For realizing the picometer positioning, we proposed several novel feed drive mechanisms utilizing aerostatic equipments [1, 2]. In these positioning mechanisms, the table position was controlled by an active inherent restrictor (AIR) incorporated into the aerostatic equipments. The finest positioning resolution of these mechanisms was reported to be 50pm, however, the noise in the positioning
... [Show full abstract] system prevented further improvement of the positioning resolution. In the present paper, the cause of the noise in the positioning system using an active aerostatic coupling is analysed and it is shown that the vibration from the aerostatic lubrication is crucial. Active control is effective to suppress this air-film vibration, and the positioning with 20pm-stepwidth is shown.