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Manufacturing Metrology Team
Fig. 2. CSI measurements of metal AM surfaces: (a) S1, (b) S2, (c) S3, and (d) S4. The 1.4× objecve lens (1×
zoom) was used for (a), the 5.5× objecve lens (0.5× zoom) was used for (b), the 5.5× objecve lens (1×
zoom) was used for (c) and (d)
Fig. 3. Eects of spectral ltering and fringe analysis methods on data coverage. 5.5× objecve lens
was used. The data coverage is ploed as a funcon of a) Sq and b) Sdq
OPTIMISATION OF SURFACE TOPOGRAPHY CHARACTERISATION FOR METAL ADDITIVE
MANUFACTURING USING COHERENCE SCANNING INTERFEROMETRY
Carlos Gómez1, Rong Su1, Adam Thompson1, Jack DiSciacca2, Simon Lawes1 and Richard Leach1
1Manufacturing Metrology Team, University of Nongham, NG7 2RD, UK 2Zygo Corporaon, Middleeld, CT 06455 USA
Table 1. Surface texture parameters for the test cases. An S-lter and an L-lter were applied to remove
high frequency noise and long scale waviness/form
Fig. 4. Eects of signal oversampling on data
coverage. 5.5× objecve lens, narrow bandwidth
spectrum and coherence prole fringe analysis
method were used
Fig. 6. Eects of signal oversampling on data coverage for S4. 5.5× objecve lens, narrow bandwidth spec-
trum and coherence prole fringe analysis method were used. (a) Eect of camera exposure me; (b) meas-
urement without signal oversampling (0.5× zoom); and (c) result with 8× signal oversampling (0.5× zoom)
Fig. 5. Comparison between HDR and signal
oversampling and a measurement performed
without using advanced funcons. The data
coverage is ploed as a funcon of Sdq
Surfaces Sq /µm Sdq
S1 LPBF Al-Si-10Mg cube, top surface 19 ± 2 0.6 ± 0.1
S2 LPBF Al-Si-10Mg cube, side surface 20 ± 3 1.0 ± 0.2
S3 LPBF Ti-6Al-4V cube, top surface 22 ± 3 1.1 ± 0.1
S4 EBPBF Ti-6Al-4V rectangular prism, top surface 34 ± 2 1.7 ± 0.2
Summary and outlook
The eects of the advanced measurement funcons on the measurements of several
typical AM surfaces have been demonstrated. Results show that the CSI technique is fea-
sible for measuring surface topography in metal AM
Increasing the signal oversampling factor in combinaon with the use of a narrow band-
width source spectrum will maximise data coverage without sacricing measurement ar-
ea, but measurement me may be compromised. Recommendaons are provided for
the opmisaon of measurements on metal AM surfaces in terms of me, measurement
area and data coverage
This study also presents insight into areas of interest for future rigorous examinaon,
such as measurement noise and further development of guidelines for the measurement
of metal AM surfaces
Movaon
Metal AM surfaces are rough and can be challenging to measure, due to the presence of
complex features, which include high slopes, step like recesses and protuberances, and
local variaons in reectance
Coherence scanning interferometry (CSI) is a non-contact measurement method that us-
es a broadband light source and interference to measure surface topography and object
geometry, originally designed for measuring smooth surfaces
Recent progress in the development of the CSI technique allows a signicantly enhanced
detecon sensivity through advanced measurement funcons, such as ltering of the
source spectrum, high dynamic range (HDR) lighng levels, adjustable number of camera
acquisions over each interference fringe (i.e. oversampling) and sophiscated topogra-
phy reconstrucon algorithms
Method
A ZYGO NewView™ 8300 CSI system was used for this study. The experimental design co-
vers the following aspects:
Four common metal AM surfaces made from dierent materials and processes (laser
powder bed fusion (LPBF), electron beam powder bed fusion (EBPBF))
A series of measurements performed by using a combinaon of three objecve lenses
and two opcal zoom factors, two spectral lters, two fringe analysis methods, ve
sengs of signal oversampling and two HDR lighng levels. Topographic measurements
are described through areal surface texture parameters Sq and Sdq and are analysed for
data coverage, measurement me and area
Fig. 1. CSI data acquision (data rates are more than a million surface height points per second)
Objecves
Demonstrate the feasibility of using CSI for characterising metal AM surfaces
Evaluate the eecveness of relevant CSI measurement sengs
Provide recommendaons for the opmisaon of measurements on metal AM surfaces
using CSI
CSI measurements of metal AM surfaces Eects of measurement funcons and sengs
S1/S2 S3 S4
Source spectrum ltering Narrow (40 nm BP lter)
Fringe analysis method Coherence prole
Zoom lens 1×
Objecve lens 1.4×* 5.5× 5.5×
Oversampling factor -- -- or 4* 2 or 8*
* For data coverage > 99 %
Table 2. Measurement opmisaon for metal AM surfaces (95% data coverage by default)