Improved Ge surface passivation with ultrathin SiOX enabling high-mobility surface channel pMOSFETs featuring a HfSiO/WN gate stack

Microelectron. Res. Center, Univ. of Texas, Austin, TX
IEEE Electron Device Letters (Impact Factor: 2.75). 05/2007; 28(4):308 - 311. DOI: 10.1109/LED.2007.893274
Source: IEEE Xplore


To realize high-mobility surface channel pMOSFETs on Ge, a 1.6-nm-thick SiOX passivation layer between the bulk Ge substrate and HfSiO gate dielectric was introduced. This approach provides a simple alternative to epitaxial Si deposition followed by selective oxidation and leads to one of the highest peak hole mobilities reported for unstrained surface channel pMOSFETs on Ge: 332 cm2 middotV-1middots-1 at 0.05 MV/cm-a 2times enhancement over the universal Si/SiO2 mobility. The devices show well-behaved output and transfer characteristics, an equivalent oxide thickness of 1.85 nm and an ION/IOFF ratio of 3times103 without detectable fast transient charging. The high hole mobility of these devices is attributed to adequate passivation of the Ge surface

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    ABSTRACT: The electrical properties and high-field reliability of HfTa-based gate-dielectric metal–oxide–semiconductor (MOS) devices with and without AlON interlayer on Ge substrate are investigated. Experimental results show that the MOS capacitor with HfTaON/AlON stack gate dielectric exhibits low interface-state/oxide-charge densities, low gate leakage, small capacitance equivalent thickness (∼1.1nm), and high dielectric constant (∼20). All of these should be attributed to the blocking role of the ultrathin AlON interlayer against interdiffusions of Ge, Hf, and Ta and penetration of O into the Ge substrate, with the latter effectively suppressing the unintentional formation of unstable poor-quality low-k GeO x and giving a superior AlON/Ge interface. Moreover, incorporation of N into both the interlayer and high-k dielectric further improves the device reliability under high-field stress through the formation of strong N-related bonds.
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