In this article investigations on micromilling of hardened tool steels as well as developments for an efficient process design are presented. In the course of this, suitable parameter ranges as well as process instructions are given, with which stable micromilling processes of hardened tool steels can be achieved. Besides the analysis of the milling process, a developed simulation technique is presented, which can be used to design and optimize the machining process. For further optimization, the cutting edge preparation of micromilling tools by wet abrasive jet machining and millpolishing and its influence on the manufacturing results are discussed. The production and application of functional surface structures in forming processes is additionally examined. Approaches and developed software are presented, with which machining programs for large-area structures as well as free-formed component surfaces can be generated with minimal effort within the CAD/CAM environment. Besides the derived process chain and tools for an efficient generation of machining programs, the performance and wear behavior of the surface structures is considered.