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FIB/SEM technology in NEMS/MEMS fabrication and investigation
... In addition, the results of such work are, in most cases, dependent on the subjective judgment of the researcher, and as a result may contain a large number of faults and significant errors [45]. They may differ from one researcher to another and have poor reproducibility [46]. ...
The modern challenge of materials science is the analysis of the surface of nanostructures, which is complicated by the small size of the nano-objects and their number. In the presented study, we demonstrate a technique for evaluating the basic indices of the micromorphology of porous surfaces by analyzing the microscopic image of the surface. Image processing and analysis software packages, such as ImageJ and Origin, were used for optimization, automation and accuracy of analysis. Such analysis allows us to evaluate the surface of nanostructures by various indicators: the shape and number of nano-objects, their location and distribution by diameter, perimeter, etc. In addition, modeling the growth of nano-objects in the depth of the crystal allows to trace the dynamics of the nanostructures’ synthesis process and to create nanostructures with predetermined parameters. Such studies are necessary to ensure reproducibility, uniformity and accuracy of experiments for the production of nanostructures on an industrial scale.
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