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Research Article
Electromagnetoelastic Actuator for Nano Physics and Optics Sciences
National Research University of Electronic Technology, MIET, Moscow, Russia
Afonin SM
*Corresponding author
Afonin SM, National Research University of Electronic Technology, MIET, Moscow, Russia, Email: learner01@mail.ru
Received: June 28, 2020; Accepted: July 04, 2020; Published: July 20, 2020
Journal of Physics & Optics
Sciences
Volume 2(3): 1-3
Keywords: Electromagnetoelastic Actuator, Deformation,
Regulation Characteristic, Mechanical Characteristic, Piezo
Actuator, Transfer Coefcient, Matrix Transfer Function, Nano
Research and Science
Introduction
The electromagnetoelastic actuator at the piezoelectric or
electrostriction effect is used for nano physics and optics sciences
[1-15]. The electromagnetoelastic actuator is the electromechanical
device for actuating and controlling mechanisms, systems with
the conversion of electrical signals into mechanical displacements
and forces. The electromagnetoelastic actuator is provided range
of movement from nanometers to ten microns, force 1000 N,
response 1-10 ms [16-34].
Characteristics of Actuator
Сharacteristics of actuator are used in the calculation of nano
mechatronics control systems for nano physics and optics sciences.
From the electromagnetoelasticity equation [7, 11-32] the relative
deformation of electromagnetoelastic actuator at elastic force has
the form
where l, Δl, dmi , Ψm , Sij
Ψ, Ce , S0 are the length, the deformation
or displacement of the electromagnetoelastic actuator, the
electromagnetoelastic module or the piezo module, the electric
or magnetic eld strength, the elastic compliance at Ψ = const,
stiffness of the load, the area of the actuator, i, j, m are the indexes.
The regulation characteristic of the actuator at elastic force has
the form
where Cij
Ψ is stiffness of the electromagnetoelastic actuator at Ψ
= const. Therefore, the regulation characteristic for the transverse
piezo actuator for the elastic load has the form
where k
U
31
is the transfer coefcient for voltage. For the piezo
actuator from ceramic PZT at = 2.10-10 m/V, l/ δ = 20, C11
E = 2
˙
107
N/m, Ce = 0.5˙107 N/m, U = 25 V we obtain values the transfer
coefcient for voltage kU
31 = 3.2 nm/V and the displacement Δl
= 80 nm.
The mechanical characteristic of the electromagnetoelastic
actuator has the form
where Δl
max
is the maximum displacement for F=0 and F
max
is the
maximum force for Δl=0. The maximum displacement and the
maximum force for the piezo actuator with the transverse piezo
effect have the form
At d
31
= 2∙10
-10
m/V, E
3
= 1.5˙10
5
V/m, l= 2∙10
-2
m, S
0
= 1˙10
-5
m
2
,
s11
E = 15˙10-12 m2/N the maximum displacement Δlmax = 600 nm
and the maximum force F
max
= 20 N are received for the mechanical
characteristic of the transverse piezo actuator from ceramic PZT.
The second order linear ordinary differential equation has the form
J Phy Opt Sci, 2020
ABSTRACT
e regulation and mechanical characteristics of the electromagnetoelastic actuator are obtained for control systems in nano physics and optics sciences
for scanning microscopy, adaptive optics and nano biomedicine. e piezo actuator is used for nano manipulators. e matrix transfer function of the
electromagnetoelastic actuator is received for nano physics and optics sciences.
Open Access
Volume 2(3): 2-3J Phy Opt Sci, 2020
Citation: Afonin SM (2020) Electromagnetoelastic Actuator for Nano Physics and Optics Sciences. Journal of Physics & Optics Sciences. SRC/JPSOS/125.
where Ξ (x, p) is the Laplace transform of the displacement of the
electromagnetoelastic actuator; C and B are the coefcients; x is
the coordinate; p is the Laplace operator; γ = p/cΨ + α is the wave
propagation coefcient; cΨ is the speed of sound in the actuator
at Ψ =const ; α is the attenuation coefcient.
From solution this second order linear ordinary differential
equation and the electromagneto elasticity equation the system
of the equations for the structural model and diagram on Figure
1 of the electromagnetoelastic actuator are obtained for nano
physics and optics sciences
Figure1: Structural diagram of electromagnetoelastic actuator
for nano physics and optics sciences
After the transformation the structural model of the
electromagnetoelastic actuator the system of the equations for
the Laplace transform of the displacements of two faces of the
actuator has the form
The matrix equation with the matrix transfer function of the
electromagnetoelastic actuator has the form
where (Ξ(p)) is the column-matrix of the Laplace transforms of
the displacements for the faces 1, 2 of the electro magneto elastic
actuator, (W(p)) is the matrix transfer function, (P(p)) the column-
matrix of the Laplace transforms of the control parameter and the
forces for the faces 1, 2.
Therefore, the transfer functions of the electromagnetoelastic
actuator in the form of the elements in the matrix transfer function
are written in the form
The transfer function for voltage with lumped parameter of the
transverse piezo actuator [7, 11-32] with xe one face for the
elastic-inertial load has the form
where Ξ(p), U(p) are the Laplace transforms of the displacement
and the voltage, T
t
, ξ
t
are the time constant and the damping
coefcient of the piezo actuator, M is the load mass. At d
31
=
2˙10-10 m/V, = 20, M =1 kg, C11
E = 2˙107 N/m, Ce = 0.5˙107
N/m values the transfer coefcient for voltage k31
U = 3.2 nm/V
and the time constant of the piezo actuator T
t
= 0.2˙10
-3
s are
obtained for the transverse piezo actuator with the elastic-inertial
load. The discrepancy between the experimental and calculation
data for the piezo actuator is 10%.
Conclusions
The regulation characteristic and the matrix transfer function of the
electromagnetoelastic actuator are received for nano physics and
optics sciences. The maximum displacement and the maximum
force are obtained for the mechanical characteristic of the actuator.
The transfer functions of the electromagnetoelastic actuator in the
form of the elements in the matrix transfer function are obtained
for control system. The characteristics of the actuator are used
for the calculation the control system for nano physics and optics
sciences.
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Copyright: ©2020 Afonin SM. This is an open-access article distributed
under the terms of the Creative Commons Attribution License, which permits
unrestricted use, distribution, and reproduction in any medium, provided the
original author and source are credited.
Citation: Afonin SM (2020) Electromagnetoelastic Actuator for Nano Physics and Optics Sciences. Journal of Physics & Optics Sciences. SRC/JPSOS/125.
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