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Electroelastic Actuator for Nanomechanics
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Structural-parametric models and configurations for a multilayer piezoelectric motor with a transverse piezo effect are obtained, with allowance for the counteremf. The transfer functions are determined; the geometric parameters and physical characteristics are taken into account, as well as the counteremf and the external load.
A study was conducted to prepare a structural parametric model of a pie piezoelectric nanodisplacement transducer. The structural parametric model was prepared to investigate the potential application of the piezoelectric transducer in the equipment of nanotechnology, microbiology, microelectronics, astronomy, for high-precision superposition, compensation, and wavefront correction. It was found that the piezoelectric transducer operates on the basis of the inverse piezoelectric effect, in which a displacement is due to the deformation of the piezoelectric element, caused by the application of an external electric voltage. The wave equations also needed to solved, to construct a structural parametric model of the voltage-controlled piezoelectric transducer.
Compression and elastic-pliability diagrams of nano-scale piezomotors
- S M Afonin
Structural-parametric model of a piezonanomotor
- S M Afonin
Tochnye dvukhkanal’nye sledyashchie elektroprivody s p’ezokompensatorami (Precise Two-Channel Tracking Electric Actuators with Piezocompensators)
- A A Skii