ArticlePDF Available

Advances on three‐dimensional electrodes for micro‐supercapacitors: A mini‐review

Wiley
InfoMat
Authors:

Abstract and Figures

Owing to the high power density, long cycle life and maintain‐free, micro‐supercapacitors (MSCs) stand out as preferred miniaturized energy source for the miscellaneous autonomous electronic components. However, the shortage of energy density is the main stumbling block for their practical applications. To solve this energy issue, constructing a three‐dimensional (3D) electrode within the limited footprint area is proposed as a new solution for improving the energy storage capacity of MSCs. In the last few years, extensive efforts have been devoted to developing 3D electrodes for MSCs, and significant progress and breakthrough have been achieved. While, there is still lack of systematic summary on the 3D electrode design strategies. To this end, it is imperative to outline the basic design conception, summarize the current states, and discuss the future research about 3D electrodes in MSCs based on the latest development.
This content is subject to copyright. Terms and conditions apply.
REVIEW ARTICLE
Advances on three-dimensional electrodes for
micro-supercapacitors: A mini-review
Long Liu | Huaping Zhao | Yong Lei
Fachgebiet Angewandte Nanophysik,
Institut für Physik & IMN MacroNano
®
(ZIK), Technische Universität Ilmenau,
Ilmenau, Germany
Correspondence
Yong Lei, Fachgebiet Angewandte
Nanophysik, Institut für Physik & IMN
MacroNano
®
(ZIK), Technische Universität
Ilmenau, Ilmenau 98693, Germany.
Email: yong.lei@tu-ilmenau.de
Funding information
China Scholarship Council; Deutsche
Forschungsgemeinschaft, Grant/Award
Numbers: LE 2249/4-1, LE 2249/5-1;
Bundesministerium für Bildung und
Forschung, Grant/Award Number:
03Z1MN11
Abstract
Owing to the high power density, long cycle life and maintain-free, micro-supercapacitors
(MSCs) stand out as preferred miniaturized energy source for the miscellaneous auton-
omous electronic components. However, the shortage of energy density is the main
stumbling block for their practical applications. To solve this energy issue, constructing
a three-dimensional (3D) electrode within the limited footprint area is proposed as a new
solution for improving the energy storage capacity of MSCs. In the last few years, exten-
sive efforts have been devoted to developing 3D electrodes for MSCs, and significant
progress and breakthrough have been achieved. While, there is still lack of systematic
summary on the 3D electrode design strategies. To this end, it is imperative to outline the
basic design conception, summarize the current states, and discuss the future research
about 3D electrodes in MSCs based on the latest development.
KEYWORDS
in-plane configuration, Internet of Things, micro-supercapacitors, sandwich configuration, three-
dimensional electrodes
1|INTRODUCTION
Evolving in leaps and bounds in recent years, the Internet of
Things (IoT), which refers to the cross-linked network of
autonomous electronic devices, greatly pervades the area we
are living in and facilitates our daily life.
1
As key technolo-
gies of IoT to drive the autonomous and wireless systems,
like the wireless sensor nodes, electronic surveillance, data
logger, radio frequency identification devices, and health
control, the miniaturized electronic components require the
energy harvesting technologies to realize their own energy
autonomy.
2,3
Wireless sensors, for instance, have started to
power themselves by scavenging from the renewable sources
in the environment, such as light, wind, wave motion, or
temperature variations.
4
Whereas, the renewable energy
sources from nature usually have a certain intermittency or
randomicity, which need to be supplemented by the energy
storage components. For this reason, it is an ever-rising
demand for designing miniaturized electrochemical energy
storage (EES) units as energy buffer to support these elec-
tronic components.
Among the available EES technologies, the rechargeable
lithium-ion microbatteries (MBs) have exhibited remarkable
energy (1 mWh cm
2
), but they suffer from moderately low
power density (<5 mW cm
2
) and limited lifetime
(<10 000 cycles), thus tedious and/or even unrealistic peri-
odic replacements are necessary, resulting in the system
maintenance difficulties. Attributing to ultrahigh power den-
sity (>10 mW cm
2
), long cycle life (100 000 cycles) and
maintenance-free feature, micro-supercapacitors (MSCs) are
attractive as potential alternatives to MBs.
5,6
Particularly for
some wireless sensors or communication transmitters which
need to be frequently switched between stand-by and activa-
tion status, MSCs are able to meet their requirements on
Received: 31 March 2019 Revised and accepted: 7 April 2019
DOI: 10.1002/inf2.12007
This is an open access article under the terms of the Creative Commons Attribution License, which permits use, distribution and reproduction in any medium, provided the original
work is properly cited.
© 2019 The Authors. InfoMat published by John Wiley & Sons Australia, Ltd on behalf of UESTC.
74 wileyonlinelibrary.com/journal/inf2 InfoMat. 2019;1:7484.
high-power operation. In such case, the MSCs can replace
MBs and deliver the moderate energy but high power per
unit area to satisfy these applications (Figure 1).
7,8
According to the charge storage mechanisms, MSCs
based on electrochemical double layer capacitors (EDLCs)
using various forms of carbonaceous materials tend to elec-
trostatically store the charges by adsorption of ions at the
electrode/electrolyte interface. Similarly, MSCs based on
transition metal oxides or conductive polymers store charges
in a faradaic manner with fast and reversible redox reactions
and finally exhibit pseudocapacitive behavior. Generally,
EDLCs offer better rate capability and superior cycle life,
whereas pseudocapacitors exhibit optimum specific capaci-
tances and high energy density. At present, the key consider-
ation for MSCs is the inferior energy density (<0.1 mWh
cm
2
), which hinders their further promotion in practical
applications. One promising approach to increase the surface
energy storage capability for MSCs is to build 3D electrodes
in a small footprint area. To date, there are some inspiring
work emerged about 3D electrode design for MSCs, of
which their energy and power densities have dramatically
improved. In this mini review, we specially focus on the
research status and progress of 3D electrodes in MSCs,
including the basic design conception of 3D electrodes, their
contribution in performance optimization, and the future
direction of development. The first section will outline the
main topology structures of MSCs and highlight the advan-
tages of their 3D electrodes construction, followed by their
general concept of design. Next, we analyze the recent
advances in 3D electrodes design for MSCs. The future chal-
lenges and outlook for 3D electrode based MSCs are dis-
cussed in the end.
2|THREE-DIMENSIONAL
ELECTRODE DESIGN FOR MSCs
2.1 |The main topologies of MSCs
As known, the basic components for a MSC are the elec-
trodes materials, electrolyte, current collectors, and separator
in some cases. The performance achieved by MSCs depends
not only on the electrode or electrolyte materials, but also
tightly on the configuration which is the arrangement or
geometry of the positive and negative electrodes. Currently,
there are two basic topologies for MSCs affecting their
energy storage performance. One is sandwich topology, in
which the positive and negative electrodes are parallel to the
substrate with electrolyte and separator in the middle. Differ-
ent from traditional supercapacitors with same stacked con-
figuration, MSCs with such electrode arrangements should
limit their device thickness within several hundred microme-
ters. The other is the interdigital planar configuration, of
which the positive and negative electrodes arranged in the
interdigitated fingers with width of several hundred micro-
meters on an insulating substrate. Particularly, the in-plane
electrodes configuration not only eliminates the separator
and thus significantly reducing the size of MSC unit, but
also narrows interspace between positive and negative elec-
trodes to shorten the ionic diffusion distance.
9,10
Moreover,
its intriguing features of straightforward integratability,
11-14
out-
standing mechanical flexibility,
14-18
good scalability,
19-22
and
ingenious deployments
23
as well as precise tunability of elec-
trodes pattern enable it to gain much popularity recently.
24-27
Alternative to gravimetric normalization of
performance,
28-30
the large areal/volumetric capacities are
long-term scientific pursuits for MSCs, although high volu-
metric energy and power densities are readily achieved for
the in-plane MSCs with thin films at present,
31-33
they still
suffer from severely low areal energy density compared with
the sandwich counterparts.
5,6
Additionally, in contrast to
MBs, there is a considerable gap in energy storage capability
for MSCs whatever their configurations are to fail to meet
the growing demand for energy consumption of electronic
components. This is mainly due to the fact that MSCs with a
footprint area no larger than several square millimeters usu-
ally have thin-layer-thickness electrode, leading to the low
mass loading of active materials for charge storage. To store
more energy by increasing the mass loading to obtain thick-
layer electrode is also not a sensible choice owning to the
reduction of mechanical integrity of the electrode caused by
the increased film thickness.
34
Worse still, the utilization
efficiency of active materials in thick-layer electrode based
MSC is too low to play a significant role, especially for the
pseudocapacitive materials with poor electrical conductivity.
In most cases, the thick-layer electrodes in MSCs require
conductive additives or polymer binders to ensure a good
FIGURE 1 Area-normalized Ragone plot of energy and power
density showing the estimated performance of MSCs (marked by the
violet rectangle), MBs (marked by the orange rectangle), and some of
typical electronic components such as sensors and communication
transmitters. MBs, microbatteries; MSCs, micro-supercapacitors
LIU ET AL.75
electrical conductivity or mechanical stability, this will in
turn take up dead volume of MSCs and inevitably compro-
mise to their power density.
2.2 |The advantages of three-dimensional
electrodes in MSCs and their basic design
concept
Given this, it is desirable to adopt 3D electrodes taking
advantage of the third dimension, height, to unblock the
dead surfaceof MSCs electrodes while maintaining high
mass loading in the given footprint area of device.
35
Figure 2A,B shows the typical 3D electrodes arranged in
sandwich and in-plane MSCs, respectively. In these topolo-
gies, the 3D electrode architecture facilitates fast mass trans-
port kinetics and shortens ionic diffusion distances thanks to
the large interface between active materials and electrolyte.
36
Furthermore, these configuration designs free the device
from the utilization of the polymer binders or conductive
additives, thereby offering more room for the electrolyte
infiltration in. Besides, unlike the thick-layer electrode that
is susceptible to fragilefilm, the 3D electrode shaped by
the robust nano-building-blocks guarantees the mechanically
stable of the electrode structure and a long cycle life.
One common strategy for building 3D electrodes is to in
situ growthe free-standing electrode materials usually
with high electrical conductivity on the current collector to
straightforwardly achieve homogeneous electrodes.
37-39
The
arrays of electrode materials with high electrical conductiv-
ity can greatly improve the longitudinal charge transfer effi-
ciency in 3D electrodes. In the fabrication approach, ordered
nanoarchitectures of electrode materials are either self-
assembled spontaneously through an elaborate gas/liquid
phase reaction or fabricated by a sophisticated rigid or
dynamic template method.
40-42
Another particularly
promising avenue is to fabricate the bulky current collector
into nanostructured one first and then conformally deposit a
thin layer of pseudocapacitive materials that have high theo-
retical specific capacitance but low electrical conductivity on
it to form heterogeneous electrode (Figure 2C).
43
In this fab-
rication system, the design core lies in the nanostructure of
the conductive substrate, which can refer to the preparation
techniques of the 3D homogeneous electrode just mentioned.
It is noted that the conductive scaffolds employed in MSCs
are not restricted to metallic or carbonaceous materials, but
could be silica-based or any other conductive oxides, sul-
fides, carbides, and nitrides (MXenes)
44-46
materials and so
forth. Both of these preparation strategies can create large
specific surface area for electrodes to improve the utilization
efficiency of active materials as the charge storage process is
only occurred on their surface or near-surface, and finally
contribute to improving areal capacitance and energy den-
sity. It is worth mentioning that the nanowires shown in
Figure 2 is just one representative but not limited to it, there
are varieties of nanostructured electrodes with high specific
surface area springing up, such as nanotubes,
47
nanocones,
48
nanosheets,
49
and nanopores
50-52
and being widely investi-
gated in the field of 3D electrode based MSCs (3D MSCs).
In the next section, we will specially focus on the recent pro-
gress on 3D electrodes in MSC devices.
3|RECENT PROGRESS IN
THREE-DIMENSIONAL ELECTRODE
ARCHITECTURE FOR MSCs
As demonstrated in previous section, the 3D electrodes offer
many benefits: (a) providing large effective surface area at a
limited footprint area, (b) shortening ion diffusion length
between electrodes, (c) facilitating the ion and electron
FIGURE 2 Schematic of two basic
configurations of 3D MSCs: A, Sandwich and B,
in-plane topology, respectively, based on
nanostructured electrodes. C, Schematic of the
cross-section of the electrodes highlights the
nanoarchitecture of homogeneous or
heterogeneous electrode unit. More active
materials can be grown along the longitude
direction in the limited footprint area leading to
improved areal capacitance. MSCs, micro-
supercapacitors
76 LIU ET AL.
TABLE 1 Summary of the MSC devices based on 3D electrodes reported recently and their corresponding electrochemical performances
MSCs based on homogeneous nanoelectrodes
Electrode materials
Main
techniques
MSC
topology
Electrolyte/
device voltage (V)
Device energy
(μWh cm
2
)
Device power
(mW cm
2
) Cyclic stability Ref.
CPHs EP In-plane PVA/H
2
SO
4
gel/0.8 49.9 0.4 76% (10 000) 53
Porous carbon ZnO template
method
In-plane LiTFSi/2.4 1.53 7.92 105% (10 000) 54
B-3D-PCP 3D lithography In-plane PVA-H
3
PO
4
/1.0 7.1 (mWh cm
3
)66(Wcm
3
) 98% (30 000) 55
HPC 3D lithography In-plane PVA-H
3
PO
4
/1.0 1.4 (mW h cm
3
) 1.7 (W cm
3
) 95% (30 000) 56
3D graphene 3D printing In-plane PVA/H
2
SO
4
/1.0 - - 100% (10 000) 57
VG PVT Sandwich EMIMBF
4
/3.0 0.8 (mWh cm
3
)61 (W cm
3
) 83% (10 000) 58
3D G/CNTCs CVD In-plane H
2
SO
4
/1.0 0.16 (mWh cm
3
) 115 (W cm
3
)- 59
VN NSAs Solvothermal In-plane CMC/Na
2
SO
4
/2.4 87.62 1.2 92% (5000) 60
PANI nanowires PPT In-plane PVA/H
2
SO
4
/0.8 0.78 (mWh cm
3
) 8 (W cm
3
) 88% (3000) 61
G-MDHA 3D printing In-plane KOH/0.8 50 1.5 90% (10 000) 62
Cu(OH)
2
@FeOOH NTs ECD In-plane PDMS/EMIMBF
4
/1.5 18 <1 82% (10 000) 63
MSCs based on heterogeneous nanoelectrodes
Electrodes
Active
materials 3D scaffold
Main
techniques
MSC
topology
Electrolyte/device
voltage (V)
Device energy
(μWh cm
2
)
Device power
(mW cm
2
)
Cyclic
stability Ref.
MnO
2
,Fe
2
O
3
AgNPS Laser-induced In-plane PVA/LiClO
4
/1.4 16.3 (mWh cm
3
) 3.54 (W cm
3
) 94% (5000) 51
MnO
2
NCAs ED Sandwich FS/EMIMBF
4
/2.5 2.7 (mWh cm
3
) 3.5 (mW cm
3
) 95.3% (20 000) 48
MnO
2
Si pillar PL In-plane EMITFSI/1.5 6.5 8 >80% (15 000) 47
MnO
2
SiNWs CVD Sandwich LiClO4-PMPyrrBTA/2.0 9 <1 91% (5000) 64
δ-MnO
2
AuNPS Chemical dealloying In-plane Na
2
SO
4
/0.8 24.3 (mWh cm
3
) 295 (W cm
3
) 88% (20 000) 65
Ni(OH)
2
CuSe NS ED In-plane PVA/LiCl/1.0 5.4 (mWh cm
3
) 0.8 (W cm
3
) 100% (10 000) 66
PPy SiNTrs CVD Sandwich PYR13 TFSI/1.5 ~4 0.8 100% (10 000) 67
PANI nanofiber Microcavity array RIE In-plane PVA/H
2
SO
4
/0.8 0.01 2.7 85.7% (1000) 68
MnO
2
3D graphene Laser scribing Sandwich Na
2
SO
4
/2.0 ~40 - 96% (10 000) 69
MnO
2
Si pillars RIE Sandwich Na
2
SO
4
/0.8 - - 85% (15 000) 70
RuO
2
3D CNT ICP, FIB In-plane Na
2
SO
4
/1.0 7 19 98.6% (6000) 71
RuO
2
Porous Au HBDT Sandwich PVA/H
4
SiW
12
O
40
/0.9 126 8 95% (2000) 50
RuO
2
CNW CVD Sandwich PVA/H
4
SiW
12
O
40
/0.9 49 ~28 >90% (2000) 72
(Continues)
LIU ET AL.77
transportation, and (d) improving the electrode cyclic
stability. To drive the inferior energy storage capability per
unit area of MSCs, designing and developing suitable 3D
electrode to give full play of above advantages are of cru-
cial importance. Recently developed nanoarchitectured
electrodes based MSCs are summarized in Table 1, includ-
ing the electrodes morphology, main fabrication tech-
niques, and the electrochemical performances regarding the
energy/power densities, and cyclic stability. In this table,
the 3D MSCs were classified into two categories from a
design perspective, namely homogeneous- and heteroge-
neous nanoelectrodes based MSCs. As expected, the elec-
trochemical performances of 3D electrodes based MSCs
are found to be greatly improved and promoted. To clarify
this point further, three representative results reported
recently are specially chosen in Figure 3 to highlight the
unique nanostructure of 3D electrodes and corresponding
contribution to the MSCs.
In terms of homogeneous electrodes based MSC devices,
achieving high energy density by nanostructuring of high-
loading carbonaceous materials is highly practical and feasible
(Table 1).
77
Some key fabrication approaches such as 3D
printing,
78
3D lithography, and laser-etching techniques
79
ensure the production of carbonaceous materials with 3D archi-
tecture. Typically, Kim and co-workers reported the MSCs
based on micrometer-thick boron-doped 3D porous carbon pat-
tern (B-3D-PCP) electrodes, which were fabricated by 3D refer-
ence lithography and carbonization with B doping process.
55
It
is found that the B-doping content in electrodes increased along
with the decrease amount of N when the temperature goes up,
which will dramatically increase the electrochemically active
sites and electrical conductivity as a whole. Besides, the B-3D-
PCP has a unique monolithic architecture with electrically con-
nected skeleton and numerous pore channels for the electrolyte
ions infiltration in (Figure 3A). Eventually, this solid-state B-
3D-PCP MSC exhibits an outstanding area-normalized capaci-
tance of 7 mF cm
2
at 100 mV s
1
and an extremely high rate
capability of 81% at 2000 mV s
1
. In addition, the B-3D-PCP
remains a constant volumetric capacitance and energy density,
despite the elevated thickness of electrode materials, indicating
its excellent electrical conductive of porous architecture.
On the other hand, the heterogeneous electrode is a preferred
approach if high theoretical pseudocapacitive materials are effi-
ciently utilized for the high-performance MSCs. As shown in
Table 1, most heterogeneous electrodes are comprised of
pseudocapacitive materials shell and 3D conductive scaffold
core. Among them, the 3D conductive scaffold facilitating elec-
tron transport and meanwhile supporting pseudocapacitive
materials is the key in shaping the ultimate electrodes prototype
and determining the overall performance of MSCs.
43,80
For
instance, an in-plane MSC with bicontinuous nanoporous Au
architecture (Au NPs) as current collectors and MnO
2
as
TABLE 1 (Continued)
MnO
2
ITO NWs CVD In-plane Na
2
SO
4
/1.0 27 15 61.1% (20 000) 73
RuO
2
Pt NTs AAO template Sandwich H
2
SO
4
/1.2 - - - 74
PEDOT Si NWs CVD Sandwich Na
2
SO
4
/1.2 3 4 95% (500 000) 75
RuO
x
GNW RIE, sputtering In-plane PVA-H
3
PO
4
/1.0 15 2.5 90% (3000) 76
Abbreviations: AAO, anodic aluminum oxide; B-3D-PCP, boron-doped 3D porous carbon pattern; CMC, carboxymethyl cellulose; CNW, vertically aligned carbon nanowalls; CPHs, conducting polymer hydrogels; CVD,
chemical vapor deposition; ECD, electroless copper deposition; ED, electrodeposition; EMIMBF4, 1-ethyl-3-methylimidazolium tetrafluoroborate; EMITFSI, 1-ethyl-3-methylimidazolium-bis (trifluoromethylsulfonyl) imide;
EP, electrochemical polymerization; FIB, focused-ion-beam; FS, fumed silica; G/CNTCs, graphene/carbon nanotube carpets; G-MDHA, graphene-based mixed-dimensional hybrid aerogels; GNW, graphene nanowalls; HBDT,
hydrogen bubble dynamic template; HPC, hierarchical pore-patterned carbon; ICP, inductively coupled plasma; ITO NWs, indium-tin oxide nanowires; LiTFSi, lithium bis (trifluoromethane sulfonyl) imide; MSCs, micro-
supercapacitors; NCAs, nickel nanocone arrays; NPS, nanoporous scaffold; NS, vertically oriented nanosheet; PDMS, polydimethylsiloxane; PEDOT, poly(3,4-ethylenedioxythiophene; PL, photolithography; PMPyrrBTA, 1-
methyl-1-propylpyrrolidinium bis(trifluromethylsulfonyl)imide; PPT, potentiodynamical polymerization technique; PPy, polypyrrole; PVA, polyvinyl alcohol; PVT, physical vapor transport; RIE, reactive ion etching; SiNTrs,
silicon nanotrees; VG, unidirectional arrays of vertically aligned graphene nanosheets; VN NSAs, VN nanosheet arrays.
78 LIU ET AL.
pseudocapacitive material was reported by Li et al.
65
Through
further regulating the crystallographic structures of MnO
2
,the
internal resistance of the MSC device will be significantly
reduced. This is due to the fact that the layered crystalline
δ-MnO
2
offers highly matched lattice with that of Au, which
will greatly relieve the fairly high contact resistances in the
interface between pseudocapacitive materials and current col-
lectors (Figure 3B). Moreover, benefiting from the Au NPs, the
heterogeneous electrode in MSCs possesses nanoscale pores for
the rapid mass transfer. Its cross-linked conductive substrate has
ultrahigh electronic conductivity and short electron-transport
length as well as robust mechanical strength that ensuring a long
cycle life. These enlist the MSC to deliver a high volumetric
capacitance up to 922 F cm
3
and peak power density of
295 W cm
3
while keeping a high volumetric energy density.
However, it should be noted that the costliness of the Au NPs
hinders its wide application in industry. Most recently, Xie's
group reported a high-performance pseudocapacitive MSCs by
employing the ITO nanowire arrays (NWs) as 3D current col-
lectors.
73
The as-prepared ITO NWs have a large aspect ratio of
~120, with diameter of 100 nm and length of 12 μm (Figure 3C).
Normally, coating with ultrathin thickness of manganese oxide
film will inevitably lead to insufficient energy storage capability,
a preferable measure is to deposit high mass loading of MnO
2
with thick layer on ITO NWs to prominently improve the areal
energy density of MSCs. Different from the conventional thick-
layer electrodes that have varieties of issues in mechanical struc-
ture and utilization efficiency as we mentioned in the previous
section, thick-layer electrodes with the help of 3D current collec-
tors will greatly address the above deficiencies. For instance, in
contrast to the MSCs electrode without ITO NWs that suffering
from the crack and peeling in the thick-film state, the MnO
2
MSCs based on ITO NWs show improved mechanically struc-
tural stability. Ultimately, the hierarchical electrode based MSC
device delivers a peak areal energy density of 27 μWh cm
2
at
the current density of 0.3 mA cm
2
and exhibits considerable
cycling life span.
4|SUMMARY AND PERSPECTIVES
Given the present progress, one can readily discover the huge
potential of 3D electrodes based MSCs toward high-performance
FIGURE 3 A, Boron-doped 3D porous carbon pattern (B-3D-PCP) electrodes based MSCs and their corresponding electrochemical performances.
Reproduced with permission.
55
Copyright 2018, Elsevier Ltd. B, MSCs based on 3D Au nanoporous scaffold (AuNPS)/MnO
2
electrodes and their
corresponding electrochemical performances. Reproduced with permission.
65
Copyright 2016, Wiley-VCH. C, ITO NWs@MnO
2
based MSC and its
electrochemical performances. Reproduced with permission.
73
Copyright 2019, the Royal Society of Chemistry. MSCs, micro-supercapacitors
LIU ET AL.79
energy-storage technologies. While a few 3D electrode based
MSCs (3D MSCs) have been demonstrated at present, it
should be pointed out that they are still in their infancy stage
and no specific 3D architecture electrodes or their arrange-
ments have been considered as faultless. From this point of
view, future development of 3D electrodes based MSCs can
borrow ideas from the leading-edge 3D MBs to some extent,
of which their research and development have started rela-
tively early and their micro-fabrication technology have
already been highly advanced.
36,81-85
Figure 4 exhibits some
representative 3D electrodes based MSCs, which are of great
potential to become promising 3D MSCs in the future. It is
known that to maximize the energy density of MSCs, it is
highly effective to increase the loading of electrode mate-
rials while reducing as much as possible the volumetric or
areal capacity in the micro-device. Following this idea, each
nanorod or nanoplate electrodes distributed and interdigi-
tated along the longitude direction with solid electrolyte fill-
ing between them can be designed (Figure 4A,B). This
design approach ensures the full utilization of device volume
while greatly shortening the electron/ion diffusion length.
86
If
developing a step further, the solid electrolyte can be con-
formally deposited on the electrodes leaving more room to load
counter electrode materials by forming the concentric nanopores
or aperiodic spongeconfiguration (Figure 4C,D).
87-89
In these
3D architecture blueprints, the volume of electrolyte utilized is
further reduced, leading to the enhanced volumetric/areal energy
density. Unfortunately, far from what we naively expected, the
technologies of fabricating and assembling 3D MSCs still lag far
behind the conceive and are facing unprecedented challenges.
These comprise some aspects, such as cumbersome fabrication
technology, packaging issues, electrolyte adoption, and practical
reliability.
1. Fabrication technology: Currently, the 3D MSCs can-
not do what thin-film electrode based MSCs did in mass-
production but require a series of complex micro-fabrication
techniques. Particularly, the fabrication of nanostructured
electrodes is usually independent from the overall device
manufacture for 3D MSCs. Thus, technological operation
needs further to be simplified to achieve accurate, efficient,
cost-effective, and high-yield production. For instance, recent
emerged 3D-printing technology offers new hope in realizing
3D electrodes with more miniaturization, large-scale, and effi-
ciency in a highly accurate controlled way.
90-97
2. Packaging considerations: Packaging plays a role in
sealing and well conserving the electrolyte in practically
usage process. It is the final step toward end product, but
many researchers have ignored its significance. To cater the
practical application, the encapsulation should not ruin the
tiny volumetric content of device, nor should it affect the
electrode materials or their 3D architecture. Hence, the pack-
aging of 3D MSCs goes much beyond those designs devel-
oped for conventional supercapacitors.
98,99
3. Electrolyte adoption: The design and optimization of
electrolytes for MSCs have always been a hot topic for a
long time.
100,101
Suitable electrolytes for 3D MSCs are not
well-defined largely because each and every one of electrode
materials needs to well match with a certain electrolyte.
102
Furthermore, the challenge toward designing of 3D MSCs
with leakage-free electrolytes is still remained. This will call
for solid or gel polymer electrolytes with high ionic conduc-
tivities to maintain an appropriate power density.
103
Cur-
rently, one of widely used electrolytes in 3D MSCs is the
ionic liquid-polymer gel electrolytes with low flammability
or vapor tension.
5,104,105
4. Practical reliability: Reliability assessment of 3D
MSCs is an important concern for the practical application.
It means that MSCs who can bear relatively harsh condition
or have other special functional performance will win. Espe-
cially, the 3D electrodes based MSCs which can tolerate
external forces like extrusion, bending, scratching or
stretching, and exhibit mechanical shape memory are highly
promising.
106,107
The development of other special-purpose
of MSCs like thermal resistance/sensitivity
23,108,109
or light
transparency/translucency
110,111
that can well meet some
specific applications are also hotspots of future research.
This review proposes some general ideas of design for
3D electrodes in MSCs and summarizes current advances in
terms of the fabrication strategies and their corresponding
FIGURE 4 Schematic of some promising 3D MSCs based on
nanoarchitectured electrodes. The design models were inspired by 3D
MBs reported in previous literatures. MBs, microbatteries; MSCs,
micro-supercapacitors
80 LIU ET AL.
performance contribution and finally identifies the major
development challenges and future trends in this field. It is
expected that high-performance MSCs based on novel 3D
electrodes will be further developed in the near future to
shorten the energy density gap with MBs and further pro-
mote the development of IoT system.
CONFLICT OF INTEREST
The authors declare no conflict of interest.
ORCID
Yong Lei https://orcid.org/0000-0001-5048-7433
REFERENCES
1. Atzori L, Iera A, Morabito G. The internet of things: a survey.
Comput Networks. 2010;54:2787-2805.
2. Wang ZL. Self-powered nanosensors and nanosystems. Adv
Mater. 2012;24:280-285.
3. Koomey JG, Matthews HS, Williams E. Smart everything: will
intelligent systems reduce resource use? Annu Rev Env Resour.
2013;38:311-343.
4. Dresselhaus M, Thomas I. Alternative energy technologies.
Nature. 2001;414:332-337.
5. Lethien C, Le Bideau J, Brousse T. Challenges and prospects of
3D micro-supercapacitors for powering the internet of things.
Energ Environ Sci. 2019;12:96-115.
6. Kyeremateng NA, Brousse T, Pech D. Microsupercapacitors as
miniaturized energy-storage components for on-chip electronics.
Nat Nanotechnol. 2017;12:7-15.
7. Shen C, Xu S, Xie Y, Sanghadasa M, Wang X, Lin L. A review
of on-chip micro supercapacitors for integrated self-powering
systems. J Microelectromech Syst. 2017;26:949-965.
8. Lajara R, Pelegrí-Sebastiá J, Solano JJP. Power consumption
analysis of operating systems for wireless sensor networks. Sen-
sors. 2010;10:5809-5826.
9. Liu N, Gao Y. Recent progress in micro-supercapacitors with in-
plane interdigital electrode architecture. Small. 2017;13:1701989.
10. Qi D, Liu Y, Liu Z, Zhang L, Chen X. Design of architectures
and materials in in-plane micro-supercapacitors: current status
and future challenges. Adv Mater. 2017;29:1602802.
11. Li X, Cai W, Teh KS, et al. High-voltage flexible micro-
supercapacitors based on laser-induced graphene. ACS Appl
Mater Interfaces. 2018;10:26357-26364.
12. Shi X, Pei S, Zhou F, et al. Ultrahigh-voltage integrated micro-
supercapacitors with designable shapes and superior flexibility.
Energ Environ Sci. 2018. https://doi.org/10.1039/C8EE02924E.
13. Xiao H, Wu Z-S, Zhou F, et al. Stretchable tandem micro-
supercapacitors with high voltage output and exceptional
mechanical robustness. Energy Storage Mater. 2018;13:233-240.
14. Zhao C, Liu Y, Beirne S, Razal J, Chen J. Recent development of
fabricating flexible micro-supercapacitors for wearable devices.
Adv Mater Technol. 2018;3:1800028.
15. Zheng S, Ma J, Wu Z-S, et al. All-solid-state flexible planar lith-
ium ion micro-capacitors. Energ Environ Sci. 2018;11:2001-2009.
16. Zhang L, Viola W, Andrew TL. High energy density, super-
deformable, garment-integrated microsupercapacitors for powering
wearable electronics. ACS Appl Mater Interfaces. 2018;10:36834-
36840.
17. Li L, Lou Z, Chen D, Jiang K, Han W, Shen G. Recent advances
in flexible/stretchable supercapacitors for wearable electronics.
Small. 2018;14:1702829.
18. Zhang C, Kremer MP, Seral-Ascaso A, et al. Stamping of flexi-
ble, coplanar micro-supercapacitors using MXene inks. Adv
Funct Mater. 2018;28:1705506.
19. El-Kady MF, Kaner RB. Scalable fabrication of high-power
graphene micro-supercapacitors for flexible and on-chip energy
storage. Nat Commun. 2013;4:1475.
20. Hyun WJ, Secor EB, Kim CH, et al. Scalable, self-aligned print-
ing of flexible graphene micro-supercapacitors. Adv Energy
Mater. 2017;7:1700285.
21. Li J, Sollami Delekta S, Zhang P, et al. Scalable fabrication and
integration of graphene microsupercapacitors through full inkjet
printing. ACS Nano. 2017;11:8249-8256.
22. BellaniS,PetroniE,DelRioCastillo AE, et al. Scalable production
of graphene inks via wet-jet milling exfoliation for screen-printed
micro-supercapacitors. Adv Funct Mater. 2019;29:1807659.
23. Zhang P, Wang J, Sheng W, et al. Thermoswitchable on-chip
microsupercapacitors: one potential self-protection solution for
electronic devices. Energ Environ Sci. 2018;11:1717-1722.
24. Hota MK, Jiang Q, Mashraei Y, Salama KN, Alshareef HN. Frac-
tal electrochemical microsupercapacitors. Adv Electron Mater.
2017;3:1700185.
25. ZhuM,HuangY,HuangY,etal.Ahighlydurable,transferable,and
substrate-versatile high-performance all-polymer micro-supercapacitor
with plug-and-play function. Adv Mater. 2017;29:1605137.
26. Hu H, Pei Z, Ye C. Recent advances in designing and fabrication
of planar micro-supercapacitors for on-chip energy storage.
Energy Storage Mater. 2015;1:82-102.
27. Wang J, Li F, Zhu F, Schmidt OG. Recent progress in micro-
supercapacitor design, integration, and functionalization. Small
Methods. 2018;2:1800367.
28. Beidaghi M, Gogotsi Y. Capacitive energy storage in micro-scale
devices: recent advances in design and fabrication of micro-
supercapacitors. Energ Environ Sci. 2014;7:867-884.
29. Noori A, El-Kady MF, Rahmanifar MS, Kaner RB, Mousavi MF.
Towards establishing standard performance metrics for batteries,
supercapacitors and beyond. Chem Soc Rev. 2019;48:1272-1341.
30. Balducci A, Belanger D, Brousse T, Long J, Sugimoto W. Per-
spectivea guideline for reporting performance metrics with
electrochemical capacitors: from electrode materials to full
devices. J Electrochem Soc. 2017;164:A1487-A1488.
31. Wu ZS, Parvez K, Li S, et al. Alternating stacked graphene-
conducting polymer compact films with ultrahigh areal and volu-
metric capacitances for high-energy micro-supercapacitors. Adv
Mater. 2015;27:4054-4061.
32. Zhang P, Li Y, Wang G, et al. Zn-ion hybrid micro-
supercapacitors with ultrahigh areal energy density and long-term
durability. Adv Mater. 2018;31:1806005.
33. He Y, Zhang P, Wang M, et al. Nano-sandwiched metal
hexacyanoferrate/graphene hybrid thin films for in-plane asym-
metric micro-supercapacitors with ultrahigh energy density.
Mater Horiz. 2019. https://doi.org/10.1039/C9MH00063A.
LIU ET AL.81
34. Liu L, Zhao H, Wang Y, Fang Y, Xie J, Lei Y. Evaluating the
role of nanostructured current collectors in energy storage capa-
bility of supercapacitor electrodes with thick electroactive mate-
rials layer. Adv Funct Mater. 2018;28:1705107.
35. Yu M, Qiu W, Wang F, et al. Three dimensional architectures:
design, assembly and application in electrochemical capacitors.
J Mater Chem A. 2015;3:15792-15823.
36. Arthur TS, Bates DJ, Cirigliano N, et al. Three-dimensional elec-
trodes and battery architectures. MRS Bull. 2011;36:523-531.
37. Li W, Liu Q, Fang Z, et al. All-solid-state on-chip super-
capacitors based on free-standing 4H-SiC nanowire arrays. Adv
Energy Mater. 2019;9:1900073.
38. Mirvakili SM, Hunter IW. Vertically aligned niobium nanowire
arrays for fast-charging micro-supercapacitors. Adv Mater. 2017;
29:1700671.
39. Yang P, Chao D, Zhu C, et al. Ultrafast-charging supercapacitors
based on corn-like titanium nitride nanostructures. Adv Sci. 2016;
3:1500299.
40. Zhao H, Liu L, Vellacheri R, Lei Y. Recent advances in design-
ing and fabricating self-supported nanoelectrodes for super-
capacitors. Adv Sci. 2017;4:1700188.
41. Zhao H, Liu L, Fang Y, Vellacheri R, Lei Y. Nickel nanopore
arrays as promising current collectors for constructing solid-state
supercapacitors with ultrahigh rate performance. Front Chem Sci
Eng. 2018;12:339-345.
42. Zhao H, Liu L, Lei Y. A mini review: functional nanostructuring
with perfectly-ordered anodic aluminum oxide template for
energy conversion and storage. Front Chem Sci Eng. 2018;12:
481-493.
43. Liu L, Zhao H, Lei Y. Review on nanoarchitectured current col-
lectors for pseudocapacitors. Small Methods. 2018;2:1800341.
44. Anasori B, Lukatskaya MR, Gogotsi Y. 2D metal carbides and
nitrides (MXenes) for energy storage. Nat Rev Mater. 2017;2:
16098.
45. Huang P, Lethien C, Pinaud S, et al. On-chip and freestanding
elastic carbon films for micro-supercapacitors. Science. 2016;
351:691-695.
46. Ortaboy S, Alper JP, Rossi F, et al. MnO
x
-decorated carbonized
porous silicon nanowire electrodes for high performance super-
capacitors. Energ Environ Sci. 2017;10:1505-1516.
47. Eustache E, Douard C, Demortière A, et al. High areal energy
3D-interdigitated micro-supercapacitors in aqueous and ionic liq-
uid electrolytes. Adv Mater Technol. 2017;2:1700126.
48. Su Z, Yang C, Xie B, et al. Scalable fabrication of MnO
2
nano-
structure deposited on free-standing Ni nanocone arrays for
ultrathin, flexible, high-performance micro-supercapacitor. Energ
Environ Sci. 2014;7:2652-2659.
49. Moosavifard SE, Shamsi J, Altafi MK, Moosavifard ZS. All-solid
state, flexible, high-energy integrated hybrid micro-supercapacitors
based on 3D LSG/CoNi
2
S
4
nanosheets. Chem Commun. 2016;52:
13140-13143.
50. Ferris A, Garbarino S, Guay D, Pech D. 3D RuO
2
micro-
supercapacitors with remarkable areal energy. Adv Mater. 2015;
27:6625-6629.
51. Lee J, Seok JY, Son S, Yang M, Kang B. High-energy, flexible
micro-supercapacitors by one-step laser fabrication of a self-
generated nanoporous metal/oxide electrode. J Mater Chem A.
2017;5:24585-24593.
52. Zhao H, Wang C, Vellacheri R, et al. Self-supported metallic
nanopore arrays with highly oriented nanoporous structures as
ideally nanostructured electrodes for supercapacitor applications.
Adv Mater. 2014;26:7654-7659.
53. Chu X, Huang H, Zhang H, et al. Electrochemically building three-
dimensional supramolecular polymer hydrogel for flexible solid-
state micro-supercapacitors. Electrochim Acta. 2019;301:136-144.
54. Ma X, Hong X, He L, et al. High energy density micro-
supercapacitor based on a three-dimensional bicontinuous porous
carbon with interconnected hierarchical pores. ACS Appl Mater
Interfaces. 2018;11:948-956.
55. Kim C, Kang D-Y, Moon JH. Full lithographic fabrication of
boron-doped 3D porous carbon patterns for high volumetric energy
density microsupercapacitors. Nano Energy. 2018;53:182-188.
56. Kim C, Moon JH. Hierarchical pore-patterned carbon electrodes
for high-volumetric energy density micro-supercapacitors. ACS
Appl Mater Interfaces. 2018;10:19682-19688.
57. Li W, Li Y, Su M, et al. Printing assembly and structural regula-
tion of graphene towards three-dimensional flexible micro-super-
capacitors. J Mater Chem A. 2017;5:16281-16288.
58. Zheng S, Li Z, Wu Z-S, et al. High packing density unidirectional
arrays of vertically aligned graphene with enhanced areal capaci-
tance for high-power micro-supercapacitors. ACS Nano. 2017;11:
4009-4016.
59. Lin J, Zhang C, Yan Z, et al. 3-dimensional graphene carbon
nanotube carpet-based microsupercapacitors with high electro-
chemical performance. Nano Lett. 2012;13:72-78.
60. Zhang Q, Zhang J, Zhou Z, Wei L, Yao Y. Flexible quasi-solid-
state 2.4 V aqueous asymmetric microsupercapacitors with ultra-
high energy density. J Mater Chem A. 2018;6:20145-20151.
61. Meng C, Maeng J, John SW, Irazoqui PP. Ultrasmall integrated
3D micro-supercapacitors solve energy storage for miniature
devices. Adv Energy Mater. 2014;4:1301269.
62. Tang X, Zhou H, Cai Z, et al. Generalized 3D printing of
graphene-based mixed-dimensional hybrid aerogels. ACS Nano.
2018;12:3502-3511.
63. Xie J-Q, Ji Y-Q, Kang J-H, et al. In situ growth of Cu(OH)
2
@FeOOH
nanotube arrays on catalytically deposited Cu current collector pat-
terns for high-performance flexible in-plane micro-sized energy stor-
age devices. Energ Environ Sci. 2019;12:194-205.
64. Dubal DP, Aradilla D, Bidan G, et al. 3D hierarchical assembly
of ultrathin MnO
2
nanoflakes on silicon nanowires for high per-
formance micro-supercapacitors in Li-doped ionic liquid. Sci
Rep. 2015;5:9771.
65. Li YQ, Shi XM, Lang XY, Wen Z, Li JC, Jiang Q. Remarkable
improvements in volumetric energy and power of 3D MnO
2
microsupercapacitors by tuning crystallographic structures. Adv
Funct Mater. 2016;26:1830-1839.
66. Gong J, Li J-C, Yang J, et al. High-performance flexible in-plane micro-
supercapacitors based on vertically aligned CuSe@ Ni (OH)
2
hybrid
nanosheet films. ACS Appl Mater Interfaces. 2018;10:38341-38349.
67. Aradilla D, Gaboriau D, Bidan G, et al. An innovative 3-D nan-
oforest heterostructure made of polypyrrole coated silicon
nanotrees for new high performance hybrid micro-super-
capacitors. J Mater Chem A. 2015;3:13978-13985.
68. Maeng J, Kim Y-J, Meng C, Irazoqui PP. Three-dimensional
microcavity array electrodes for high-capacitance all-solid-state
flexible microsupercapacitors. ACS Appl Mater Interfaces. 2016;8:
13458-13465.
82 LIU ET AL.
69. El-Kady MF, Ihns M, Li M, et al. Engineering three-dimensional
hybrid supercapacitors and microsupercapacitors for high-
performance integrated energy storage. Proc Natl Acad Sci USA.
2015;112:4233-4238.
70. Eustache E, Douard C, Retoux R, Lethien C, Brousse T. MnO
2
thin films on 3D scaffold: microsupercapacitor electrodes com-
peting with bulkcarbon electrodes. Adv Energy Mater. 2015;5:
1500680.
71. Wang X, Yin Y, Hao C, You Z. A high-performance three-
dimensional micro supercapacitor based on ripple-like ruthenium
oxidecarbon nanotube composite films. Carbon. 2015;82:436-445.
72. Dinh TM, Achour A, Vizireanu S, et al. Hydrous RuO
2
/carbon
nanowalls hierarchical structures for all-solid-state ultrahigh-energy-
density micro-supercapacitors. Nano Energy. 2014;10:288-294.
73. Du J, Zhao Y, Zhang Z, et al. High-performance pseudocapacitive
microsupercapacitors with three-dimensional current collector of
vertical ITO nanowire arrays. J Mater Chem A. 2019;7:6220-6227.
74. Ponrouch A, Garbarino S, Bertin E, Guay D. Ultra high capacitance
values of Pt@RuO
2
coreshell nanotubular electrodes for micro-
supercapacitor applications. J Power Sources. 2013;221:228-231.
75. Valero A, Mery A, Gaboriau D, Gentile P, Sadki S. One step
deposition of PEDOTPSS on ALD protected silicon nanowires:
toward ultrarobust aqueous microsupercapacitors. ACS Appl
Energy Mater. 2019;2:436-447.
76. Li J, Zhu M, An Z, Wang Z, Toda M, Ono T. Constructing in-
chip micro-supercapacitors of 3D graphene nanowall/ruthenium
oxides electrode through silicon-based microfabrication tech-
nique. J Power Sources. 2018;401:204-212.
77. Liu D, Ni K, Ye J, Xie J, Zhu Y, Song L. Tailoring the structure
of carbon nanomaterials toward high-end energy applications.
Adv Mater. 2018;30:1802104.
78. Liu Y, Zhang B, Xu Q, et al. Development of graphene oxide/
polyaniline inks for high performance flexible microsupercapacitors
via extrusion printing. Adv Funct Mater. 2018;28:1706592.
79. Liu Y, Weng B, Xu Q, et al. Facile fabrication of flexible micro-
supercapacitor with high energy density. Adv Mater Technol.
2016;1:1600166.
80. Kang J, Zhang S, Zhang Z. Three-dimensional binder-free
nanoarchitectures for advanced pseudocapacitors. Adv Mater.
2017;29:1700515.
81. Liu L, Weng Q, Lu X, Sun X, Zhang L, Schmidt OG. Advances on
microsized on-chip lithium-ion batteries. Small. 2017;13:1701847.
82. Oudenhoven JF, Baggetto L, Notten PH. All-solid-state lithium-
ion microbatteries: a review of various three-dimensional con-
cepts. Adv Energy Mater. 2011;1:10-33.
83. Long JW, Dunn B, Rolison DR, White HS. Three-dimensional
battery architectures. Chem Rev. 2004;104:4463-4492.
84. Létiche M, Eustache E, Freixas J, et al. Atomic layer deposition
of functional layers for on chip 3D Li-ion all solid state micro-
battery. Adv Energy Mater. 2017;7:1601402.
85. Hao Z, Xu L, Liu Q, et al. On-chip Ni-Zn microbattery based on hier-
archical ordered porous Ni@Ni(OH)
2
microelectrode with ultrafast ion
and electron transport kinetics. Adv Funct Mater. 2019;29:1808470.
86. Han F, Meng G, Zhou F, et al. Dielectric capacitors with three-
dimensional nanoscale interdigital electrodes for energy storage.
Sci Adv. 2015;1:e1500605.
87. Li W, Bradley L, Watkins JJ. Copolymer solid-state electrolytes
for 3D microbatteries via initiated chemical vapor deposition.
ACS Appl Mater Interfaces. 2019;11:5668-5674.
88. Hur JI, Smith LC, Dunn B. High areal energy density 3D
lithium-ion microbatteries. Joule. 2018;2:1187-1201.
89. Liang L, Sun X, Zhang J, et al. Sur/interfacial regulation in all-
solid-state rechargeable Li-ion batteries based on inorganic solid-
state electrolytes: advances and perspectives. Mater Horiz. 2019.
https://doi.org/10.1039/C8MH01593G.
90. Choi K-H, Ahn DB, Lee S-Y. Current status and challenges in
printed batteries: toward form factor-free, monolithic integrated
power sources. ACS Energy Lett. 2017;3:220-236.
91. Ambrosi A, Pumera M. 3D-printing technologies for electro-
chemical applications. Chem Soc Rev. 2016;45:2740-2755.
92. Ambrosi A, Moo JGS, Pumera M. Helical 3D-printed metal elec-
trodes as custom-shaped 3D platform for electrochemical devices.
Adv Funct Mater. 2016;26:698-703.
93. Fu K, Yao Y, Dai J, Hu L. Progress in 3D printing of carbon
materials for energy-related applications. Adv Mater. 2017;29:
1603486.
94. Zhang F, Wei M, Viswanathan VV, et al. 3D printing technologies
for electrochemical energy storage. Nano Energy. 2017;40:418-431.
95. Park SH, Kaur M, Yun D, Kim WS. Hierarchically designed
electron paths in 3D printed energy storage devices. Langmuir.
2018;34:10897-10904.
96. Yu W, Zhou H, Li BQ, Ding S. 3D printing of carbon nanotubes-
based microsupercapacitors. ACS Appl Mater Interfaces. 2017;9:
4597-4604.
97. Tian X, Jin J, Yuan S, Chua CK, Tor SB, Zhou K. Emerging 3D-
printed electrochemical energy storage devices: a critical review.
Adv Energy Mater. 2017;7:1700127.
98. Kim H, Yoon J, Lee G, et al. Encapsulated, high-performance,
stretchable array of stacked planar micro-supercapacitors as
waterproof wearable energy storage devices. ACS Appl Mater
Interfaces. 2016;8:16016-16025.
99.JiangZ,WangY,YuanS,etal.Ultrahigh-working-frequency
embedded supercapacitors with 1T phase MoSe
2
nanosheets for
system-in-package application. Adv Funct Mater. 2019;29:1807116.
100. Zhong C, Deng Y, Hu W, Qiao J, Zhang L, Zhang J. A review of
electrolyte materials and compositions for electrochemical super-
capacitors. Chem Soc Rev. 2015;44:7484-7539.
101. Balducci A. Electrolytes for high voltage electrochemical double
layer capacitors: a perspective article. J Power Sources. 2016;326:
534-540.
102. Wang X, Mathis TS, Li K, et al. Influences from solvents on charge
storage in titanium carbide MXenes. Nat Energy. 2019;4:241-248.
103. Shao Y, Li J, Li Y, Wang H, Zhang Q, Kaner RB. Flexible
quasi-solid-state planar micro-supercapacitor based on cellular
graphene films. Mater Horiz. 2017;4:1145-1150.
104. Song D, Zare Bidoky F, Secor E, Hersam MC, Frisbie CD.
Freestanding ion gels for flexible, printed, multifunctional micro-
supercapacitors. ACS Appl Mater Interfaces. 2019;11:9947-9954.
105. Zhou F, Huang H, Xiao C, et al. Electrochemically scalable pro-
duction of fluorine-modified graphene for flexible and high-
energy ionogel-based microsupercapacitors. J Am Chem Soc.
2018;140:8198-8205.
106. Yue Y, Liu N, Ma Y, et al. Highly self-healable 3D micro-
supercapacitor with MXenegraphene composite aerogel. ACS
Nano. 2018;12:4224-4232.
107. Guo K, Wan Y, Yu N, Hu L, Zhai T, Li H. Hand-drawing pat-
terned ultra-thin integrated electrodes for flexible micro super-
capacitors. Energy Storage Mater. 2018;11:144-151.
LIU ET AL.83
108. Han L, Liu K, Wang M, et al. Mussel-inspired adhesive and con-
ductive hydrogel with long-lasting moisture and extreme tempera-
ture tolerance. Adv Funct Mater. 2018;28:1704195.
109. Shang Y, Wei J, Wu C, Wang Q. Extreme temperature-tolerant
organohydrogel electrolytes for laminated assembly of biaxially
stretchable pseudocapacitors. ACS Appl Mater Interfaces. 2018;
10:42959-42966.
110. Delekta SS, Smith AD, Li J, Östling M. Inkjet printed highly
transparent and flexible graphene micro-supercapacitors. Nano-
scale. 2017;9:6998-7005.
111. Li J, Shi Q, Shao Y, et al. Cladding nanostructured AgNWs-MoS
2
electrode material for high-rate and long-life transparent in-plane
micro-supercapacitor. Energy Storage Mater. 2019;16:212-219.
AUTHOR BIOGRAPHIES
LONG LIU received his Bachelor degree
(2013) and Master degree (2016) in
Material Science from the Qingdao Uni-
versity. He is now a PhD student under
the supervision of Prof. Yong Lei in the
Ilmenau University of Technology. His
research interests focus on functional
nanostructures for supercapacitors and batteries.
HUAPING ZHAO obtained his PhD in
Materials Science from the State Key
Laboratory of Crystal Materials, Shan-
dong University in 2007. He worked as
a postdoctoral fellow successively at
the Institute of Chemistry, Chinese
Academy of Sciences, and the
University of Muenster from 2007 to 2011. Since 2012,
he works as a senior scientist and a subgroup leader in
Prof. Yong Lei's group at the Ilmenau University of
Technology. His current research focuses on the design
and fabrication of functional nanostructures for energy
storage and conversion.
YONG LEI received his PhD at Chinese
Academy of Sciences in 2001. After 2-
year postdoc research at Singapore-
MIT Alliance, he worked as an Alexan-
der von Humboldt Fellow at Karlsruhe
Institute of Technology (2003-2006).
Later, he worked at University of
Muenster as a group leader (2006-2009) and a Junior
Professor (2009-2011). In 2011, he joined Ilmenau Uni-
versity of Technology as a Chair Professor and the Head
of Group of Applied Nano-physics (Fachgebiet
Angewandte Nanophysik). His research focuses on tem-
plate-based nanostructuring, energy-related and optoelec-
tronic applications of functional nanostructures. He
received a few prestigious funding including European
Research Council Grant and BMBF (Federal Ministry of
Education and Research of Germany) project.
How to cite this article: Liu L, Zhao H, Lei Y.
Advances on three-dimensional electrodes for micro-
supercapacitors: A mini-review. InfoMat. 2019;1:
7484. https://doi.org/10.1002/inf2.12007
84 LIU ET AL.
... A pertinent strategy consists of lowering the resistance of the electrode materials [53]. In addition, the energy and power densities can also be enhanced through the topology or configuration of the device (the arrangement or geometry of the positive and negative electrodes) [6,132]. The overview of the schematic topologies used in MSCs, including parallel plate, interdigitated, and three dimensional (3D) interdigitated configurations, is shown in Figure 6a. ...
... Lethien et al. [6] provide comprehensive details on the different MSC topologies and configurations. Again, the energy storage capacity can be improved through a 3D electrode design that unblocks the "dead surface" of MSC electrodes while maintaining high mass loading within the device's footprint area [6,132,133]. ...
Article
Full-text available
Miniaturized energy storage devices, such as electrostatic nanocapacitors and electrochemical micro-supercapacitors (MSCs), are important components in on-chip energy supply systems, facilitating the development of autonomous microelectronic devices with enhanced performance and efficiency. The performance of the on-chip energy storage devices heavily relies on the electrode materials, necessitating continuous advancements in material design and synthesis. This review provides an overview of recent developments in electrode materials for on-chip MSCs and electrostatic (micro-/nano-) capacitors, focusing on enhancing energy density, power density, and device stability. The review begins by discussing the fundamental requirements for electrode materials in MSCs, including high specific surface area, good conductivity, and excellent electrochemical stability. Subsequently, various categories of electrode materials are evaluated in terms of their charge storage mechanisms, electrochemical performance, and compatibility with on-chip fabrication processes. Furthermore, recent strategies to enhance the performance of electrode materials are discussed, including nanostructuring, doping, heteroatom incorporation, hybridization with other capacitive materials, and electrode configurations.
Article
There is an urgent need for improved energy storage devices to enable advances in markets ranging from small-scale applications (such as portable electronic devices) to large-scale energy storage for transportation and electric-grid energy. Next-generation batteries must be characterized by high energy density, high power density, fast charging capabilities, operation over a wide temperature range and safety. To achieve such ambitious performance metrics, creative solutions that synergistically combine state-of-the-art material systems with advanced architectures must be developed. The development of 3D batteries is a promising solution for achieving these targets. However, considerable challenges remain related to integrating the various components of a battery into an architecture that is truly 3D. In this Review, we describe the status of 3D batteries, highlight key advances in terms of mechanistic insights and relevant performance descriptors, and suggest future steps for translating current concepts into commercially relevant solutions.
Article
Supercapacitors with superior ability to store electrical energy play a vital role in meeting the demands of energy security and sustainability. Although supercapacitors have demonstrated their promise as a revolutionary high-efficiency energy storage technology, the research and development of supercapacitors with ultra-high capacitance, extremely low DC resistance, high energy density, and high/low-temperature resistance remain the foremost challenges. Therefore, finding better materials for electrodes and electrolytes for supercapacitors is a highly engaged research topic nowadays. The high electrical conductivity and substantial surface area of carbon-based electrodes are crucial for enhancing supercapacitor performance, offering versatility for adjusting key parameters. As it is made up of different levels of pores, a carbon-based aerogel-based electrode has lots of potential to be the best choice for supercapacitors. This paper provides a concise overview of the energy storage mechanisms of different types of supercapacitors, recently developed several widely used carbon-based electrode materials for supercapacitor applications, as well as a comparative analysis and evaluation of the electrochemical performance of carbon-based and non‑carbon-based electrodes. This comprehensive study aims to assess the electrochemical performance of electrodes composed of carbon nanomaterials, metal oxides, and conducting polymers. This review article also evaluates the electrochemical performance and applications of carbon-based supercapacitors made of carbon compounds of varying macro-textures, their challenges, and future perspectives.
Article
Full-text available
The micro‐scale energy storage devices (MESDs) have experienced significant revolutions driven by developments in micro‐supercapacitors (MSCs) and micro‐batteries (MBs). This review summarizes the advancements of MSC and MB architecture, highlighting the electrode–electrolyte designs and the emergence of alkali metal ions aqueous batteries. The performance and synthesis of carbon quantum dots (CQDs), graphene quantum dots (GQDs), and their synergistic effects for energy storage applications are investigated. The focus is on integrating CQDs/GQDs into the MESDs for enhanced performance. The development of compositing CQD/GQD with other materials, reveals their capacitive and pseudocapacitive performance, extending the MESDs’ possibilities. Moreover, this review systematically covers various fabrication techniques from photolithography to printing techniques. The merits and practicality of each technique for fabricating MSCs and MBs are assessed. Electrochemical performance evaluation, capacitance enhancement, charge–discharge kinetics, and stability assessments are presented to demonstrate the efficiency of MESDs with practical applications. Despite significant progress, challenges remain, particularly in the scalability of fabrication and understanding long‐term stability. Nevertheless, the prospects are promising, with avenues in synthesis, fabrication, and electrochemical performance evaluation, which lead to a paradigm shift in MESDs. This review offers a broad perspective, combining innovations across diverse domains and directing the frontline of microelectronics.
Article
Full-text available
MXenes are the newest class of two-dimensional nanomaterials characterized by large surface area, high conductivity, and hydrophilicity. To further improve their performance for use in energy storage devices, heteroatoms or functional groups can be inserted into the Mxenes’ structure increasing their stability. This work proposes insertion of lanthanum atoms into niobium-MXene (Nb-MX/La) that was characterized in terms of morphogy, structure, and electrochemical behavior. The addition of La to the Nb-MXene structure was essential to increase the spacing between the layers, improving the interaction with the electrolyte and enabling charge/discharge cycling in a higher potential window and at higher current densities. Nb-MX/La achieved a specific capacitance of up to 157 mF cm–2, a specific capacity of 42 mAh cm–2 at 250 mV s–1, a specific power of 37.5 mW cm–2, and a specific energy of 14.1 mWh cm–2 after 1000 charge/discharge cycles at 50 mA cm–2.
Article
Full-text available
The use of biomass as carbon precursors has been extensively investigated, with a particular emphasis on examining the properties of derived porous carbon and its application in electrical double-layer capacitors (EDLCs). Biomass-derived porous carbon-based electrodes have shown promising properties that can improve the efficiency of EDLCs. However, despite the extensive research in this field, no definitive solution has been proposed. This review investigates in depth three main factors that impact the electrochemical performance of derived porous carbon-based electrodes: (1) the initial properties of raw biomass as carbon precursors, (2) operating conditions, and (3) physicochemical properties of biomass-derived porous carbon materials. Examined operating conditions include synthesis techniques, activating agents, the mass ratio of the activating agent to the raw biomass as porous carbon precursors, carbonization/activation duration, operating temperature, and the mass of the active material in the electrode. The surface morphology and surface functional groups were used to evaluate the physicochemical properties of derived porous carbon materials. Multiple factors influence the properties of porous carbon derived from biomass and, consequently, the efficiency of the electrodes made from these materials. This study reveals that the properties of porous carbon-based electrodes derived from biomass vary from one biomass to another and are affected by various parameters, conditions, and synthesis techniques. Therefore, it is impossible to rely exclusively on a single factor to improve the electrochemical performance of EDLC electrodes. A thorough consideration of the multiple factors is required to optimize the properties and performance of the electrodes.
Article
Full-text available
Rapid developments in semiconductor, low-power integrated circuit (IC), and packaging technologies are accelerating the reduction in size and weight of autonomous electronic devices, including wireless implantable medical devices, [ 1-3 ] micro-electro-mechanical systems (MEMS), [ 4 ] and active radio frequency identi-fi cation (RFID) tags. [ 5 ] This, in turn, drives an increasing demand for rechargeable high-performance energy storage devices that are small enough for miniaturized microelectronic applications. Recently, micro-supercapacitors have attracted tremendous attention as potential solutions to this demand with their capability of providing high power on a small scale. [ 6-8 ] However, previous achievements in this fi eld have largely concentrated on the electrode engineering, and advances have been confi ned only to the electrode material level, without further consideration for their practical integration and utilization in miniature electronic systems. In particular, no method has been previously suggested for the compact encapsulation of the electrolyte at the micro-scale. In addition, the electrical routing path and contact pads in those devices are typically distributed over a large area, connected to the active electrodes on the same layer. [ 6,9 ] These limitations encountered in previous work result in a signifi cant increase in the total device size, and hence, the micro-supercapacitors are usually too large for incorporation into microelectronic systems. To the best of our knowledge, there are no reports achieving a compact micro-supercapacitor with an entire device size smaller than 1 mm 2. Moreover, compact integration becomes far more challenging, or even impractical, when multiple supercapacitors need to be combined for the necessary powering modules. These last two challenges, miniaturization of the entire supercapacitor device and integration of the resultant device with ICs in parallel or series architectures, are addressed here. We report a novel integrated, fl exible and all-solid-state micro-supercapacitor technology with 3D micro-integration capability. We uniquely embedded the entire electrical routing path and contact pads within the effective device area, utilizing the novel fabrication of through-via bottom electrodes. In addition, the entire device was successfully packaged with a solid-state electrolyte at the microscale. Consequently, our supercapacitors are highly miniaturized (≈720 μ m × 720 μ m × 50 μ m) and have surface-mount integration capability in manufacturable systems. Pseudocapacitive polyaniline (PANI) nanowires are used as the active electrode, which acquires a superior specifi c capacitance (areal/volumetric capacitance of 45.2 mF cm −2 /105 F cm −3) with high energy and power densities (7.4 mWh cm −3 and 128 W cm −3 , respectively). The devices are not only small and fl exible, but can also be combined into ultracompact powering modules with excellent electrochemical performance for versatile power handling applications. We develop a novel material and fabrication strategy that considers all the device components to achieve miniature devices with micro-integration capability. Our integrated 3D micro-super-capacitor has the following confi guration: 1) two supercapacitive electrodes solidifi ed within a solid-state polymer electrolyte on the topside of a fl exible polymer substrate; 2) two electrical contact pads aligned on the backside of the substrate; and 3) topside electrodes and backside pads electrically connected by through-via metal interconnects. We solve the problem of microscale elec-trolyte encapsulation by fi rst coating the device with solid-state electrolyte over a larger area and then dicing out the microscale device (Figure 1 a). We use polyaniline as the active electrode material because of its relatively high pseudocapacitance as well as its low cost, ease of synthesis, and fl exibility. To maximize the specifi c surface area and fully utilize its pseudocapacitance, we grow PANI nanowires using a potentiodynamical polymeriza-tion technique that can precisely control the micro-morphology of the PANI electrodes. Compared with conventional devices obtained on one side of a substrate, our approach effi ciently utilizes the available room on both sides of the substrate, leading to a substantially more compact device. In addition, the backside contact electrodes enable surface-mounting of multiple single devices side by side on a patterned circuitry substrate, achieving ultracompact micro-supercapacitor modules. These ultracom-pact modules allow practical applications in microsystem having various energy/power requirements. To the best of our knowledge , we report the smallest supercapacitor device ever achieved, with all the device components embedded within a sub-square-millimeter area, and the fi rst surface-mount-type all-solid-state supercapacitor with 3D micro-integration capability. A liquid crystal polymer (LCP) sheet is used as a thin and fl ex-ible host substrate. The LCP is chemically inert and microma-chining compatible, [ 10 ] effectively enabling the fabrication of
Article
Full-text available
All‐solid‐state on‐chip SiC supercapacitors (SCs) based on free‐standing SiC nanowire arrays (NWAs) are reported. In comparison to the widely used technique based on the interdigitated fingers, the present strategy can be much more facile for constructing on‐chip SCs devices, which is directly sandwiched with a solid electrolyte layer between two pieces of SiC NWAs film without any substrate. The mass loading of active materials of on‐chip SiC SCs can be up to ≈5.6 mg cm⁻², and the total device thickness is limited in ≈40 µm. The specific area energy and power densities of the SCs device reach 5.24 µWh cm⁻² and 11.2 mW cm⁻², and their specific volume energy and power densities run up to 1.31 mWh cm–3 and 2.8 W cm⁻³, respectively, which are two orders of magnitude higher than those of state‐of‐the‐art SiC‐based SCs, and also much higher than those of other solid‐state carbon‐based SCs ever reported. Furthermore, such on‐chip SCs exhibit superior rate capability and robust stability with over 94% capacitance retention after 10 000 cycles at a scan rate of 100 mV s⁻¹, representing their high performance in all merits.
Article
Full-text available
Pseudocapacitive energy storage in supercapacitor electrodes differs significantly from the electrical double-layer mechanism of porous carbon materials, which requires a change from conventional thinking when choosing appropriate electrolytes. Here we show how simply changing the solvent of an electrolyte system can drastically influence the pseudocapacitive charge storage of the two-dimensional titanium carbide, Ti3C2 (a representative member of the MXene family). Measurements of the charge stored by Ti3C2 in lithium-containing electrolytes with nitrile-, carbonate- and sulfoxide-based solvents show that the use of a carbonate solvent doubles the charge stored by Ti3C2 when compared with the other solvent systems. We find that the chemical nature of the electrolyte solvent has a profound effect on the arrangement of molecules/ions in Ti3C2, which correlates directly to the total charge being stored. Having nearly completely desolvated lithium ions in Ti3C2 for the carbonate-based electrolyte leads to high volumetric capacitance at high charge–discharge rates, demonstrating the importance of considering all aspects of an electrochemical system during development.
Article
Full-text available
Developing the next generation of supercapacitor technology that exceeds the working frequency of conventional aluminum electrolyte capacitors with an ultralong life is significantly important for future microelectronic applications. In article number 1807116, Cheng Yang and co‐workers report a laser triggered method for converting MoSe2 into 1T phase for electrodes in a microsupercapacitor, showing great promise as embeddable components for system‐in‐package and system‐on‐chip applications. image
Article
Full-text available
On‐chip microbatteries have attracted growing attention due to their great feasibility for integration with miniaturized electronic devices. Nevertheless, it is difficult to get both high energy/power densities in microbatteries. An increase in the thickness of microelectrodes may help to boost the areal energy density of device, yet it often leads to terrible sacrifice in its power density due to the longer electron and ion diffusion distances. In this work, a quasi‐solid‐state on‐chip Ni–Zn microbattery is designed based on a hierarchical ordered porous (HOP) Ni@Ni(OH)2 microelectrode, which is developed by an in situ anodizing strategy. The fabricated microelectrode can optimize ion and electron transport simultaneously due to its interconnected ordered macropore–mesopore network and high electron conductivity. As the thickness of microelectrode increases, the areal energy density of HOP Ni@Ni(OH)2 microelectrode shows an ascending trend with negligible sacrifice in power density and rate performance. Impressively, this Ni–Zn microbattery achieves excellent energy/power densities (0.26 mW h cm−2, 33.8 mW cm−2), outperforming most previous reported microenergy storage devices. This study may provide new direction in high‐performance and highly safe microenergy storage units for next‐generation highly integrated microelectronics. A quasi‐solid‐state on‐chip Ni–Zn microbattery with excellent performance is demonstrated based on a hierarchical ordered porous (HOP) Ni@Ni(OH)2 microelectrode. Attributed to the optimized ion and electron transport of the HOP Ni@Ni(OH)2 microelectrode, the Ni–Zn microbattery achieves ultrahigh energy/power densities and excellent rate performance simultaneously, outperforming most of reported microenergy storage devices.
Article
In-plane asymmetric micro-supercapacitors with ultrahigh energy density are rationally constructed using nano-sandwiched metal hexacyanoferrate/graphene hybrid thin films.
Article
Recently, all-solid-state lithium ion batteries (ASLBs) with stable inorganic solid-state electrolytes (ISEs) have been considered as most promising strategies to address the safety concerns and energy density of conventional lithium-ion batteries. The crucial challenge in exploring advanced ISEs lies in how to effectively overcome the charge-transfer resistance barrier originating from the solid-solid sur-/interfaces. In the review, the up-to-date achievements in ISEs-based ASLBs with major focus on regulating sur-/interfacial behaviors are summarized. Firstly, the current status, key findings, fundamental properties and ion-transport mechanisms of the ISEs are presented and discussed in detail. Corresponding innovative methodologies to improve ionic conductivity of ISEs are introduced. Then, structural/compositional characteristics and chemical/electrochemical behaviors occurring at solid-solid sur-/interfaces are systematically comprehended. The practical strategies to address the sur-/interfacial issues including regulation in humid air, cathodes (anodes)/ISEs, and grain boundaries are highlighted. Finally, comprehensive suggestions for in-depth understanding and manipulating the sur-/interfaces, and meaningful perspective on future research directions in ISEs-based ASLBs are provided. The present review presents constructive insights into the solid-solid sur-/interfacial phenomena in smart design of ISEs for advanced ASLBs, and will render more efficient researches and fundamental understandings for tremendous advances in ASLBs in the future.
Article
Freestanding ion gels (FIGs) provide unique opportunities for scalable, low-cost fabrication of flexible microsupercapacitors (MSCs). While conventional MSCs employ a distinct electrolyte and substrate, FIGs perform both functions, offering new possibilities for device integration and multifunctionality while maintaining high performance. Here, a capillarity-driven printing method is demonstrated to manufacture high-precision graphene electrodes on FIGs for MSCs. This method achieves excellent self-alignment and resolution (width: 50 μm, device footprint: <1 mm2), 100% fabrication yield (48/48 devices), and is readily generalized to alternative electrode materials including multi-walled carbon nanotubes (MWCNTs). The devices demonstrate good performance, including high specific capacitance (graphene: 0.600 mF cm-2; MWCNT: 6.64 mF cm-2) and excellent stability against bending, folding, and electrical cycling. Moreover, this strategy offers unique opportunities for device design and integration, including a bifacial electrode structure with enhanced capacitance (graphene: 0.673 mF cm-2; MWCNT: 7.53 mF cm-2) and improved rate performance, print-and-place versatility for integration on diverse substrates, and multifunctionality for light emission and transistor gating. These compelling results demonstrate the potential of FIGs for scalable, low-cost fabrication of flexible, printed, and multifunctional energy storage devices.
Article
Over the past decade, electrochemical energy storage (EES) devices have greatly improved, as a wide variety of advanced electrode active materials and new device architectures have been developed. These new materials and devices should be evaluated against clear and rigorous metrics, primarily based on the evidence of real performances. A series of criteria are commonly used to characterize and report performance of EES systems in the literature. However, as advanced EES systems are becoming more and more sophisticated, the methodologies to reliably evaluate the performance of the electrode active materials and EES devices need to be refined to realize the true promise as well as the limitations of these fast-moving technologies, and target areas for further development. In the absence of a commonly accepted core group of metrics, inconsistencies may arise between the values attributed to the materials or devices and their real performances. Herein, we provide an overview of the energy storage devices from conventional capacitors to supercapacitors to hybrid systems and ultimately to batteries. The metrics for evaluation of energy storage systems are described, although the focus is kept on capacitive and hybrid energy storage systems. In addition, we discuss the challenges that still need to be addressed for establishing more sophisticated criteria for evaluating EES systems. We hope this effort will foster ongoing dialog and promote greater understanding of these metrics to develop an international protocol for accurate assessment of EES systems.
Article
To meet the explosive development of miniaturized electronic devices, miniaturized power sources are highly demanded. Due to high power density, long life time and safety in use, microsupercapacitors (MSCs) become promising candidates of miniaturized energy storage devices. However, most of reported MSCs possess a thin-film or papery stacked structures which exhibit a low areal or volumetric energy density. In order to improve the performance of MSCs to meet the demands of wider practical applications, the mass loading of active materials must be increased properly. Here, we report an In2O3:Sn (ITO) NWs three-dimensional (3D) network which serves as current collector and 3D scaffold of MSCs. After loading active material (MnO2) and applying a facile and scalable laser assisted fabrication strategy, the ITO NWs@MnO2 based in-plane interdigital MSC could exhibit high areal capacitance of 193.8 mF cm⁻². Moreover, it reveals a superior areal energy density of 26.94 µWh cm⁻² with a peak areal power energy density of 15.07 mW cm⁻² due to highly conductive 3D network design and intimate contact between network and active material. As far as we know, it is the first time to introduce ITO NWs into MSCs. Therefore, this work offers a versatile ITO NWs 3D network into pseudocapacitive MSCs which are promising miniaturized energy storage devices with high performance.