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A combined virtual impactor and field-effect transistor microsystem for particulate matter separation and detection

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Abstract

HIGHLIGHTS • A proposed microsystem system potentially provides accurate and calibration-free measurements based on a combination of front-end particulate matter (PM) separation and back-end PM detection. • Silicon dioxide particles are used to verify the performance of the system’s virtual impactor, and an accurate cutoff diameter of 2 μm in low air flow rates can be obtained. • Experimental results suggest that the proposed microsystem has potential for accurate real-time analysis of PM pollution under complex conditions.

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