... This chapter provides a general classification and detailed discussion on the use of collected MCM equipment. The following tables demonstrate the defect methods by diverse types of data acquisition equipment of MCM, including charge-coupled device (CCD) cameras in Table 7 [28,32,33,36,38,41,44,49,50,[95][96][97][98][99][100][101][102][103], optical microscopes in Table 8 [21, 39, 40, 44, 52, 70-72, 78, 104-107], scanning electron microscope (SEM) in Table 9 Fig. 12 Schematic of defect detection methodology Table 7 Defect study methods by using CCD Cameras [28,32,33,36,38,41,44,49,50,[95][96][97][98][99][100][101][102][103] [27,40,45,51,65,67,71,75,104,105,108,109], and cameras with embedded image processors in Table 10 [37,41,46,63,70,78,87,107,108,[110][111][112][113][114][115]. ...