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Coded Control of a Multilayer Piezo Actuator Producing Nano- and Micromotion
A structural–parametric model of a piezo motor is formulated by solving the wave equation. The influence of geometric and physical parameters and external loads on its static and dynamic characteristics in the control system is studied. Transfer functions are derived for piezo motors used in nanodrives. The parametric structure of the piezo motor is determined and transformed.
The solution of matrix equations in electroelasticity problems permits the formulation of a generalized structural-parametric model of a multilayer electroacoustic motor and determination of the influence of the motor’s geometric and physical parameters and external load on its dynamic characteristics. Transfer functions are derived for nano- and micro-scale multilayer electroacoustic motors.
Teoriya sistem avtomaticheskogo regulirovaniya (The Theory of Automatic Control Systems)
- V A Besekerskii
- E P Popov