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Scanning Electron Microscopy (SEM)
Data Management at the SEM Facility for
Diagnostics and Plasma Surface Technology
Dr. Jan Schäfer
QPTDat Workshop Plasma Surface Technology
1st July 2021
SEM Facility
➢Field Emission Scanning Electron Microscope, Jeol JSM-7500F and more…
2
SEM ‘cockpit’
SEM with 5 detectors
(STEM, EDX, LABE, in-lens, SE)
Sample coater (Au, …), Cross-section polishing
Sample preparation, plasma cleaning
Ultramicrotom, trimming, cutting
(slides up to 20 nm)
Highlights of SEM
➢Outstanding analysis for nanotechnology and plasma science
➢Universal tool for the surface diagnostics in a broad area of applications
3
Safeguarding Good Research Practice
5
Operator/
ideas/
team
Practice/
Kodex
Publication
➢Keep the professional ethics
➢Assure the quality
➢Play clear roles and responsibility
➢Consider the current state of research
➢Respect rights and obligations
from legal requirements
➢Document all information
relevant to the experiment
➢Provide public access to research results
Guidelines for Safeguarding Good Research Practice,
Code of Conduct, DFG 2019, www.dfg.de/en
Metadata/
protocols,
reports,
LabBook
Functions of Data Documentation
6
Data in
network
Metadata/
protocols,
reports,
LabBook
Publication
✓Transparent specification of research context (SEM, TEM, ESEM, …)
✓Description of methodological details (SEI, BEI, STEM, …)
✓Preserving know-how and state of the art (database, galleries, storage, …)
✓Protection of intellectual property (timestamping, signatures, …)
✓Scientific communication (workshops, data sharing, …)
…
Workflow and Data Documentation at SEM
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Data in
network
Metadata/
protocols,
reports,
LabBook
1. Registration in SEM database (sample IDs, specifications, requests, …)
2. Scheduling by mailing software and calendar (coordination, …)
3. Laboratory book of SEM (date, operator, conditions, …)
4. Data acquisition (raw images, settings parameters)
5. Report on SEM results Publication
Electronic Protocol of the SEM Analysis in eLabFTW
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QR, Unique eLabID
www.elabftw.net
I. General (Date | Tags | Objectives | Purpose | Deadline | Operating expense |
Project | Responsible person)
II. Analysis (Device | Emitter | Extraction voltage | Pressure | Detectors | Color coding
| Working distance | Acceleration voltage | Magnifications)
III. Samples (ID | Priority | Material | Safety and specification | Imaging)
IV. Plasma Source (optional)
V. Plasma Medium (optional)
VI. Attached files
Data Management at SEM
11
SEM/
analysis
➢The goal: relevance –credibility –accessibility –order.
Data in
network
(local)
Sample/
target
Process
Operator/
ideas/
team
Practice/
Kodex
Metadata/
protocolls,
reports,
LabBook
Publication
Conclusion
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➢Clear and complete documentation of the experiment is
a prerequisite of valuable results
➢Systematic and safe storage of data and metadata is
the basis of preserving know-how and state of the art
➢Transparent documentation and publication of
metadata increases the plausibility of the results,
scientific communication and prevents data misuse or
manipulation
➢eLabFTW applied for SEM facility
Contact –SEM facility
Leibniz Institute for Plasma Science and Technology
Address: Dr. Jan Schäfer, Felix-Hausdorff-Str. 2, 17489 Greifswald
Phone: +49 - 3834 - 554 3838, Fax: +49 - 3834 - 554 301
E-mail: jschaefer@inp-greifswald.de
Web: www.inp-greifswald.de 13