The influence of magnesium and/or strontium substitutions on the deposition rate of P-TCP was investigated. Pure β-TCP, Mg-β-TCP, Sr-β-TCP and Mg/Sr-β-TCP targets were used for the coating formation. It was shown that strontium substitutions in the structure of β-TCP target increase the deposition rate of coatings. Magnesium substitutions, on the contrary, decrease this parameter. It makes it ... [Show full abstract] possible to increase the deposition rate of coatings formed by radio frequency magnetron sputtering without any negative effect on coatings properties. It was demonstrated that all coatings formed by radio frequency magnetron sputtering of β-TCP targets were calcium-rich. The methods of AFM and SEM revealed that coatings under study were characterized by various morphologies. Magnesium-containing coatings (Mg-β-TCP and Mg/Sr-β-TCP) had the lower value of nanohardness than other ones. All coatings were characterized by the higher value of surface free energy than titanium substrate. The coatings formed by sputtering of β-TCP, Mg-β-TCP, Sr-β-TCP had approximately the same value of this parameter.