy (XPS) results revealed that biaxial strain not only facilitated the interfacial intermixing, but also caused the reconfiguration of Ge-Sb-Te vdW layers. Raman spectra indicated that vertical and in-plane vibrations of GeTe layers were not affected by the interfacial intermixing and the newly-formed Ge-Sb-Te layers had similar vibration characteristics as that of GeTe layers. A modified switching mechanism of GST-SL, relating to both the amorphous-crystalline phase transition of GeTe and Ge-Sb-Te layers incorporated into the Sb2Te3 matrix, was then presented. The present studies shed new light on strain engineering for GST-SL and indicate their potential optoelectronic applications.
Article
Phase change superlattice is one of the emerging material technologies for ultra-low power phase change memories. However, the resistance switching mechanisms of phase change superlattice are still hotly debated. Besides interfacial crystalline phase change and bulk crystalline-to-amorphous phase change, the possibility of filamentary switching cannot be ruled out. Here, we study the atomic and electronic structures of Te and Sb native filaments embedded in the host Ge2Sb2Te5 superlattices. Te and Sb have compatible structures to Ge2Sb2Te5 superlattice with lower band gap values. In addition, the filament-to-dielectric interfaces can inherently be carrier excessive. These indicate that Te or Sb filament is likely to form and leads to considerable decrease of the resistance locally.
Article
Phase Change Memory (PCM) is a leading candidate for next generation data storage, but it typically suffers from high switching (RESET) current density (20–30 MA/cm²). Interfacial Phase Change Memory (IPCM) is a type of PCM using multilayers of Sb2Te3/GeTe, with up to 100× lower reported RESET current compared to the standard Ge2Sb2Te5-based PCM. Several hypotheses involving fundamentally new switching mechanisms have been proposed to explain the low switching current densities, but consensus is lacking. Here, we investigate IPCM switching by analyzing its thermal, electrical, and fabrication dependencies. First, we measure the effective thermal conductivity (∼0.4 W m−1 K⁻¹) and thermal boundary resistance (∼3.4 m² K GW⁻¹) of Sb2Te3/GeTe multilayers. Simulations show that IPCM thermal properties account only for an ∼13% reduction of current vs standard PCM and cannot explain previously reported results. Interestingly, electrical measurements reveal that our IPCM RESET indeed occurs by a melt-quench process, similar to PCM. Finally, we find that high deposition temperature causes defects including surface roughness and voids within the multilayer films. Thus, the substantial RESET current reduction of IPCM appears to be caused by voids within the multilayers, which migrate to the bottom electrode interface by thermophoresis, reducing the effective contact area. These results shed light on the IPCM switching mechanism, suggesting that an improved control of layer deposition is necessary to obtain reliable switching.
Article
Chalcogenide-based thin films are employed in data storage and memory technology whereas van der Waals bonded layered chalcogenide heterostructures are considered as a main contender for memory devices with low power consumption. The reduction of switching energy is due to the lowering of entropic losses governed by restricted motion of atoms in one dimension within the crystalline states. The investigations of switching mechanisms in such superlattices have recently attracted much attention and the proposed models are still under debate. This is partially due to the lack of direct observation of atomic scale processes, which might occur in these chalcogenide systems. This work reports a direct, nanoscale observations of the order-disorder processes in van der Waals bonded Ge-Sb-Te thin films and GeTe-Sb2Te3 based superlattices using in situ experiments inside an aberration-corrected transmission electron microscope. The findings reveal reversible self-assembled reconfiguration of structural order in those materials. The process is associated with ordering of randomly distributed vacancies within of the studied materials into ordered vacancy layers and with readjustment of lattice plane distances within the newly formed layered structures, showing high flexibility of the layered chalcogenide-based systems. Thus, the ordering process results in the formation of vacancy-bonded building blocks intercalated within of van der Waals bonded units. Moreover, vacancy-bonded building blocks can be reconfigured to the initial structure under influence of the electron beam, while in situ targeted electron beam exposure of the recovered layers lead to the reverse process. Overall, the outcomes provide new insights into local structure and switching mechanism in chalcogenide superlattices.
Article
Two-dimensional van-der-Waals-bonded chalcogenide heterostructures have recently received a lot of attention due to promising applications in the fields of photonics, plasmonics and data storage. Of particular interest is the interfacial switching process inherent in these structures, which is assumed to occur locally at the van-der-Waals interfaces and thus represents an intracrystalline transition. However, detailed experimental studies on the underlying mechanism are still lacking. In this work, epitaxially grown thin films consisting of van-der-Waals-bonded Ge-Sb-Te and GeTe/Sb2Te3 based heterostructures are employed as a model system to investigate structural changes induced by a single ns-laser pulse. A combined approach using X-ray diffraction and advanced transmission electron microscopy is applied to study phase transitions within the Ge-Sb-Te-based thin films in detail. The results reveal ultrafast transitions from 2D-bonded layered structures to 3D-bonded structures via a transient molten phase. Moreover, the interface between the 2D- and 3D-bonded structures is well defined by a single van-der-Waals gap, suggesting that the transition can be controlled very precisely in its spatial extent by an appropriate choice of the laser fluence. Overall, the results of this work offer a new perspective on the switching mechanism in Ge-Sb-Te-based materials and demonstrate the potential of van-der-Waals-bonded Ge-Sb-Te compounds to be applied for novel phase-change memory concepts.
Article
Van der Waals layered GeTe/Sb2Te3 superlattices (SLs) have demonstrated outstanding performances for use in resistive memories in so‐called interfacial phase‐change memory (iPCM) devices. GeTe/Sb2Te3 SLs are made by periodically stacking ultrathin GeTe and Sb2Te3 crystalline layers. The mechanism of the resistance change in iPCM devices is still highly debated. Recent experimental studies on SLs grown by molecular beam epitaxy or pulsed laser deposition indicate that the local structure does not correspond to any of the previously proposed structural models. Here, a new insight is given into the complex structure of prototypical GeTe/Sb2Te3 SLs deposited by magnetron sputtering, which is the used industrial technique for SL growth in iPCM devices. X‐ray diffraction analysis shows that the structural quality of the SL depends critically on its stoichiometry. Moreover, high‐angle annular dark‐field‐scanning transmission electron microscopy analysis of the local atomic order in a perfectly stoichiometric SL reveals the absence of GeTe layers, and that Ge atoms intermix with Sb atoms in, for instance, Ge2Sb2Te5 blocks. This result shows that an alternative structural model is required to explain the origin of the electrical contrast and the nature of the resistive switching mechanism observed in iPCM devices.
Article
BoltzTraP2 is a software package for calculating a smoothed Fourier expression of periodic functions and the Onsager transport coefficients for extended systems using the linearized Boltzmann transport equation. It uses only the band and $k$-dependent quasi-particle energies, as well as the intra-band optical matrix elements and scattering rates, as input. The code can be used via a command-line interface and/or as a Python module. It is tested and illustrated on a simple parabolic band example as well as silicon. The positive Seebeck coefficient of lithium is reproduced in an example of going beyond the constant relaxation time approximation.
Article
Interfacial phase change memory (iPCM) based on GeTe and Sb2Te3 superlattices (SLs) is an emerging contender for non-volatile data storage applications. A detailed knowledge of the atomic structure of these materials is crucial for further development of SLs and for a better understanding of the resistivity switching characteristics of iPCM devices. In this work, crystalline GeTe-Sb2Te3-based SLs, produced by pulsed laser deposition onto a Si(111) substrate at temperatures lower than in previous studies, are analyzed by advanced scanning transmission electron microscopy. The results reveal the formation of Ge-rich Ge(x+y)Sb(2–y)Tez building blocks with specific numbers of ordered Ge cation layers (between 1 and 5) and disordered cation layers (4) for z = 6–10, as well as intermixed cation layers for z = 5, within the SLs. The G Ge(x+y)Sb(2–y)Tez units are separated from the Sb2Te3 building blocks by van der Waals gaps. In particular, the interlayer bonding is promoted by the formation of outermost cation layers consisting of intermixed GeSb within the building blocks adjacent to the van der Waals gaps. The Ge(x+y)Sb(2–y)Tez units with z > 5 retain metastable crystal structures with two-dimensional bonding within the SLs. The present study shed new light on the possible configurations of the building units that can be formed during the synthesis of GeTe-Sb2Te3-based iPCM materials. In addition, a possible switching mechanism active in iPCM materials is discussed.
Article
Phase-change materials based on GeSbTe show unique switchable optoelectronic properties and are an important contender for next-generation non-volatile memories. Moreover, they recently received considerable scientific interest, because it is found that a vacancy ordering process is responsible for both an electronic metal-insulator transition and a structural cubic-to-trigonal transition. GeTe-Sb2Te3 based superlattices, or specifically their interfaces, provide an interesting platform for the study of GeSbTe alloys. In this work such superlattices have been grown with molecular beam epitaxy and they have been characterized extensively with transmission electron microscopy and x-ray diffraction. It is shown that the van der Waals gaps in these superlattices, which result from vacancy ordering, are mobile and reconfigure through the film using bi-layer defects and Ge diffusion upon annealing. Moreover, it is shown that for an average composition that is close to GeSb2Te4 a large portion of 9-layered van der Waals systems is formed, suggesting that still a substantial amount of random vacancies must be present within the trigonal GeSbTe layers. Overall these results illuminate the structural organization of van der Waals gaps commonly encountered in GeSbTe alloys, which are intimately related to their electronic properties and the metal-insulator transition.
Article
GeTe–Sb2Te3 superlattices have attracted major interest in the field of phase-change memories due to their improved properties compared with their mixed counterparts. However, their crystal structure and resistance-switching mechanism are currently not clearly understood. In this work epitaxial GeTe–Sb2Te3 superlattices have been grown with different techniques and were thoroughly investigated to unravel the structure of their crystalline state with particular focus on atomic stacking and van-der-Waals bonding. It is found that, due to the bonding anisotropy of GeTe and Sb2Te3, the materials intermix to form van-der-Waals heterostructures of Sb2Te3 and stable GeSbTe. Moreover, it is found through annealing experiments that intermixing is stronger for higher temperatures. The resulting ground state structure contradicts the dominant ab-initio results in the literature, requiring revisions of the proposed switching mechanisms. Overall, these findings shed light on the bonding nature of GeTe–Sb2Te3 superlattices and open a way to the understanding of their functionality.
Article
We studied GeTe structures in superlattice phase change memories (superlattice PCMs) with a [GeTe/Sb2Te3] stacked structure by X-ray diffraction (XRD) analysis. We examined the electrical characteristics of superlattice PCMs with films deposited at different temperatures. It was found that XRD spectra differed between the films deposited at 200 °C and 240 °C; the differences corresponded to the differences in the GeTe sequences in the films. We applied first-principles calculations to calculate the total energy of three different GeTe sequences. The results showed the Ge-Te-Ge-Te sequence had the lowest total energy of the three and it was found that with this sequence the superlattice PCMs did not run.
Article
The resistance of amorphous chalcogenides used in phase change memory devices increases over time due to structural relaxation (SR). The resistance drift usually follows a power law with time described by an exponent nu. Understanding the origin of may lead to engineering methods to improve the stability in memory devices. This work presents an analytical model to describe the activation energies for conduction and SR based on the Meyer-Neldel rule. The model accounts for the observed temperature and time dependence of resistance, and highlights that nuis related to the ratio between conduction and SR activation energies at any given time during drift.
Article
The XPS/XAES technique is applied to analyze the dominant electronic state of In, Ga, Ge impurities in PbTe single crystals doped above the point of Fermi level stabilization. It is shown that the effective electronic state of In impurity in PbTe can be represented as a mixture of 5s25p1 and 5s05p3 configurations, while Ga impurity atoms are present in the donor configuration 4s04p3. Oxidation state of Ge-atom is more than 2+. Vacancionic and interstitial clusters were revealed in Pb1-xInxTe by x-ray diffusive scattering method.
Article
The energies of Ge 2p3/2, Ge 3d, Te 3d5/2, Te 4d5/2 and Sn 3d5/2 photopeaks were measured for vacuum-cleaved GeTe and Ge0.9Sn0.1Te crystals, obtained by the ‘vapour–solid liquid’ technique (VLS). The oxidation of cleaved surfaces in air at ambient temperature and humidity was studied by X-ray photoelectron spectroscopy (XPS). The oxidation seems to take place even after few minutes of air exposure. The first stage of the oxidation results in entire Ge oxidation to the oxidation state 4+ and partial Te oxidation to the elemental state. The intermediate oxidation product is supposed to be GeO2−xTex. The second stage is slower than the first one, and it leads to further Te oxidation to 4+ oxidation state and also the significant surface enrichment in Ge.
Article
A rapid and reversible transition between a highly resistive and conductive state effected by an electric field, which we have observed in various types of disordered semiconducting material, is described in detail. The switching parameters and chemical composition of a typical material are presented, and microscopic mechanisms for the conduction phenomena are suggested.
Article
Core-level and valence-band spectra have been obtained by means of x-ray photoemission spectroscopy for the group IV, V, and VI elements Ge, Sn, Pb, As, Sb, Bi, S, Se, and Te and the group IV-VI compounds GeS, GeSe, GeTe, SnS, SnSe, SnTe, PbS, PbSe, and PbTe. These results, taken under ultrahigh-vacuum conditions with unmonochromatized x rays, are presented and discussed in terms of the bonding in materials with an average valence of 5. The effects of relaxation on the chemical shifts are found to be relatively small. The chemical shifts are found to vary in a manner similar to that expected from the magnitude of the elemental electronegativities except for the ordering of the shifts of GeS and GeSe. Relative charge transfers are calculated from the chemical shifts and are found to be in general agreement with ionicities calculated using the Phillips-Van Vechten theory although there is some disagreement as to their magnitudes. A consideration of the structures of the compounds relative to the charge transfers demonstrates the importance of metallic as well as covalent and ionic bonding in determining the most stable structure. The value of critical ionicity carried over from the average-valence-4 materials does not apply to the average-valence-5 materials and this concept does not appear useful in understanding their bonding because of the increased importance of nondirectional metallic bonding.
Article
An approach for electronic structure calculations is described that generalizes both the pseudopotential method and the linear augmented-plane-wave (LAPW) method in a natural way. The method allows high-quality first-principles molecular-dynamics calculations to be performed using the original fictitious Lagrangian approach of Car and Parrinello. Like the LAPW method it can be used to treat first-row and transition-metal elements with affordable effort and provides access to the full wave function. The augmentation procedure is generalized in that partial-wave expansions are not determined by the value and the derivative of the envelope function at some muffin-tin radius, but rather by the overlap with localized projector functions. The pseudopotential approach based on generalized separable pseudopotentials can be regained by a simple approximation.
Article
We present ab initio quantum-mechanical molecular-dynamics calculations based on the calculation of the electronic ground state and of the Hellmann-Feynman forces in the local-density approximation at each molecular-dynamics step. This is possible using conjugate-gradient techniques for energy minimization, and predicting the wave functions for new ionic positions using subspace alignment. This approach avoids the instabilities inherent in quantum-mechanical molecular-dynamics calculations for metals based on the use of a fictitious Newtonian dynamics for the electronic degrees of freedom. This method gives perfect control of the adiabaticity and allows us to perform simulations over several picoseconds.